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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 18 — Aug. 27, 2012
  • pp: 20078–20089

Modified Roberts-Langenbeck test for measuring thickness and refractive index variation of silicon wafers

Jungjae Park, Lingfeng Chen, Quandou Wang, and Ulf Griesmann  »View Author Affiliations


Optics Express, Vol. 20, Issue 18, pp. 20078-20089 (2012)
http://dx.doi.org/10.1364/OE.20.020078


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Abstract

We describe a method to simultaneously measure thickness variation and refractive index homogeneity of 300 mm diameter silicon wafers using a wavelength-shifting Fizeau interferometer operating at 1550 nm. Only three measurements are required, corresponding to three different cavity configurations. A customized phase shifting algorithm is used to suppress several high order harmonics and minimize intensity sampling errors. The new method was tested with both silicon and fused silica wafers and measurement results proved to be highly repeatable. The reliability of the method was further verified by comparing the measured thickness variation of a 150 mm diameter wafer to a measurement of the wafer flatness after bonding the wafer to an optical flat.

© 2012 OSA

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
(140.3070) Lasers and laser optics : Infrared and far-infrared lasers
(160.6000) Materials : Semiconductor materials

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: May 22, 2012
Revised Manuscript: July 18, 2012
Manuscript Accepted: July 20, 2012
Published: August 17, 2012

Citation
Jungjae Park, Lingfeng Chen, Quandou Wang, and Ulf Griesmann, "Modified Roberts-Langenbeck test for measuring thickness and refractive index variation of silicon wafers," Opt. Express 20, 20078-20089 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-18-20078


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