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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 26 — Dec. 10, 2012
  • pp: B238–B243

Cost-effective CMOS-compatible grating couplers with backside metal mirror and 69% coupling efficiency

Wissem Sfar Zaoui, María Félix Rosa, Wolfgang Vogel, Manfred Berroth, Jörg Butschke, and Florian Letzkus  »View Author Affiliations


Optics Express, Vol. 20, Issue 26, pp. B238-B243 (2012)
http://dx.doi.org/10.1364/OE.20.00B238


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Abstract

A highly efficient grating structure for the coupling between standard optical fibers and single-mode waveguides in the silicon-on-insulator platform realized in a CMOS fabrication process is presented. The cost-effective method introduces a backside metal mirror to the grating coupler without need of an extensive wafer-to-wafer bonding. A coupling efficiency of −1.6 dB (around 69%) near the telecommunication wavelength 1550 nm and a large 1dB-bandwidth of 48 nm are achieved.

© 2012 OSA

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(130.0130) Integrated optics : Integrated optics

ToC Category:
Waveguide and Optoelectronic Devices

History
Original Manuscript: September 5, 2012
Revised Manuscript: October 9, 2012
Manuscript Accepted: October 9, 2012
Published: November 29, 2012

Virtual Issues
European Conference on Optical Communication 2012 (2012) Optics Express

Citation
Wissem Sfar Zaoui, María Félix Rosa, Wolfgang Vogel, Manfred Berroth, Jörg Butschke, and Florian Letzkus, "Cost-effective CMOS-compatible grating couplers with backside metal mirror and 69% coupling efficiency," Opt. Express 20, B238-B243 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-26-B238


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References

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