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MZI optical isolator with Si-wire waveguides by surface-activated direct bonding |
Optics Express, Vol. 20, Issue 16, pp. 18440-18448 (2012)
http://dx.doi.org/10.1364/OE.20.018440
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Abstract
We fabricate a Mach-Zehnder interferometer-based optical isolator using a silicon-wire waveguide with magneto-optic garnet cladding using direct bonding techniques. Using Si-wire waveguides, the size of the device is greatly reduced from that of our previous device. We investigate surface-activated direct bonding with nitrogen plasma treatment, which shows better bonding results than oxygen plasma treatment. A large magneto-optic phase shift of 0.8π and an optical isolation of 18 dB are obtained at a wavelength of 1322 nm.
© 2012 OSA
OCIS Codes
(160.3820) Materials : Magneto-optical materials
(230.3120) Optical devices : Integrated optics devices
(230.3240) Optical devices : Isolators
ToC Category:
Optical Devices
History
Original Manuscript: May 3, 2012
Revised Manuscript: July 17, 2012
Manuscript Accepted: July 22, 2012
Published: July 27, 2012
Citation
Yuya Shoji, Masatoshi Ito, Yuya Shirato, and Tetsuya Mizumoto, "MZI optical isolator with Si-wire waveguides by surface-activated direct bonding," Opt. Express 20, 18440-18448 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-16-18440
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References
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