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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 15 — Jul. 16, 2012
  • pp: 16291–16298

Single-mode and wavelength tunable lasers based on deep-submicron slots fabricated by standard UV-lithography

Tingting Yu, Li Zou, Lei Wang, and Jian-Jun He  »View Author Affiliations


Optics Express, Vol. 20, Issue 15, pp. 16291-16298 (2012)
http://dx.doi.org/10.1364/OE.20.016291


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Abstract

By reversing the pillars formed on SiO2 mask sidewalls, it is possible to fabricate deep-submicron slots with width down to 240nm by standard UV-lithography. Based on this newly developed process, a single-mode slotted Fabry-Perot laser and a wavelength tunable laser with periodically distributed slots are designed, fabricated and characterized. Numerical analysis shows the low-loss advantage of deep-submicron slots. Experimentally, the slotted Fabry-Perot laser showed a low threshold current of 22mA and the tunable slotted grating laser exhibited a maximum side mode suppression ratio (SMSR) of 43dB and a discretely tuning range of about 38nm. The method has excellent potential for low cost fabrication of photonic devices with deep-submicron features without using expensive tools such as the e-beam lithography.

© 2012 OSA

OCIS Codes
(140.5960) Lasers and laser optics : Semiconductor lasers
(250.5300) Optoelectronics : Photonic integrated circuits

ToC Category:
Lasers and Laser Optics

History
Original Manuscript: March 5, 2012
Revised Manuscript: April 19, 2012
Manuscript Accepted: June 21, 2012
Published: July 3, 2012

Citation
Tingting Yu, Li Zou, Lei Wang, and Jian-Jun He, "Single-mode and wavelength tunable lasers based on deep-submicron slots fabricated by standard UV-lithography," Opt. Express 20, 16291-16298 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-15-16291


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