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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 18 — Aug. 27, 2012
  • pp: 20576–20581

Broadband and wide-angle distributed Bragg reflectors based on amorphous germanium films by glancing angle deposition

Jung Woo Leem and Jae Su Yu  »View Author Affiliations

Optics Express, Vol. 20, Issue 18, pp. 20576-20581 (2012)

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We fabricated the distributed Bragg reflectors (DBRs) with amorphous germanium (a-Ge) films consisted of the same materials at a center wavelength (λc) of 1.33 μm by the glancing angle deposition. Their optical reflectance properties were investigated in the infrared wavelength region of 1-1.9 μm at incident light angles (θinc) of 8-70°, together with the theoretical analysis using a rigorous coupled-wave analysis simulation. The two alternating a-Ge films at the incident vapor flux angles of 0 and 75° were formed as the high and low refractive index materials, respectively. The a-Ge DBR with only 5 periods exhibited a normalized stop bandwidth (∆λ/λc) of ~24.1%, maintaining high reflectance (R) values of > 99%. Even at a high θinc of 70°, the ∆λ/λc was ~21.9%, maintaining R values of > 85%. The a-Ge DBR with good uniformity was obtained over the area of a 2 inch Si wafer. The calculated reflectance results showed a similar tendency to the measured data.

© 2012 OSA

OCIS Codes
(230.1480) Optical devices : Bragg reflectors
(310.1860) Thin films : Deposition and fabrication
(310.4165) Thin films : Multilayer design

ToC Category:
Thin Films

Original Manuscript: July 17, 2012
Revised Manuscript: August 15, 2012
Manuscript Accepted: August 15, 2012
Published: August 22, 2012

Jung Woo Leem and Jae Su Yu, "Broadband and wide-angle distributed Bragg reflectors based on amorphous germanium films by glancing angle deposition," Opt. Express 20, 20576-20581 (2012)

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