|
|
Focused ion beam engineered whispering gallery mode resonators with open cavity structure |
Optics Express, Vol. 20, Issue 16, pp. 18091-18096 (2012)
http://dx.doi.org/10.1364/OE.20.018091
Enhanced HTML
Acrobat PDF (2756 KB)
Abstract
We report the realization of an open cavity whispering gallery mode optical resonator, in which the circulating light traverses a free space gap. We utilize focused ion beam microfabrication to precisely cut a 10 μm wide notch into the perimeter of a crystalline disc. We have shown that this modified resonator structure supports high quality modes, and demonstrated qualify factor, Q ≃ 106, limited by the notch surface roughness due to the ion milling process. Furthermore, we investigated the spatial profile of the modes inside the open cavity with a microfabricated probe mechanism. This new type of resonator structure facilitates interaction of the cavity’s optical field with mechanical resonators as well as individual atoms or molecules.
© 2012 OSA
OCIS Codes
(140.4780) Lasers and laser optics : Optical resonators
(220.4000) Optical design and fabrication : Microstructure fabrication
(220.4880) Optical design and fabrication : Optomechanics
(230.5750) Optical devices : Resonators
(280.4788) Remote sensing and sensors : Optical sensing and sensors
ToC Category:
Lasers and Laser Optics
History
Original Manuscript: July 17, 2012
Revised Manuscript: July 18, 2012
Manuscript Accepted: July 18, 2012
Published: July 23, 2012
Citation
David C. Aveline, Lukas Baumgartel, Byungmin Ahn, and Nan Yu, "Focused ion beam engineered whispering gallery mode resonators with open cavity structure," Opt. Express 20, 18091-18096 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-16-18091
Sort: Year | Journal | Reset
References
- K. J. Vahala, “Optical microcavities,” Nature424, 839–846 (2003). [CrossRef] [PubMed]
- I. S. Grudinin, V. S. Ilchenko, and L. Maleki, “Ultrahigh optical Q factors of crystalline resonators in the linear regime,” Phys. Rev. A74, 063806 (2006). [CrossRef]
- M. Borselli, K. Srinivasan, P. E. Barclay, and O. Painter, “Rayleigh scattering, mode coupling, and optical loss in silicon microdisks,” Appl. Phys. Lett.85, 3693–3695 (2004). [CrossRef]
- M. Soltani, S. Yegnanarayanan, and A. Adibi, “Ultra-high Q planar silicon microdisk resonators for chip-scale silicon photonics,” Opt. Express15, 4694–4704 (2007). [CrossRef] [PubMed]
- S. Wang, K. Broderick, H. Smith, and Y. Yi, “Strong coupling between on chip notched ring resonator and nanoparticle,” Appl. Phys. Lett.97, 051102 (2010). [CrossRef]
- S. Sridaran and S. Bhave, “Opto-acoustic oscillator using silicon MEMS optical modulator,” in “Solid-State Sensors, Actuators and Microsystems Conference, 2011 16th International,” 2920–2923 (2011). [CrossRef]
- T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Demonstration of ultra-high-Q small mode volume toroid microcavities on a chip,” Appl. Phys. Lett.85, 6113–6115 (2004). [CrossRef]
- A. A. Savchenkov, V. S. Ilchenko, A. B. Matsko, and L. Maleki, “Kilohertz optical resonances in dielectric crystal cavities,” Phys. Rev. A70, 051804 (2004). [CrossRef]
- J. Gierak, A. Madouri, A. Biance, E. Bourhis, G. Patriarche, C. Ulysse, D. Lucot, X. Lafosse, L. Auvray, L. Bruchhaus, and R. Jede, “Sub-5nm FIB direct patterning of nanodevices,” Microelectron. Eng.84, 779–783 (2007). [CrossRef]
- D. J. Moss, V. G. Ta’eed, B. J. Eggleton, D. Freeman, S. Madden, M. Samoc, B. Luther-Davies, S. Janz, and D.-X. Xu, “Bragg gratings in silicon-on-insulator waveguides by focused ion beam milling,” Appl. Phys. Lett.85, 4860–4862 (2004). [CrossRef]
- J. Schrauwen, D. V. Thourhout, and R. Baets, “Focused-ion-beam fabricated vertical fiber couplers on silicon-on-insulator waveguides,” Appl. Phys. Lett.89, 141102 (2006). [CrossRef]
- J. Schrauwen, J. Van Lysebettens, T. Claes, K. De Vos, P. Bienstman, D. Van Thourhout, and R. Baets, “Focused-Ion-Beam fabrication of slots in silicon waveguides and ring resonators,” IEEE Photonic. Tech. L.20, 2004–2006 (2008). [CrossRef]
- Y. Kim, A. Danner, J. Raftery, and K. Choquette, “Focused ion beam nanopatterning for optoelectronic device fabrication,” IEEE J. Sel. Top. Quant.11, 1292–1298 (2005). [CrossRef]
- H.-B. Kim, “Focused ion beam fabrication of curved structures using the concept of beam shaping and variable dwell time,” Microelectron. Eng.88, 3365–3371 (2011). [CrossRef]
- C. F. Wang, Y.-S. Choi, J. C. Lee, E. L. Hu, J. Yang, and J. E. Butler, “Observation of whispering gallery modes in nanocrystalline diamond microdisks,” Appl. Phys. Lett.90, 081110 (2007). [CrossRef]
- L. A. M. Barea, F. Vallini, A. R. Vaz, J. R. Mialichi, and N. C. Frateschi, “Low-roughness active microdisk resonators fabricated by focused ion beam,” J. Vac. Sci. Technol.B 27, 2979–2981 (2009).
- J. R. Mialichi, L. A. M. Barea, P. L. D. Souza, R. M. S. Kawabata, M. P. Pires, and N. C. Frateschi, “Resonance modes in InAs/InGaAlAs/InP quantum dot microdisk resonators,” ECS Trans.31, 289–293 (2010). [CrossRef]
- M. Ding, G. S. Murugan, G. Brambilla, and M. N. Zervas, “Whispering gallery mode selection in optical bottle microresonators,” Appl. Phys. Lett.100, 081108 (2012). [CrossRef]
- M. L. Gorodetsky, A. D. Pryamikov, and V. S. Ilchenko, “Rayleigh scattering in high-Q microspheres,” J. Opt. Soc. Am. B17, 1051–1057 (2000). [CrossRef]
- V. S. Ilchenko, X. S. Yao, and L. Maleki, “Pigtailing the high-Q microsphere cavity: a simple fiber coupler for optical whispering-gallery modes,” Opt. Lett.24, 723–725 (1999). [CrossRef]
- D. S. Weiss, V. Sandoghdar, J. Hare, V. Lèfevre-Seguin, J.-M. Raimond, and S. Haroche, “Splitting of high-Q mie modes induced by light backscattering in silica microspheres,” Opt. Lett.20, 1835–1837 (1995). [CrossRef] [PubMed]
- A. Mazzei, S. Götzinger, L. de S. Menezes, G. Zumofen, O. Benson, and V. Sandoghdar, “Controlled coupling of counterpropagating whispering-gallery modes by a single rayleigh scatterer: A classical problem in a quantum optical light,” Phys. Rev. Lett.99, 173603 (2007). [CrossRef] [PubMed]
- J. Zhu, S. K. Ozdemir, Y.-F. Xiao, L. Li, L. He, D.-R. Chen, and L. Yang, “On-chip single nanoparticle detection and sizing by mode splitting in an ultrahigh-Q microresonator,” Nat. Photonics4, 46–49 (2010). [CrossRef]
- M. Ostrowski, P. Pignalosa, H. Smith, and Y. Yi, “Higher-order optical resonance node detection of integrated disk microresonator,” Opt. Lett.36, 3042–3044 (2011). [CrossRef] [PubMed]
Cited By |
OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.





OSA is a member of 