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Demonstration of electrooptic modulation at 2165nm using a silicon Mach-Zehnder interferometerMackenzie A. Van Camp, Solomon Assefa, Douglas M. Gill, Tymon Barwicz, Steven M. Shank, Philip M. Rice, Teya Topuria, and William M. J. Green »View Author Affiliations
Mackenzie A. Van Camp,1
Solomon Assefa,1
Douglas M. Gill,1
Tymon Barwicz,1
Steven M. Shank,2
Philip M. Rice,3
Teya Topuria,3
and William M. J. Green1,*
1IBM T. J. Watson Research Center, 1101 Kitchawan Road, Yorktown Heights, NY 10598, USA 2IBM Systems & Technology Group, Microelectronics Division, 1000 River St., Essex Junction, VT 05452, USA 3IBM Almaden Research Center, 650 Harry Road, San Jose, CA 95120, USA *Corresponding author: wgreen@us.ibm.com |
Optics Express, Vol. 20, Issue 27, pp. 28009-28016 (2012)
http://dx.doi.org/10.1364/OE.20.028009
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Abstract
We demonstrate electrooptic modulation at a wavelength of 2165nm, using a free-carrier injection-based silicon Mach-Zehnder modulator. The modulator has a Vπ∙L figure of merit of 0.12V∙mm, and an extinction ratio of −23dB. Optical modulation experiments are performed at bitrates up to 3Gbps. Our results illustrate that optical modulator design methodologies previously developed for telecom-band devices can be successfully applied to produce high-performance devices for a silicon nanophotonic mid-infrared integrated circuit platform.
© 2012 OSA
OCIS Codes
(250.5300) Optoelectronics : Photonic integrated circuits
(250.7360) Optoelectronics : Waveguide modulators
ToC Category:
Optoelectronics
History
Original Manuscript: September 17, 2012
Revised Manuscript: November 19, 2012
Manuscript Accepted: November 19, 2012
Published: December 3, 2012
Citation
Mackenzie A. Van Camp, Solomon Assefa, Douglas M. Gill, Tymon Barwicz, Steven M. Shank, Philip M. Rice, Teya Topuria, and William M. J. Green, "Demonstration of electrooptic modulation at 2165nm using a silicon Mach-Zehnder interferometer," Opt. Express 20, 28009-28016 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-27-28009
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- P. Y. Yang, S. Stankovic, J. Crnjanski, E. J. Teo, D. Thomson, A. A. Bettiol, M. B. H. Breese, W. Headley, C. Giusca, G. T. Reed, and G. Z. Mashanovich, “Silicon photonic waveguides for mid- and long-wave infrared region,” J. Mater. Sci.20, S159–S163 (2009).
- S. Zlatanovic, J. S. Park, S. Moro, J. M. C. Boggio, I. B. Divliansky, N. Alic, S. Mookherjea, and S. Radic, “Mid-infrared wavelength conversion in silicon waveguides using ultracompact telecom-band-derived pump source,” Nat. Photonics4(8), 561–564 (2010). [CrossRef]
- H. Yu, M. Pantouvaki, J. Van Campenhout, D. Korn, K. Komorowska, P. Dumon, Y. Li, P. Verheyen, P. Absil, L. Alloatti, D. Hillerkuss, J. Leuthold, R. Baets, and W. Bogaerts, “Performance tradeoff between lateral and interdigitated doping patterns for high speed carrier-depletion based silicon modulators,” Opt. Express20(12), 12926–12938 (2012). [CrossRef] [PubMed]
- D. J. Thomson, F. Y. Gardes, J.-M. Fedeli, S. Zlatanovic, Y. Hu, B. P. P. Kuo, E. Myslivets, N. Alic, S. Radic, G. Z. Mashanovich, and G. T. Reed, “50-Gb/s silicon optical modulator,” IEEE Photon. Technol. Lett.24(4), 234–236 (2012). [CrossRef]
- D. J. Thomson, F. Y. Gardes, Y. Hu, G. Mashanovich, M. Fournier, P. Grosse, J.-M. Fedeli, and G. T. Reed, “High contrast 40Gbit/s optical modulation in silicon,” Opt. Express19(12), 11507–11516 (2011). [CrossRef] [PubMed]
- N. Ophir, R. K. W. Lau, M. Menard, R. Salem, K. Padmaraju, Y. Okawachi, M. Lipson, A. L. Gaeta, and K. Bergman, “First demonstration of a 10-Gb/s RZ end-to-end four-wave-mixing based link at 1884 nm using silicon nanowaveguides,” IEEE Photon. Technol. Lett.24(4), 276–278 (2012). [CrossRef]
- R. K. W. Lau, M. Ménard, Y. Okawachi, M. A. Foster, A. C. Turner-Foster, R. Salem, M. Lipson, and A. L. Gaeta, “Continuous-wave mid-infrared frequency conversion in silicon nanowaveguides,” Opt. Lett.36(7), 1263–1265 (2011). [CrossRef] [PubMed]
- D. J. Thomson, F. Y. Gardes, J.-M. Fedeli, S. Zlatanovic, Y. Hu, B. P. P. Kuo, E. Myslivets, N. Alic, S. Radic, G. Z. Mashanovich, and G. T. Reed, “50-Gb/s silicon optical modulator,” IEEE Photon. Technol. Lett.24(4), 234–236 (2012). [CrossRef]
- A. Brimont, D. J. Thomson, P. Sanchis, J. Herrera, F. Y. Gardes, J. M. Fedeli, G. T. Reed, and J. Martí, “High speed silicon electro-optical modulators enhanced via slow light propagation,” Opt. Express19(21), 20876–20885 (2011). [CrossRef] [PubMed]
- D. J. Thomson, F. Y. Gardes, Y. Hu, G. Mashanovich, M. Fournier, P. Grosse, J.-M. Fedeli, and G. T. Reed, “High contrast 40Gbit/s optical modulation in silicon,” Opt. Express19(12), 11507–11516 (2011). [CrossRef] [PubMed]
- N. Hattasan, A. Gassenq, L. Cerutti, J.-B. Rodriguez, E. Tournie, and G. Roelkens, “Heterogeneous integration of GaInAsSb p-i-n photodiodes on a silicon-on-insulator waveguide circuit,” IEEE Photon. Technol. Lett.23(23), 1760–1762 (2011). [CrossRef]
- P. Y. Yang, S. Stankovic, J. Crnjanski, E. J. Teo, D. Thomson, A. A. Bettiol, M. B. H. Breese, W. Headley, C. Giusca, G. T. Reed, and G. Z. Mashanovich, “Silicon photonic waveguides for mid- and long-wave infrared region,” J. Mater. Sci.20, S159–S163 (2009).
- F. Capasso, R. Paiella, R. Martini, R. Colombelli, C. Gmachl, T. L. Myers, M. S. Taubman, R. M. Williams, C. G. Bethea, K. Unterrainer, H. Y. Hwang, D. L. Sivco, A. Y. Cho, A. M. Sergent, H. C. Liu, and E. A. Whittaker, “Quantum cascade lasers: Ultrahigh-speed operation, optical wireless communication, narrow linewidth, and far-infrared emission,” IEEE J. Quantum Electron.38(6), 511–532 (2002). [CrossRef]
- J. C. Rosenberg, W. M. J. Green, S. Assefa, D. M. Gill, T. Barwicz, M. Yang, S. M. Shank, and Y. A. Vlasov, “A 25 Gbps silicon microring modulator based on an interleaved junction,” Opt. Express20(24), 26411–26423 (2012). [CrossRef]
- B. Kuyken, X. Liu, R. M. Osgood, R. Baets, G. Roelkens, and W. M. J. Green, “Mid-infrared to telecom-band supercontinuum generation in highly nonlinear silicon-on-insulator wire waveguides,” Opt. Express19(21), 20172–20181 (2011). [CrossRef] [PubMed]
- B. Kuyken, X. Liu, G. Roelkens, R. Baets, R. M. Osgood, and W. M. J. Green, “50 dB parametric on-chip gain in silicon photonic wires,” Opt. Lett.36(22), 4401–4403 (2011). [CrossRef] [PubMed]
- X. Liu, R. M. Osgood, Y. A. Vlasov, and W. M. J. Green, “Mid-infrared optical parametric amplifier using silicon nanophotonic waveguides,” Nat. Photonics4(8), 557–560 (2010). [CrossRef]
- J. Van Campenhout, W. M. J. Green, S. Assefa, and Y. A. Vlasov, “Integrated NiSi waveguide heaters for CMOS-compatible silicon thermo-optic devices,” Opt. Lett.35(7), 1013–1015 (2010). [CrossRef] [PubMed]
- J. Van Campenhout, W. M. J. Green, S. Assefa, and Y. A. Vlasov, “Low-power, 2 x 2 silicon electro-optic switch with 110-nm bandwidth for broadband reconfigurable optical networks,” Opt. Express17(26), 24020–24029 (2009). [CrossRef] [PubMed]
- W. M. J. Green, M. J. Rooks, L. Sekaric, and Y. A. Vlasov, “Ultra-compact, low RF power, 10 Gb/s silicon Mach-Zehnder modulator,” Opt. Express15(25), 17106–17113 (2007). [CrossRef] [PubMed]
- N. Hattasan, A. Gassenq, L. Cerutti, J.-B. Rodriguez, E. Tournie, and G. Roelkens, “Heterogeneous integration of GaInAsSb p-i-n photodiodes on a silicon-on-insulator waveguide circuit,” IEEE Photon. Technol. Lett.23(23), 1760–1762 (2011). [CrossRef]
- P. Y. Yang, S. Stankovic, J. Crnjanski, E. J. Teo, D. Thomson, A. A. Bettiol, M. B. H. Breese, W. Headley, C. Giusca, G. T. Reed, and G. Z. Mashanovich, “Silicon photonic waveguides for mid- and long-wave infrared region,” J. Mater. Sci.20, S159–S163 (2009).
- H. Yu, M. Pantouvaki, J. Van Campenhout, D. Korn, K. Komorowska, P. Dumon, Y. Li, P. Verheyen, P. Absil, L. Alloatti, D. Hillerkuss, J. Leuthold, R. Baets, and W. Bogaerts, “Performance tradeoff between lateral and interdigitated doping patterns for high speed carrier-depletion based silicon modulators,” Opt. Express20(12), 12926–12938 (2012). [CrossRef] [PubMed]
- T. Baehr-Jones, R. Ding, Y. Liu, A. Ayazi, T. Pinguet, N. C. Harris, M. Streshinsky, P. Lee, Y. Zhang, A. E.-J. Lim, T.-Y. Liow, S. H.-G. Teo, G.-Q. Lo, and M. Hochberg, “Ultralow drive voltage silicon traveling-wave modulator,” Opt. Express20(11), 12014–12020 (2012). [CrossRef] [PubMed]
- A. Spott, Y. Liu, T. Baehr-Jones, R. Ilic, and M. Hochberg, “Silicon waveguides and ring resonators at 5.5 μm,” Appl. Phys. Lett.97(21), 213501 (2010). [CrossRef]
- T. Baehr-Jones, A. Spott, R. Ilic, A. Spott, B. Penkov, W. Asher, and M. Hochberg, “Silicon-on-sapphire integrated waveguides for the mid-infrared,” Opt. Express18(12), 12127–12135 (2010). [CrossRef] [PubMed]
- D. J. Thomson, F. Y. Gardes, J.-M. Fedeli, S. Zlatanovic, Y. Hu, B. P. P. Kuo, E. Myslivets, N. Alic, S. Radic, G. Z. Mashanovich, and G. T. Reed, “50-Gb/s silicon optical modulator,” IEEE Photon. Technol. Lett.24(4), 234–236 (2012). [CrossRef]
- X. Xiao, X. Li, H. Xu, Y. Hu, K. Xiong, Z. Li, T. Chu, J. Yu, and Y. Yu, “44-Gb/s silicon microring modulators based on zigzag PN junctions,” IEEE Photon. Technol. Lett.24(19), 1712–1714 (2012). [CrossRef]
- D. J. Thomson, F. Y. Gardes, Y. Hu, G. Mashanovich, M. Fournier, P. Grosse, J.-M. Fedeli, and G. T. Reed, “High contrast 40Gbit/s optical modulation in silicon,” Opt. Express19(12), 11507–11516 (2011). [CrossRef] [PubMed]
- G. Z. Mashanovich, M. M. Milošević, M. Nedeljkovic, N. Owens, B. Xiong, E. J. Teo, and Y. Hu, “Low loss silicon waveguides for the mid-infrared,” Opt. Express19(8), 7112–7119 (2011). [CrossRef] [PubMed]
- F. Capasso, R. Paiella, R. Martini, R. Colombelli, C. Gmachl, T. L. Myers, M. S. Taubman, R. M. Williams, C. G. Bethea, K. Unterrainer, H. Y. Hwang, D. L. Sivco, A. Y. Cho, A. M. Sergent, H. C. Liu, and E. A. Whittaker, “Quantum cascade lasers: Ultrahigh-speed operation, optical wireless communication, narrow linewidth, and far-infrared emission,” IEEE J. Quantum Electron.38(6), 511–532 (2002). [CrossRef]
- A. Spott, Y. Liu, T. Baehr-Jones, R. Ilic, and M. Hochberg, “Silicon waveguides and ring resonators at 5.5 μm,” Appl. Phys. Lett.97(21), 213501 (2010). [CrossRef]
- T. Baehr-Jones, A. Spott, R. Ilic, A. Spott, B. Penkov, W. Asher, and M. Hochberg, “Silicon-on-sapphire integrated waveguides for the mid-infrared,” Opt. Express18(12), 12127–12135 (2010). [CrossRef] [PubMed]
- L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, and M. Paniccia, “40 Gbit/s silicon optical modulator for high speed applications,” Electron. Lett.43(22), 1196–1197 (2007). [CrossRef]
- H. Yu, M. Pantouvaki, J. Van Campenhout, D. Korn, K. Komorowska, P. Dumon, Y. Li, P. Verheyen, P. Absil, L. Alloatti, D. Hillerkuss, J. Leuthold, R. Baets, and W. Bogaerts, “Performance tradeoff between lateral and interdigitated doping patterns for high speed carrier-depletion based silicon modulators,” Opt. Express20(12), 12926–12938 (2012). [CrossRef] [PubMed]
- H. Yu, M. Pantouvaki, J. Van Campenhout, D. Korn, K. Komorowska, P. Dumon, Y. Li, P. Verheyen, P. Absil, L. Alloatti, D. Hillerkuss, J. Leuthold, R. Baets, and W. Bogaerts, “Performance tradeoff between lateral and interdigitated doping patterns for high speed carrier-depletion based silicon modulators,” Opt. Express20(12), 12926–12938 (2012). [CrossRef] [PubMed]
- D. J. Thomson, F. Y. Gardes, J.-M. Fedeli, S. Zlatanovic, Y. Hu, B. P. P. Kuo, E. Myslivets, N. Alic, S. Radic, G. Z. Mashanovich, and G. T. Reed, “50-Gb/s silicon optical modulator,” IEEE Photon. Technol. Lett.24(4), 234–236 (2012). [CrossRef]
- B. Kuyken, X. Liu, G. Roelkens, R. Baets, R. M. Osgood, and W. M. J. Green, “50 dB parametric on-chip gain in silicon photonic wires,” Opt. Lett.36(22), 4401–4403 (2011). [CrossRef] [PubMed]
- B. Kuyken, X. Liu, R. M. Osgood, R. Baets, G. Roelkens, and W. M. J. Green, “Mid-infrared to telecom-band supercontinuum generation in highly nonlinear silicon-on-insulator wire waveguides,” Opt. Express19(21), 20172–20181 (2011). [CrossRef] [PubMed]
- N. Ophir, R. K. W. Lau, M. Menard, R. Salem, K. Padmaraju, Y. Okawachi, M. Lipson, A. L. Gaeta, and K. Bergman, “First demonstration of a 10-Gb/s RZ end-to-end four-wave-mixing based link at 1884 nm using silicon nanowaveguides,” IEEE Photon. Technol. Lett.24(4), 276–278 (2012). [CrossRef]
- R. K. W. Lau, M. Ménard, Y. Okawachi, M. A. Foster, A. C. Turner-Foster, R. Salem, M. Lipson, and A. L. Gaeta, “Continuous-wave mid-infrared frequency conversion in silicon nanowaveguides,” Opt. Lett.36(7), 1263–1265 (2011). [CrossRef] [PubMed]
- H. Yu, M. Pantouvaki, J. Van Campenhout, D. Korn, K. Komorowska, P. Dumon, Y. Li, P. Verheyen, P. Absil, L. Alloatti, D. Hillerkuss, J. Leuthold, R. Baets, and W. Bogaerts, “Performance tradeoff between lateral and interdigitated doping patterns for high speed carrier-depletion based silicon modulators,” Opt. Express20(12), 12926–12938 (2012). [CrossRef] [PubMed]
- X. Xiao, X. Li, H. Xu, Y. Hu, K. Xiong, Z. Li, T. Chu, J. Yu, and Y. Yu, “44-Gb/s silicon microring modulators based on zigzag PN junctions,” IEEE Photon. Technol. Lett.24(19), 1712–1714 (2012). [CrossRef]
- H. Yu, M. Pantouvaki, J. Van Campenhout, D. Korn, K. Komorowska, P. Dumon, Y. Li, P. Verheyen, P. Absil, L. Alloatti, D. Hillerkuss, J. Leuthold, R. Baets, and W. Bogaerts, “Performance tradeoff between lateral and interdigitated doping patterns for high speed carrier-depletion based silicon modulators,” Opt. Express20(12), 12926–12938 (2012). [CrossRef] [PubMed]
- X. Xiao, X. Li, H. Xu, Y. Hu, K. Xiong, Z. Li, T. Chu, J. Yu, and Y. Yu, “44-Gb/s silicon microring modulators based on zigzag PN junctions,” IEEE Photon. Technol. Lett.24(19), 1712–1714 (2012). [CrossRef]
- L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, and M. Paniccia, “40 Gbit/s silicon optical modulator for high speed applications,” Electron. Lett.43(22), 1196–1197 (2007). [CrossRef]
- N. Ophir, R. K. W. Lau, M. Menard, R. Salem, K. Padmaraju, Y. Okawachi, M. Lipson, A. L. Gaeta, and K. Bergman, “First demonstration of a 10-Gb/s RZ end-to-end four-wave-mixing based link at 1884 nm using silicon nanowaveguides,” IEEE Photon. Technol. Lett.24(4), 276–278 (2012). [CrossRef]
- R. K. W. Lau, M. Ménard, Y. Okawachi, M. A. Foster, A. C. Turner-Foster, R. Salem, M. Lipson, and A. L. Gaeta, “Continuous-wave mid-infrared frequency conversion in silicon nanowaveguides,” Opt. Lett.36(7), 1263–1265 (2011). [CrossRef] [PubMed]
- Q. Xu, S. Manipatruni, B. Schmidt, J. Shakya, and M. Lipson, “12.5 Gbit/s carrier-injection-based silicon micro-ring silicon modulators,” Opt. Express15(2), 430–436 (2007). [CrossRef] [PubMed]
- L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, and M. Paniccia, “40 Gbit/s silicon optical modulator for high speed applications,” Electron. Lett.43(22), 1196–1197 (2007). [CrossRef]
- F. Capasso, R. Paiella, R. Martini, R. Colombelli, C. Gmachl, T. L. Myers, M. S. Taubman, R. M. Williams, C. G. Bethea, K. Unterrainer, H. Y. Hwang, D. L. Sivco, A. Y. Cho, A. M. Sergent, H. C. Liu, and E. A. Whittaker, “Quantum cascade lasers: Ultrahigh-speed operation, optical wireless communication, narrow linewidth, and far-infrared emission,” IEEE J. Quantum Electron.38(6), 511–532 (2002). [CrossRef]
- B. Kuyken, X. Liu, G. Roelkens, R. Baets, R. M. Osgood, and W. M. J. Green, “50 dB parametric on-chip gain in silicon photonic wires,” Opt. Lett.36(22), 4401–4403 (2011). [CrossRef] [PubMed]
- B. Kuyken, X. Liu, R. M. Osgood, R. Baets, G. Roelkens, and W. M. J. Green, “Mid-infrared to telecom-band supercontinuum generation in highly nonlinear silicon-on-insulator wire waveguides,” Opt. Express19(21), 20172–20181 (2011). [CrossRef] [PubMed]
- X. Liu, R. M. Osgood, Y. A. Vlasov, and W. M. J. Green, “Mid-infrared optical parametric amplifier using silicon nanophotonic waveguides,” Nat. Photonics4(8), 557–560 (2010). [CrossRef]
- T. Baehr-Jones, R. Ding, Y. Liu, A. Ayazi, T. Pinguet, N. C. Harris, M. Streshinsky, P. Lee, Y. Zhang, A. E.-J. Lim, T.-Y. Liow, S. H.-G. Teo, G.-Q. Lo, and M. Hochberg, “Ultralow drive voltage silicon traveling-wave modulator,” Opt. Express20(11), 12014–12020 (2012). [CrossRef] [PubMed]
- A. Spott, Y. Liu, T. Baehr-Jones, R. Ilic, and M. Hochberg, “Silicon waveguides and ring resonators at 5.5 μm,” Appl. Phys. Lett.97(21), 213501 (2010). [CrossRef]
- F. Capasso, R. Paiella, R. Martini, R. Colombelli, C. Gmachl, T. L. Myers, M. S. Taubman, R. M. Williams, C. G. Bethea, K. Unterrainer, H. Y. Hwang, D. L. Sivco, A. Y. Cho, A. M. Sergent, H. C. Liu, and E. A. Whittaker, “Quantum cascade lasers: Ultrahigh-speed operation, optical wireless communication, narrow linewidth, and far-infrared emission,” IEEE J. Quantum Electron.38(6), 511–532 (2002). [CrossRef]
- D. J. Thomson, F. Y. Gardes, J.-M. Fedeli, S. Zlatanovic, Y. Hu, B. P. P. Kuo, E. Myslivets, N. Alic, S. Radic, G. Z. Mashanovich, and G. T. Reed, “50-Gb/s silicon optical modulator,” IEEE Photon. Technol. Lett.24(4), 234–236 (2012). [CrossRef]
- G. Z. Mashanovich, M. M. Milošević, M. Nedeljkovic, N. Owens, B. Xiong, E. J. Teo, and Y. Hu, “Low loss silicon waveguides for the mid-infrared,” Opt. Express19(8), 7112–7119 (2011). [CrossRef] [PubMed]
- M. Nedeljkovic, R. Soref, and G. Z. Mashanovich, “Free-carrier electro-refraction and electro-absorption modulation predictions for silicon over the 1-14μm infrared wavelength range,” IEEE Photon. J.3(6), 1171–1180 (2011). [CrossRef]
- M. M. Milošević, P. S. Matavulj, P. Y. Yang, A. Bagolini, and G. Z. Mashanovich, “Rib waveguides for mid-infrared silicon photonics,” J. Opt. Soc. Am. B26(9), 1760–1766 (2009). [CrossRef]
- P. Y. Yang, S. Stankovic, J. Crnjanski, E. J. Teo, D. Thomson, A. A. Bettiol, M. B. H. Breese, W. Headley, C. Giusca, G. T. Reed, and G. Z. Mashanovich, “Silicon photonic waveguides for mid- and long-wave infrared region,” J. Mater. Sci.20, S159–S163 (2009).
- N. Ophir, R. K. W. Lau, M. Menard, R. Salem, K. Padmaraju, Y. Okawachi, M. Lipson, A. L. Gaeta, and K. Bergman, “First demonstration of a 10-Gb/s RZ end-to-end four-wave-mixing based link at 1884 nm using silicon nanowaveguides,” IEEE Photon. Technol. Lett.24(4), 276–278 (2012). [CrossRef]
- G. Z. Mashanovich, M. M. Milošević, M. Nedeljkovic, N. Owens, B. Xiong, E. J. Teo, and Y. Hu, “Low loss silicon waveguides for the mid-infrared,” Opt. Express19(8), 7112–7119 (2011). [CrossRef] [PubMed]
- M. M. Milošević, P. S. Matavulj, P. Y. Yang, A. Bagolini, and G. Z. Mashanovich, “Rib waveguides for mid-infrared silicon photonics,” J. Opt. Soc. Am. B26(9), 1760–1766 (2009). [CrossRef]
- S. Zlatanovic, J. S. Park, S. Moro, J. M. C. Boggio, I. B. Divliansky, N. Alic, S. Mookherjea, and S. Radic, “Mid-infrared wavelength conversion in silicon waveguides using ultracompact telecom-band-derived pump source,” Nat. Photonics4(8), 561–564 (2010). [CrossRef]
- S. Zlatanovic, J. S. Park, S. Moro, J. M. C. Boggio, I. B. Divliansky, N. Alic, S. Mookherjea, and S. Radic, “Mid-infrared wavelength conversion in silicon waveguides using ultracompact telecom-band-derived pump source,” Nat. Photonics4(8), 561–564 (2010). [CrossRef]
- F. Capasso, R. Paiella, R. Martini, R. Colombelli, C. Gmachl, T. L. Myers, M. S. Taubman, R. M. Williams, C. G. Bethea, K. Unterrainer, H. Y. Hwang, D. L. Sivco, A. Y. Cho, A. M. Sergent, H. C. Liu, and E. A. Whittaker, “Quantum cascade lasers: Ultrahigh-speed operation, optical wireless communication, narrow linewidth, and far-infrared emission,” IEEE J. Quantum Electron.38(6), 511–532 (2002). [CrossRef]
- D. J. Thomson, F. Y. Gardes, J.-M. Fedeli, S. Zlatanovic, Y. Hu, B. P. P. Kuo, E. Myslivets, N. Alic, S. Radic, G. Z. Mashanovich, and G. T. Reed, “50-Gb/s silicon optical modulator,” IEEE Photon. Technol. Lett.24(4), 234–236 (2012). [CrossRef]
- G. Z. Mashanovich, M. M. Milošević, M. Nedeljkovic, N. Owens, B. Xiong, E. J. Teo, and Y. Hu, “Low loss silicon waveguides for the mid-infrared,” Opt. Express19(8), 7112–7119 (2011). [CrossRef] [PubMed]
- M. Nedeljkovic, R. Soref, and G. Z. Mashanovich, “Free-carrier electro-refraction and electro-absorption modulation predictions for silicon over the 1-14μm infrared wavelength range,” IEEE Photon. J.3(6), 1171–1180 (2011). [CrossRef]
- L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, and M. Paniccia, “40 Gbit/s silicon optical modulator for high speed applications,” Electron. Lett.43(22), 1196–1197 (2007). [CrossRef]
- N. Ophir, R. K. W. Lau, M. Menard, R. Salem, K. Padmaraju, Y. Okawachi, M. Lipson, A. L. Gaeta, and K. Bergman, “First demonstration of a 10-Gb/s RZ end-to-end four-wave-mixing based link at 1884 nm using silicon nanowaveguides,” IEEE Photon. Technol. Lett.24(4), 276–278 (2012). [CrossRef]
- R. K. W. Lau, M. Ménard, Y. Okawachi, M. A. Foster, A. C. Turner-Foster, R. Salem, M. Lipson, and A. L. Gaeta, “Continuous-wave mid-infrared frequency conversion in silicon nanowaveguides,” Opt. Lett.36(7), 1263–1265 (2011). [CrossRef] [PubMed]
- N. Ophir, R. K. W. Lau, M. Menard, R. Salem, K. Padmaraju, Y. Okawachi, M. Lipson, A. L. Gaeta, and K. Bergman, “First demonstration of a 10-Gb/s RZ end-to-end four-wave-mixing based link at 1884 nm using silicon nanowaveguides,” IEEE Photon. Technol. Lett.24(4), 276–278 (2012). [CrossRef]
- B. Kuyken, X. Liu, G. Roelkens, R. Baets, R. M. Osgood, and W. M. J. Green, “50 dB parametric on-chip gain in silicon photonic wires,” Opt. Lett.36(22), 4401–4403 (2011). [CrossRef] [PubMed]
- B. Kuyken, X. Liu, R. M. Osgood, R. Baets, G. Roelkens, and W. M. J. Green, “Mid-infrared to telecom-band supercontinuum generation in highly nonlinear silicon-on-insulator wire waveguides,” Opt. Express19(21), 20172–20181 (2011). [CrossRef] [PubMed]
- X. Liu, R. M. Osgood, Y. A. Vlasov, and W. M. J. Green, “Mid-infrared optical parametric amplifier using silicon nanophotonic waveguides,” Nat. Photonics4(8), 557–560 (2010). [CrossRef]
- N. Ophir, R. K. W. Lau, M. Menard, R. Salem, K. Padmaraju, Y. Okawachi, M. Lipson, A. L. Gaeta, and K. Bergman, “First demonstration of a 10-Gb/s RZ end-to-end four-wave-mixing based link at 1884 nm using silicon nanowaveguides,” IEEE Photon. Technol. Lett.24(4), 276–278 (2012). [CrossRef]
- F. Capasso, R. Paiella, R. Martini, R. Colombelli, C. Gmachl, T. L. Myers, M. S. Taubman, R. M. Williams, C. G. Bethea, K. Unterrainer, H. Y. Hwang, D. L. Sivco, A. Y. Cho, A. M. Sergent, H. C. Liu, and E. A. Whittaker, “Quantum cascade lasers: Ultrahigh-speed operation, optical wireless communication, narrow linewidth, and far-infrared emission,” IEEE J. Quantum Electron.38(6), 511–532 (2002). [CrossRef]
- L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, and M. Paniccia, “40 Gbit/s silicon optical modulator for high speed applications,” Electron. Lett.43(22), 1196–1197 (2007). [CrossRef]
- H. Yu, M. Pantouvaki, J. Van Campenhout, D. Korn, K. Komorowska, P. Dumon, Y. Li, P. Verheyen, P. Absil, L. Alloatti, D. Hillerkuss, J. Leuthold, R. Baets, and W. Bogaerts, “Performance tradeoff between lateral and interdigitated doping patterns for high speed carrier-depletion based silicon modulators,” Opt. Express20(12), 12926–12938 (2012). [CrossRef] [PubMed]
- S. Zlatanovic, J. S. Park, S. Moro, J. M. C. Boggio, I. B. Divliansky, N. Alic, S. Mookherjea, and S. Radic, “Mid-infrared wavelength conversion in silicon waveguides using ultracompact telecom-band-derived pump source,” Nat. Photonics4(8), 561–564 (2010). [CrossRef]
- D. J. Thomson, F. Y. Gardes, J.-M. Fedeli, S. Zlatanovic, Y. Hu, B. P. P. Kuo, E. Myslivets, N. Alic, S. Radic, G. Z. Mashanovich, and G. T. Reed, “50-Gb/s silicon optical modulator,” IEEE Photon. Technol. Lett.24(4), 234–236 (2012). [CrossRef]
- S. Zlatanovic, J. S. Park, S. Moro, J. M. C. Boggio, I. B. Divliansky, N. Alic, S. Mookherjea, and S. Radic, “Mid-infrared wavelength conversion in silicon waveguides using ultracompact telecom-band-derived pump source,” Nat. Photonics4(8), 561–564 (2010). [CrossRef]
- D. J. Thomson, F. Y. Gardes, J.-M. Fedeli, S. Zlatanovic, Y. Hu, B. P. P. Kuo, E. Myslivets, N. Alic, S. Radic, G. Z. Mashanovich, and G. T. Reed, “50-Gb/s silicon optical modulator,” IEEE Photon. Technol. Lett.24(4), 234–236 (2012). [CrossRef]
- A. Brimont, D. J. Thomson, P. Sanchis, J. Herrera, F. Y. Gardes, J. M. Fedeli, G. T. Reed, and J. Martí, “High speed silicon electro-optical modulators enhanced via slow light propagation,” Opt. Express19(21), 20876–20885 (2011). [CrossRef] [PubMed]
- D. J. Thomson, F. Y. Gardes, Y. Hu, G. Mashanovich, M. Fournier, P. Grosse, J.-M. Fedeli, and G. T. Reed, “High contrast 40Gbit/s optical modulation in silicon,” Opt. Express19(12), 11507–11516 (2011). [CrossRef] [PubMed]
- P. Y. Yang, S. Stankovic, J. Crnjanski, E. J. Teo, D. Thomson, A. A. Bettiol, M. B. H. Breese, W. Headley, C. Giusca, G. T. Reed, and G. Z. Mashanovich, “Silicon photonic waveguides for mid- and long-wave infrared region,” J. Mater. Sci.20, S159–S163 (2009).
- N. Hattasan, A. Gassenq, L. Cerutti, J.-B. Rodriguez, E. Tournie, and G. Roelkens, “Heterogeneous integration of GaInAsSb p-i-n photodiodes on a silicon-on-insulator waveguide circuit,” IEEE Photon. Technol. Lett.23(23), 1760–1762 (2011). [CrossRef]
- N. Hattasan, A. Gassenq, L. Cerutti, J.-B. Rodriguez, E. Tournie, and G. Roelkens, “Heterogeneous integration of GaInAsSb p-i-n photodiodes on a silicon-on-insulator waveguide circuit,” IEEE Photon. Technol. Lett.23(23), 1760–1762 (2011). [CrossRef]
- B. Kuyken, X. Liu, G. Roelkens, R. Baets, R. M. Osgood, and W. M. J. Green, “50 dB parametric on-chip gain in silicon photonic wires,” Opt. Lett.36(22), 4401–4403 (2011). [CrossRef] [PubMed]
- B. Kuyken, X. Liu, R. M. Osgood, R. Baets, G. Roelkens, and W. M. J. Green, “Mid-infrared to telecom-band supercontinuum generation in highly nonlinear silicon-on-insulator wire waveguides,” Opt. Express19(21), 20172–20181 (2011). [CrossRef] [PubMed]
- L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, and M. Paniccia, “40 Gbit/s silicon optical modulator for high speed applications,” Electron. Lett.43(22), 1196–1197 (2007). [CrossRef]
- N. Ophir, R. K. W. Lau, M. Menard, R. Salem, K. Padmaraju, Y. Okawachi, M. Lipson, A. L. Gaeta, and K. Bergman, “First demonstration of a 10-Gb/s RZ end-to-end four-wave-mixing based link at 1884 nm using silicon nanowaveguides,” IEEE Photon. Technol. Lett.24(4), 276–278 (2012). [CrossRef]
- R. K. W. Lau, M. Ménard, Y. Okawachi, M. A. Foster, A. C. Turner-Foster, R. Salem, M. Lipson, and A. L. Gaeta, “Continuous-wave mid-infrared frequency conversion in silicon nanowaveguides,” Opt. Lett.36(7), 1263–1265 (2011). [CrossRef] [PubMed]
- F. Capasso, R. Paiella, R. Martini, R. Colombelli, C. Gmachl, T. L. Myers, M. S. Taubman, R. M. Williams, C. G. Bethea, K. Unterrainer, H. Y. Hwang, D. L. Sivco, A. Y. Cho, A. M. Sergent, H. C. Liu, and E. A. Whittaker, “Quantum cascade lasers: Ultrahigh-speed operation, optical wireless communication, narrow linewidth, and far-infrared emission,” IEEE J. Quantum Electron.38(6), 511–532 (2002). [CrossRef]
- F. Capasso, R. Paiella, R. Martini, R. Colombelli, C. Gmachl, T. L. Myers, M. S. Taubman, R. M. Williams, C. G. Bethea, K. Unterrainer, H. Y. Hwang, D. L. Sivco, A. Y. Cho, A. M. Sergent, H. C. Liu, and E. A. Whittaker, “Quantum cascade lasers: Ultrahigh-speed operation, optical wireless communication, narrow linewidth, and far-infrared emission,” IEEE J. Quantum Electron.38(6), 511–532 (2002). [CrossRef]
- M. Nedeljkovic, R. Soref, and G. Z. Mashanovich, “Free-carrier electro-refraction and electro-absorption modulation predictions for silicon over the 1-14μm infrared wavelength range,” IEEE Photon. J.3(6), 1171–1180 (2011). [CrossRef]
- R. Soref, “Mid-infrared photonics in silicon and germanium,” Nat. Photonics4(8), 495–497 (2010). [CrossRef]
- R. Soref, “Towards silicon-based longwave integrated optoelectronics (LIO),” SPIE Proc.6898, 689809, 689809-13 (2008). [CrossRef]
- R. A. Soref and B. R. Bennett, “Electrooptical effects in silicon,” IEEE J. Quantum Electron.23(1), 123–129 (1987). [CrossRef]
- T. Baehr-Jones, A. Spott, R. Ilic, A. Spott, B. Penkov, W. Asher, and M. Hochberg, “Silicon-on-sapphire integrated waveguides for the mid-infrared,” Opt. Express18(12), 12127–12135 (2010). [CrossRef] [PubMed]
- T. Baehr-Jones, A. Spott, R. Ilic, A. Spott, B. Penkov, W. Asher, and M. Hochberg, “Silicon-on-sapphire integrated waveguides for the mid-infrared,” Opt. Express18(12), 12127–12135 (2010). [CrossRef] [PubMed]
- A. Spott, Y. Liu, T. Baehr-Jones, R. Ilic, and M. Hochberg, “Silicon waveguides and ring resonators at 5.5 μm,” Appl. Phys. Lett.97(21), 213501 (2010). [CrossRef]
- P. Y. Yang, S. Stankovic, J. Crnjanski, E. J. Teo, D. Thomson, A. A. Bettiol, M. B. H. Breese, W. Headley, C. Giusca, G. T. Reed, and G. Z. Mashanovich, “Silicon photonic waveguides for mid- and long-wave infrared region,” J. Mater. Sci.20, S159–S163 (2009).
- F. Capasso, R. Paiella, R. Martini, R. Colombelli, C. Gmachl, T. L. Myers, M. S. Taubman, R. M. Williams, C. G. Bethea, K. Unterrainer, H. Y. Hwang, D. L. Sivco, A. Y. Cho, A. M. Sergent, H. C. Liu, and E. A. Whittaker, “Quantum cascade lasers: Ultrahigh-speed operation, optical wireless communication, narrow linewidth, and far-infrared emission,” IEEE J. Quantum Electron.38(6), 511–532 (2002). [CrossRef]
- G. Z. Mashanovich, M. M. Milošević, M. Nedeljkovic, N. Owens, B. Xiong, E. J. Teo, and Y. Hu, “Low loss silicon waveguides for the mid-infrared,” Opt. Express19(8), 7112–7119 (2011). [CrossRef] [PubMed]
- P. Y. Yang, S. Stankovic, J. Crnjanski, E. J. Teo, D. Thomson, A. A. Bettiol, M. B. H. Breese, W. Headley, C. Giusca, G. T. Reed, and G. Z. Mashanovich, “Silicon photonic waveguides for mid- and long-wave infrared region,” J. Mater. Sci.20, S159–S163 (2009).
- P. Y. Yang, S. Stankovic, J. Crnjanski, E. J. Teo, D. Thomson, A. A. Bettiol, M. B. H. Breese, W. Headley, C. Giusca, G. T. Reed, and G. Z. Mashanovich, “Silicon photonic waveguides for mid- and long-wave infrared region,” J. Mater. Sci.20, S159–S163 (2009).
- D. J. Thomson, F. Y. Gardes, J.-M. Fedeli, S. Zlatanovic, Y. Hu, B. P. P. Kuo, E. Myslivets, N. Alic, S. Radic, G. Z. Mashanovich, and G. T. Reed, “50-Gb/s silicon optical modulator,” IEEE Photon. Technol. Lett.24(4), 234–236 (2012). [CrossRef]
- D. J. Thomson, F. Y. Gardes, Y. Hu, G. Mashanovich, M. Fournier, P. Grosse, J.-M. Fedeli, and G. T. Reed, “High contrast 40Gbit/s optical modulation in silicon,” Opt. Express19(12), 11507–11516 (2011). [CrossRef] [PubMed]
- A. Brimont, D. J. Thomson, P. Sanchis, J. Herrera, F. Y. Gardes, J. M. Fedeli, G. T. Reed, and J. Martí, “High speed silicon electro-optical modulators enhanced via slow light propagation,” Opt. Express19(21), 20876–20885 (2011). [CrossRef] [PubMed]
- N. Hattasan, A. Gassenq, L. Cerutti, J.-B. Rodriguez, E. Tournie, and G. Roelkens, “Heterogeneous integration of GaInAsSb p-i-n photodiodes on a silicon-on-insulator waveguide circuit,” IEEE Photon. Technol. Lett.23(23), 1760–1762 (2011). [CrossRef]
- F. Capasso, R. Paiella, R. Martini, R. Colombelli, C. Gmachl, T. L. Myers, M. S. Taubman, R. M. Williams, C. G. Bethea, K. Unterrainer, H. Y. Hwang, D. L. Sivco, A. Y. Cho, A. M. Sergent, H. C. Liu, and E. A. Whittaker, “Quantum cascade lasers: Ultrahigh-speed operation, optical wireless communication, narrow linewidth, and far-infrared emission,” IEEE J. Quantum Electron.38(6), 511–532 (2002). [CrossRef]
- H. Yu, M. Pantouvaki, J. Van Campenhout, D. Korn, K. Komorowska, P. Dumon, Y. Li, P. Verheyen, P. Absil, L. Alloatti, D. Hillerkuss, J. Leuthold, R. Baets, and W. Bogaerts, “Performance tradeoff between lateral and interdigitated doping patterns for high speed carrier-depletion based silicon modulators,” Opt. Express20(12), 12926–12938 (2012). [CrossRef] [PubMed]
- J. Van Campenhout, W. M. J. Green, S. Assefa, and Y. A. Vlasov, “Integrated NiSi waveguide heaters for CMOS-compatible silicon thermo-optic devices,” Opt. Lett.35(7), 1013–1015 (2010). [CrossRef] [PubMed]
- J. Van Campenhout, W. M. J. Green, S. Assefa, and Y. A. Vlasov, “Low-power, 2 x 2 silicon electro-optic switch with 110-nm bandwidth for broadband reconfigurable optical networks,” Opt. Express17(26), 24020–24029 (2009). [CrossRef] [PubMed]
- H. Yu, M. Pantouvaki, J. Van Campenhout, D. Korn, K. Komorowska, P. Dumon, Y. Li, P. Verheyen, P. Absil, L. Alloatti, D. Hillerkuss, J. Leuthold, R. Baets, and W. Bogaerts, “Performance tradeoff between lateral and interdigitated doping patterns for high speed carrier-depletion based silicon modulators,” Opt. Express20(12), 12926–12938 (2012). [CrossRef] [PubMed]
- J. C. Rosenberg, W. M. J. Green, S. Assefa, D. M. Gill, T. Barwicz, M. Yang, S. M. Shank, and Y. A. Vlasov, “A 25 Gbps silicon microring modulator based on an interleaved junction,” Opt. Express20(24), 26411–26423 (2012). [CrossRef]
- J. Van Campenhout, W. M. J. Green, S. Assefa, and Y. A. Vlasov, “Integrated NiSi waveguide heaters for CMOS-compatible silicon thermo-optic devices,” Opt. Lett.35(7), 1013–1015 (2010). [CrossRef] [PubMed]
- X. Liu, R. M. Osgood, Y. A. Vlasov, and W. M. J. Green, “Mid-infrared optical parametric amplifier using silicon nanophotonic waveguides,” Nat. Photonics4(8), 557–560 (2010). [CrossRef]
- J. Van Campenhout, W. M. J. Green, S. Assefa, and Y. A. Vlasov, “Low-power, 2 x 2 silicon electro-optic switch with 110-nm bandwidth for broadband reconfigurable optical networks,” Opt. Express17(26), 24020–24029 (2009). [CrossRef] [PubMed]
- W. M. J. Green, M. J. Rooks, L. Sekaric, and Y. A. Vlasov, “Ultra-compact, low RF power, 10 Gb/s silicon Mach-Zehnder modulator,” Opt. Express15(25), 17106–17113 (2007). [CrossRef] [PubMed]
- F. Capasso, R. Paiella, R. Martini, R. Colombelli, C. Gmachl, T. L. Myers, M. S. Taubman, R. M. Williams, C. G. Bethea, K. Unterrainer, H. Y. Hwang, D. L. Sivco, A. Y. Cho, A. M. Sergent, H. C. Liu, and E. A. Whittaker, “Quantum cascade lasers: Ultrahigh-speed operation, optical wireless communication, narrow linewidth, and far-infrared emission,” IEEE J. Quantum Electron.38(6), 511–532 (2002). [CrossRef]
- F. Capasso, R. Paiella, R. Martini, R. Colombelli, C. Gmachl, T. L. Myers, M. S. Taubman, R. M. Williams, C. G. Bethea, K. Unterrainer, H. Y. Hwang, D. L. Sivco, A. Y. Cho, A. M. Sergent, H. C. Liu, and E. A. Whittaker, “Quantum cascade lasers: Ultrahigh-speed operation, optical wireless communication, narrow linewidth, and far-infrared emission,” IEEE J. Quantum Electron.38(6), 511–532 (2002). [CrossRef]
- X. Xiao, X. Li, H. Xu, Y. Hu, K. Xiong, Z. Li, T. Chu, J. Yu, and Y. Yu, “44-Gb/s silicon microring modulators based on zigzag PN junctions,” IEEE Photon. Technol. Lett.24(19), 1712–1714 (2012). [CrossRef]
- X. Xiao, X. Li, H. Xu, Y. Hu, K. Xiong, Z. Li, T. Chu, J. Yu, and Y. Yu, “44-Gb/s silicon microring modulators based on zigzag PN junctions,” IEEE Photon. Technol. Lett.24(19), 1712–1714 (2012). [CrossRef]
- X. Xiao, X. Li, H. Xu, Y. Hu, K. Xiong, Z. Li, T. Chu, J. Yu, and Y. Yu, “44-Gb/s silicon microring modulators based on zigzag PN junctions,” IEEE Photon. Technol. Lett.24(19), 1712–1714 (2012). [CrossRef]
- M. M. Milošević, P. S. Matavulj, P. Y. Yang, A. Bagolini, and G. Z. Mashanovich, “Rib waveguides for mid-infrared silicon photonics,” J. Opt. Soc. Am. B26(9), 1760–1766 (2009). [CrossRef]
- P. Y. Yang, S. Stankovic, J. Crnjanski, E. J. Teo, D. Thomson, A. A. Bettiol, M. B. H. Breese, W. Headley, C. Giusca, G. T. Reed, and G. Z. Mashanovich, “Silicon photonic waveguides for mid- and long-wave infrared region,” J. Mater. Sci.20, S159–S163 (2009).
- H. Yu, M. Pantouvaki, J. Van Campenhout, D. Korn, K. Komorowska, P. Dumon, Y. Li, P. Verheyen, P. Absil, L. Alloatti, D. Hillerkuss, J. Leuthold, R. Baets, and W. Bogaerts, “Performance tradeoff between lateral and interdigitated doping patterns for high speed carrier-depletion based silicon modulators,” Opt. Express20(12), 12926–12938 (2012). [CrossRef] [PubMed]
- X. Xiao, X. Li, H. Xu, Y. Hu, K. Xiong, Z. Li, T. Chu, J. Yu, and Y. Yu, “44-Gb/s silicon microring modulators based on zigzag PN junctions,” IEEE Photon. Technol. Lett.24(19), 1712–1714 (2012). [CrossRef]
- X. Xiao, X. Li, H. Xu, Y. Hu, K. Xiong, Z. Li, T. Chu, J. Yu, and Y. Yu, “44-Gb/s silicon microring modulators based on zigzag PN junctions,” IEEE Photon. Technol. Lett.24(19), 1712–1714 (2012). [CrossRef]
- D. J. Thomson, F. Y. Gardes, J.-M. Fedeli, S. Zlatanovic, Y. Hu, B. P. P. Kuo, E. Myslivets, N. Alic, S. Radic, G. Z. Mashanovich, and G. T. Reed, “50-Gb/s silicon optical modulator,” IEEE Photon. Technol. Lett.24(4), 234–236 (2012). [CrossRef]
- S. Zlatanovic, J. S. Park, S. Moro, J. M. C. Boggio, I. B. Divliansky, N. Alic, S. Mookherjea, and S. Radic, “Mid-infrared wavelength conversion in silicon waveguides using ultracompact telecom-band-derived pump source,” Nat. Photonics4(8), 561–564 (2010). [CrossRef]
Appl. Phys. Lett.
- A. Spott, Y. Liu, T. Baehr-Jones, R. Ilic, and M. Hochberg, “Silicon waveguides and ring resonators at 5.5 μm,” Appl. Phys. Lett.97(21), 213501 (2010). [CrossRef]
Electron. Lett.
- L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, and M. Paniccia, “40 Gbit/s silicon optical modulator for high speed applications,” Electron. Lett.43(22), 1196–1197 (2007). [CrossRef]
IEEE J. Quantum Electron.
- F. Capasso, R. Paiella, R. Martini, R. Colombelli, C. Gmachl, T. L. Myers, M. S. Taubman, R. M. Williams, C. G. Bethea, K. Unterrainer, H. Y. Hwang, D. L. Sivco, A. Y. Cho, A. M. Sergent, H. C. Liu, and E. A. Whittaker, “Quantum cascade lasers: Ultrahigh-speed operation, optical wireless communication, narrow linewidth, and far-infrared emission,” IEEE J. Quantum Electron.38(6), 511–532 (2002). [CrossRef]
- R. A. Soref and B. R. Bennett, “Electrooptical effects in silicon,” IEEE J. Quantum Electron.23(1), 123–129 (1987). [CrossRef]
IEEE Photon. J.
- M. Nedeljkovic, R. Soref, and G. Z. Mashanovich, “Free-carrier electro-refraction and electro-absorption modulation predictions for silicon over the 1-14μm infrared wavelength range,” IEEE Photon. J.3(6), 1171–1180 (2011). [CrossRef]
IEEE Photon. Technol. Lett.
- X. Xiao, X. Li, H. Xu, Y. Hu, K. Xiong, Z. Li, T. Chu, J. Yu, and Y. Yu, “44-Gb/s silicon microring modulators based on zigzag PN junctions,” IEEE Photon. Technol. Lett.24(19), 1712–1714 (2012). [CrossRef]
- D. J. Thomson, F. Y. Gardes, J.-M. Fedeli, S. Zlatanovic, Y. Hu, B. P. P. Kuo, E. Myslivets, N. Alic, S. Radic, G. Z. Mashanovich, and G. T. Reed, “50-Gb/s silicon optical modulator,” IEEE Photon. Technol. Lett.24(4), 234–236 (2012). [CrossRef]
- N. Hattasan, A. Gassenq, L. Cerutti, J.-B. Rodriguez, E. Tournie, and G. Roelkens, “Heterogeneous integration of GaInAsSb p-i-n photodiodes on a silicon-on-insulator waveguide circuit,” IEEE Photon. Technol. Lett.23(23), 1760–1762 (2011). [CrossRef]
- N. Ophir, R. K. W. Lau, M. Menard, R. Salem, K. Padmaraju, Y. Okawachi, M. Lipson, A. L. Gaeta, and K. Bergman, “First demonstration of a 10-Gb/s RZ end-to-end four-wave-mixing based link at 1884 nm using silicon nanowaveguides,” IEEE Photon. Technol. Lett.24(4), 276–278 (2012). [CrossRef]
J. Mater. Sci.
- P. Y. Yang, S. Stankovic, J. Crnjanski, E. J. Teo, D. Thomson, A. A. Bettiol, M. B. H. Breese, W. Headley, C. Giusca, G. T. Reed, and G. Z. Mashanovich, “Silicon photonic waveguides for mid- and long-wave infrared region,” J. Mater. Sci.20, S159–S163 (2009).
J. Opt. Soc. Am. B
- M. M. Milošević, P. S. Matavulj, P. Y. Yang, A. Bagolini, and G. Z. Mashanovich, “Rib waveguides for mid-infrared silicon photonics,” J. Opt. Soc. Am. B26(9), 1760–1766 (2009). [CrossRef]
Nat. Photonics
- R. Soref, “Mid-infrared photonics in silicon and germanium,” Nat. Photonics4(8), 495–497 (2010). [CrossRef]
- S. Zlatanovic, J. S. Park, S. Moro, J. M. C. Boggio, I. B. Divliansky, N. Alic, S. Mookherjea, and S. Radic, “Mid-infrared wavelength conversion in silicon waveguides using ultracompact telecom-band-derived pump source,” Nat. Photonics4(8), 561–564 (2010). [CrossRef]
- X. Liu, R. M. Osgood, Y. A. Vlasov, and W. M. J. Green, “Mid-infrared optical parametric amplifier using silicon nanophotonic waveguides,” Nat. Photonics4(8), 557–560 (2010). [CrossRef]
Opt. Express
- R. Shankar, R. Leijssen, I. Bulu, and M. Lončar, “Mid-infrared photonic crystal cavities in silicon,” Opt. Express19(6), 5579–5586 (2011). [CrossRef] [PubMed]
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- G. Z. Mashanovich, M. M. Milošević, M. Nedeljkovic, N. Owens, B. Xiong, E. J. Teo, and Y. Hu, “Low loss silicon waveguides for the mid-infrared,” Opt. Express19(8), 7112–7119 (2011). [CrossRef] [PubMed]
- T. Baehr-Jones, A. Spott, R. Ilic, A. Spott, B. Penkov, W. Asher, and M. Hochberg, “Silicon-on-sapphire integrated waveguides for the mid-infrared,” Opt. Express18(12), 12127–12135 (2010). [CrossRef] [PubMed]
- F. Li, S. D. Jackson, C. Grillet, E. Magi, D. Hudson, S. J. Madden, Y. Moghe, C. O’Brien, A. Read, S. G. Duvall, P. Atanackovic, B. J. Eggleton, and D. J. Moss, “Low propagation loss silicon-on-sapphire waveguides for the mid-infrared,” Opt. Express19(16), 15212–15220 (2011). [CrossRef] [PubMed]
- D. J. Thomson, F. Y. Gardes, Y. Hu, G. Mashanovich, M. Fournier, P. Grosse, J.-M. Fedeli, and G. T. Reed, “High contrast 40Gbit/s optical modulation in silicon,” Opt. Express19(12), 11507–11516 (2011). [CrossRef] [PubMed]
- A. Brimont, D. J. Thomson, P. Sanchis, J. Herrera, F. Y. Gardes, J. M. Fedeli, G. T. Reed, and J. Martí, “High speed silicon electro-optical modulators enhanced via slow light propagation,” Opt. Express19(21), 20876–20885 (2011). [CrossRef] [PubMed]
- J. C. Rosenberg, W. M. J. Green, S. Assefa, D. M. Gill, T. Barwicz, M. Yang, S. M. Shank, and Y. A. Vlasov, “A 25 Gbps silicon microring modulator based on an interleaved junction,” Opt. Express20(24), 26411–26423 (2012). [CrossRef]
- H. Yu, M. Pantouvaki, J. Van Campenhout, D. Korn, K. Komorowska, P. Dumon, Y. Li, P. Verheyen, P. Absil, L. Alloatti, D. Hillerkuss, J. Leuthold, R. Baets, and W. Bogaerts, “Performance tradeoff between lateral and interdigitated doping patterns for high speed carrier-depletion based silicon modulators,” Opt. Express20(12), 12926–12938 (2012). [CrossRef] [PubMed]
- T. Baehr-Jones, R. Ding, Y. Liu, A. Ayazi, T. Pinguet, N. C. Harris, M. Streshinsky, P. Lee, Y. Zhang, A. E.-J. Lim, T.-Y. Liow, S. H.-G. Teo, G.-Q. Lo, and M. Hochberg, “Ultralow drive voltage silicon traveling-wave modulator,” Opt. Express20(11), 12014–12020 (2012). [CrossRef] [PubMed]
- W. M. J. Green, M. J. Rooks, L. Sekaric, and Y. A. Vlasov, “Ultra-compact, low RF power, 10 Gb/s silicon Mach-Zehnder modulator,” Opt. Express15(25), 17106–17113 (2007). [CrossRef] [PubMed]
- Q. Xu, S. Manipatruni, B. Schmidt, J. Shakya, and M. Lipson, “12.5 Gbit/s carrier-injection-based silicon micro-ring silicon modulators,” Opt. Express15(2), 430–436 (2007). [CrossRef] [PubMed]
- J. Van Campenhout, W. M. J. Green, S. Assefa, and Y. A. Vlasov, “Low-power, 2 x 2 silicon electro-optic switch with 110-nm bandwidth for broadband reconfigurable optical networks,” Opt. Express17(26), 24020–24029 (2009). [CrossRef] [PubMed]
Opt. Lett.
- J. Van Campenhout, W. M. J. Green, S. Assefa, and Y. A. Vlasov, “Integrated NiSi waveguide heaters for CMOS-compatible silicon thermo-optic devices,” Opt. Lett.35(7), 1013–1015 (2010). [CrossRef] [PubMed]
- D. Weidmann, T. Tsai, N. A. Macleod, and G. Wysocki, “Atmospheric observations of multiple molecular species using ultra-high-resolution external cavity quantum cascade laser heterodyne radiometry,” Opt. Lett.36(11), 1951–1953 (2011). [CrossRef] [PubMed]
- R. K. W. Lau, M. Ménard, Y. Okawachi, M. A. Foster, A. C. Turner-Foster, R. Salem, M. Lipson, and A. L. Gaeta, “Continuous-wave mid-infrared frequency conversion in silicon nanowaveguides,” Opt. Lett.36(7), 1263–1265 (2011). [CrossRef] [PubMed]
- B. Kuyken, X. Liu, G. Roelkens, R. Baets, R. M. Osgood, and W. M. J. Green, “50 dB parametric on-chip gain in silicon photonic wires,” Opt. Lett.36(22), 4401–4403 (2011). [CrossRef] [PubMed]
SPIE Proc.
- R. Soref, “Towards silicon-based longwave integrated optoelectronics (LIO),” SPIE Proc.6898, 689809, 689809-13 (2008). [CrossRef]
Other
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- F. Gholami, S. Zlatanovic, E. Myslivets, S. Moro, B. P. Kuo, C. Brès, A. O. J. Wiberg, N. Alic, and S. Radic, “10Gbps parametric short-wave infrared transmitter,” in Optical Fiber Communication Conference, OSA Technical Digest (CD) (Optical Society of America, 2011), paper OThC6.
- K. Namjou, C. B. Roller, and P. J. McCann, “The Breathmeter: A new laser device to analyze your health,” IEEE Circuits & Devices Magazine Sept/Oct, 22–28 (2006).
- S. Assefa, W. M. Green, A. Rylyakov, C. Schow, F. Horst, and Y. Vlasov, “CMOS integrated nanophotonics: enabling technology for exascale computing systems,” in Optical Fiber Communication Conference, OSA Technical Digest (CD) (Optical Society of America, 2011), paper OMM6.
- W. M. J. Green, S. Assefa, A. Rylyakov, C. Schow, F. Horst, and Y. A. Vlasov, “CMOS integrated silicon nanophotonics: enabling technology for exascale computational systems,” presented at SEMICON 2010, Chiba, Japan, 1–3 Dec. 2010.
- T. Pinguet, S. Gloeckner, G. Masini, A. Mekis, D. J. Lockwood, and L. Pavesi, Silicon Photonics II: Components and Integration (Springer, 2011), Chap. 8.
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