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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 19 — Sep. 10, 2012
  • pp: 21678–21686

Profile estimation for Pt submicron wire on rough Si substrate from experimental data

Mirza Karamehmedović, Poul-Erik Hansen, Kai Dirscherl, Emir Karamehmedović, and Thomas Wriedt  »View Author Affiliations


Optics Express, Vol. 20, Issue 19, pp. 21678-21686 (2012)
http://dx.doi.org/10.1364/OE.20.021678


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Abstract

An efficient forward scattering model is constructed for penetrable 2D submicron particles on rough substrates. The scattering and the particle-surface interaction are modeled using discrete sources with complex images. The substrate micro-roughness is described by a heuristic surface transfer function. The forward model is applied in the numerical estimation of the profile of a platinum (Pt) submicron wire on rough silicon (Si) substrate, based on experimental Bidirectional Reflectance Distribution Function (BRDF) data.

© 2012 OSA

OCIS Codes
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(110.3200) Imaging systems : Inverse scattering

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: June 21, 2012
Revised Manuscript: July 23, 2012
Manuscript Accepted: August 7, 2012
Published: September 6, 2012

Citation
Mirza Karamehmedović, Poul-Erik Hansen, Kai Dirscherl, Emir Karamehmedović, and Thomas Wriedt, "Profile estimation for Pt submicron wire on rough Si substrate from experimental data," Opt. Express 20, 21678-21686 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-19-21678


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References

  1. F. González, G. Videen, P. J. Valle, J. M. Saiz, J. L. de la Peña, and F. Moreno, “Light scattering computational methods for particles on substrates,” J. Quant. Spectrosc. Radiat. Transf.70(4-6), 383–393 (2001). [CrossRef]
  2. E. Eremina, Yu. Eremin, and T. Wriedt, “Analysis of the light scattering properties of a gold nanorod on a plane surface via discrete sources method,” Opt. Commun.273(1), 278–285 (2007). [CrossRef]
  3. E. Eremina, Yu. Eremin, and T. Wriedt, “Discrete sources method for simulation of resonance spectra of nonspherical nanoparticles on a plane surface,” Opt. Commun.246(4-6), 405–413 (2005). [CrossRef]
  4. P. Albella, F. Moreno, J. M. Saiz, and F. González, “2D double interaction method for modeling small particles contaminating microstructures located on substrates,” J. Quant. Spectrosc. Radiat. Transf.106(1-3), 4–10 (2007). [CrossRef]
  5. M. Karamehmedović, P.-E. Hansen, and T. Wriedt, “An efficient scattering model for PEC and penetrable nanowires on a dielectric substrate,” J. Eur. Opt. Soc. Rapid Publ.6, 11021 (2011). [CrossRef]
  6. T. A. Germer, G. W. Mulholland, J. H. Kim, and S. H. Ehrman, “Measurement of the 100 nm NIST SRM® 1963 by laser surface light scattering,” Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components, Angela Duparré and Bhanwar Singh, Eds., Proc. SPIE 4779, 60–71 (2002).
  7. J. L. de la Peña, J. M. Saiz, P. J. Valle, F. González, and F. F. Moreno, “Tracking Scattering Minima to Size Metallic Particles on Flat Substrates,” Part. Part. Syst. Charact.16(3), 113–118 (1999). [CrossRef]
  8. P. Albella, F. Moreno, J. M. Saiz, and F. González, “Backscattering of metallic microstructures with small defects located on flat substrates,” Opt. Express15(11), 6857–6867 (2007). [CrossRef] [PubMed]
  9. J. M. Saiz, J. L. de la Peña, F. González, and F. Moreno, “Detection and recognition of local defects in 1D structures,” Opt. Commun.196(1-6), 33–39 (2001). [CrossRef]
  10. B. W. Bell and W. S. Bickel, “Single fiber light scattering matrix: an experimental determination,” Appl. Opt.20(22), 3874–3879 (1981). [CrossRef] [PubMed]
  11. M. Karamehmedović, P.-E. Hansen, and T. Wriedt, “A fast inversion method for highly conductive submicron wires on a substrate,” J. Eur. Opt. Soc. Rapid Publ.6, 11039 (2011). [CrossRef]
  12. D. Colton and R. Kress, Inverse Acoustic and Electromagnetic Scattering Theory. (Springer, 1998).
  13. J. C. Stover, Optical Scattering: Measurement and Analysis, 2nd ed. (SPIE, 1995).
  14. E. D. Palik, Handbook of Optical Constants of Solids. (Academic Press, 1985).
  15. I. V. Lindell and E. Alanen, “Exact Image Theory for the Sommerfeld Half-Space Problem, Part I: Vertical Magnetic Dipole,” IEEE Trans. Antenn. Propag.32(2), 126–133 (1984). [CrossRef]
  16. J. E. Harvey, E. C. Moran, and W. P. Zmek, “Transfer function characterization of grazing incidence optical systems,” Appl. Opt.27(8), 1527–1533 (1988). [CrossRef] [PubMed]
  17. H. Fujiwara, Spectroscopic Ellipsometry: Principles and Applications. (Wiley, 2007).
  18. M. Karamehmedović, M.-P. Sørensen, P.-E. Hansen, and A. V. Lavrinenko, “Application of the method of auxiliary sources to a defect-detection inverse problem of optical diffraction microscopy,” J. Eur. Opt. Soc. Rapid Publ.5, 10021 (2010). [CrossRef]
  19. S. Schröder, A. Duparré, L. Coriand, A. Tünnermann, D. H. Penalver, and J. E. Harvey, “Modeling of light scattering in different regimes of surface roughness,” Opt. Express19(10), 9820–9835 (2011). [CrossRef] [PubMed]

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