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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 27 — Dec. 17, 2012
  • pp: 28594–28602

Optics InfoBase > Optics Express > Volume 20 > Issue 27 > Page 28594

Waveguide based compact silicon Schottky photodetector with enhanced responsivity in the telecom spectral band

Ilya Goykhman, Boris Desiatov, Jacob Khurgin, Joseph Shappir, and Uriel Levy  »View Author Affiliations


Optics Express, Vol. 20, Issue 27, pp. 28594-28602 (2012)
http://dx.doi.org/10.1364/OE.20.028594


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Abstract

We experimentally demonstrate an on-chip compact and simple to fabricate silicon Schottky photodetector for telecom wavelengths operating on the basis of internal photoemission process. The device is realized using CMOS compatible approach of local-oxidation of silicon, which enables the realization of the photodetector and low-loss bus photonic waveguide at the same fabrication step. The photodetector demonstrates enhanced internal responsivity of 12.5mA/W for operation wavelength of 1.55µm corresponding to an internal quantum efficiency of 1%, about two orders of magnitude higher than our previously demonstrated results [22]. We attribute this improved detection efficiency to the presence of surface roughness at the boundary between the materials forming the Schottky contact. The combination of enhanced quantum efficiency together with a simple fabrication process provides a promising platform for the realization of all silicon photodetectors and their integration with other nanophotonic and nanoplasmonic structures towards the construction of monolithic silicon opto-electronic circuitry on-chip.

© 2012 OSA

OCIS Codes
(040.6040) Detectors : Silicon
(130.3120) Integrated optics : Integrated optics devices
(240.6680) Optics at surfaces : Surface plasmons

ToC Category:
Detectors

History
Original Manuscript: November 5, 2012
Revised Manuscript: November 28, 2012
Manuscript Accepted: November 29, 2012
Published: December 10, 2012

Citation
Ilya Goykhman, Boris Desiatov, Jacob Khurgin, Joseph Shappir, and Uriel Levy, "Waveguide based compact silicon Schottky photodetector with enhanced responsivity in the telecom spectral band," Opt. Express 20, 28594-28602 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-27-28594


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