Subsurface damage distribution characterization of ground surfaces using Abbott–Firestone curves

doi:10.1364/OE.20.013551

Subsurface damage distribution characterization of ground surfaces using Abbott–Firestone curves

Raynald Laheurte, Philippe Darnis, Nathalie Darbois, Olivier Cahuc, and Jérôme Neauport »View Author Affiliations

Optics Express, Vol. 20, Issue 12, pp. 13551-13559 (2012)
http://dx.doi.org/10.1364/OE.20.013551

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Abstract
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References (13)
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Abstract

Measurement of subsurface damage (SSD) induced by grinding process is of major interest in the development of high laser damage fused silica optical components manufacturing processes. Most SSD measurements methods give only access to the peak to peak value. We herein report on the benefit of using Abbott–Firestone curves to get an insight of the SSD distribution inside the optical material. We evidence on various diamond wheel ground fused silica substrates that such an approach is complementary to a classical SSD peak to peak measurement and bring useful information to optimize a grinding process.

OCIS Codes
(140.3330) Lasers and laser optics : Laser damage
(220.1920) Optical design and fabrication : Diamond machining

ToC Category:
Lasers and Laser Optics

History
Original Manuscript: March 16, 2012
Revised Manuscript: April 20, 2012
Manuscript Accepted: April 30, 2012
Published: June 1, 2012

Citation
Raynald Laheurte, Philippe Darnis, Nathalie Darbois, Olivier Cahuc, and Jérôme Neauport, "Subsurface damage distribution characterization of ground surfaces using Abbott–Firestone curves," Opt. Express 20, 13551-13559 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-12-13551

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References

M. D. Feit and A. M. Rubenchik, “Influence of subsurface cracks on laser induced surface damage,” Proc. SPIE5273, 264–272 (2004). [CrossRef]
M. A. Josse, H. Bercegol, R. Courchinoux, T. Donval, L. Lamaignère, B. Pussacq, and J. L. Rullier, “Study of the evolution of mechanical defects on silica samples under laser irradiation at 355 nm,” Proc. SPIE6403, 64030E, 64030E-7 (2006). [CrossRef]
J. Lambropoulos, “Micromechanics of material-removal mechanisms from brittle surfaces,” LLE Review74, 131–138 (1998).
Y. Zhou, D. Funkenbusch, D. J. Quesnel, D. Golini, and A. Lindquist, “Effect of etching and imaging mode on the measurement of subsurface damage in microground optical glasses,” J. Am. Ceram. Soc.77(12), 3277–3280 (1994). [CrossRef]
J. A. Randi, J. C. Lambropoulos, and S. D. Jacobs, “Subsurface damage in some single crystalline optical materials,” Appl. Opt.44(12), 2241–2249 (2005). [CrossRef] [PubMed]
T. Suratwala, L. Wong, P. Miller, M. D. Feit, J. Menapace, R. Steele, P. Davis, and D. Walmer, “Sub-surface mechanical damage distributions during grinding of fused silica,” J. Non-Cryst. Solids352(52-54), 5601–5617 (2006). [CrossRef]
F. W. Preston, “The structure of abraded glass surfaces,” Trans. Opt. Soc.23(3), 141–164 (1922). [CrossRef]
J. Neauport, C. Ambard, P. Cormont, N. Darbois, J. Destribats, C. Luitot, and O. Rondeau, “Subsurface damage measurement of ground fused silica parts by HF etching techniques,” Opt. Express17(22), 20448–20456 (2009). [CrossRef] [PubMed]
J. Neauport, P. Cormont, P. Legros, C. Ambard, and J. Destribats, “Imaging subsurface damage of grinded fused silica optics by confocal fluorescence microscopy,” Opt. Express17(5), 3543–3554 (2009). [CrossRef] [PubMed]
E. J. Abbott and F. A. Firestone, “Specifying surface quality: a method based on accurate measurement and comparison,” Mech. Eng.55, 569–572 (1933).
M. Bigerelle and A. Iost, “A numerical method to calculate the Abbott parameters: A wear application,” Tribol. Int.40(9), 1319–1334 (2007). [CrossRef]
A. Brient, M. Brissot, T. Rouxel, and J. C. Sangleboeuf, “Influence of grinding parameters on glass workpieces surface finish using response surface methodology,” J. Manuf. Sci. Eng.133(4), 044501 (2011). [CrossRef]
AFNOR, “NF EN ISO 13565,” in Geometrical Product Specifications (GPS)–Surface texture: Profile method; Surfaces having stratified functional properties, (Paris, 1998).

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[1] M. D. Feit and A. M. Rubenchik, “Influence of subsurface cracks on laser induced surface damage,” Proc. SPIE5273, 264–272 (2004). [CrossRef]

[2] M. A. Josse, H. Bercegol, R. Courchinoux, T. Donval, L. Lamaignère, B. Pussacq, and J. L. Rullier, “Study of the evolution of mechanical defects on silica samples under laser irradiation at 355 nm,” Proc. SPIE6403, 64030E, 64030E-7 (2006). [CrossRef]

[3] J. Lambropoulos, “Micromechanics of material-removal mechanisms from brittle surfaces,” LLE Review74, 131–138 (1998).

[4] Y. Zhou, D. Funkenbusch, D. J. Quesnel, D. Golini, and A. Lindquist, “Effect of etching and imaging mode on the measurement of subsurface damage in microground optical glasses,” J. Am. Ceram. Soc.77(12), 3277–3280 (1994). [CrossRef]

[5] J. A. Randi, J. C. Lambropoulos, and S. D. Jacobs, “Subsurface damage in some single crystalline optical materials,” Appl. Opt.44(12), 2241–2249 (2005). [CrossRef] [PubMed]

[6] T. Suratwala, L. Wong, P. Miller, M. D. Feit, J. Menapace, R. Steele, P. Davis, and D. Walmer, “Sub-surface mechanical damage distributions during grinding of fused silica,” J. Non-Cryst. Solids352(52-54), 5601–5617 (2006). [CrossRef]

[7] F. W. Preston, “The structure of abraded glass surfaces,” Trans. Opt. Soc.23(3), 141–164 (1922). [CrossRef]

[8] J. Neauport, C. Ambard, P. Cormont, N. Darbois, J. Destribats, C. Luitot, and O. Rondeau, “Subsurface damage measurement of ground fused silica parts by HF etching techniques,” Opt. Express17(22), 20448–20456 (2009). [CrossRef] [PubMed]

[9] J. Neauport, P. Cormont, P. Legros, C. Ambard, and J. Destribats, “Imaging subsurface damage of grinded fused silica optics by confocal fluorescence microscopy,” Opt. Express17(5), 3543–3554 (2009). [CrossRef] [PubMed]

[10] E. J. Abbott and F. A. Firestone, “Specifying surface quality: a method based on accurate measurement and comparison,” Mech. Eng.55, 569–572 (1933).

[11] M. Bigerelle and A. Iost, “A numerical method to calculate the Abbott parameters: A wear application,” Tribol. Int.40(9), 1319–1334 (2007). [CrossRef]

[12] A. Brient, M. Brissot, T. Rouxel, and J. C. Sangleboeuf, “Influence of grinding parameters on glass workpieces surface finish using response surface methodology,” J. Manuf. Sci. Eng.133(4), 044501 (2011). [CrossRef]

[13] AFNOR, “NF EN ISO 13565,” in Geometrical Product Specifications (GPS)–Surface texture: Profile method; Surfaces having stratified functional properties, (Paris, 1998).

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Subsurface damage distribution characterization of ground surfaces using Abbott–Firestone curves