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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 18 — Aug. 27, 2012
  • pp: 19868–19881

Profile measurement of transparent inclined surface with transmitted differential interference contrast shearing interferometer

Sheng-Kang Yu, Wei-Lun Chen, Ting-Kun Liu, and Shih-Chieh Lin  »View Author Affiliations

Optics Express, Vol. 20, Issue 18, pp. 19868-19881 (2012)

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A quantitative phase shifting differential interference contrast (PS-DIC) shearing interferometer is adopted to measure the profile of transparent specimen with inclined surface. The effects of the incline angle on DIC measurement accuracy were studied. The optical model of the test system was constructed and the measurement of surface with various incline angles ranging from 5° to 60° was simulated. The experiments validate the simulation model and show the feasibility of profile reconstruction of inclined structure. It is interested to find that even with an inclined angle of 15°, unwrapping technique is required to make the measurement more accurate. In addition, the measurement can be further improved by taking into account the effects of the change in shear distance on the optical path difference. This study provides useful information that should be considered for complex geometry measurement with quantitative DIC technique.

© 2012 OSA

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: May 14, 2012
Revised Manuscript: June 14, 2012
Manuscript Accepted: June 14, 2012
Published: August 15, 2012

Sheng-Kang Yu, Wei-Lun Chen, Ting-Kun Liu, and Shih-Chieh Lin, "Profile measurement of transparent inclined surface with transmitted differential interference contrast shearing interferometer," Opt. Express 20, 19868-19881 (2012)

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