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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 27 — Dec. 17, 2012
  • pp: 28631–28640

Topographic optical profilometry by absorption in liquids

Juan Carlos Martinez Antón, Jose Alonso, Jose Antonio Gómez Pedrero, and Juan Antonio Quiroga  »View Author Affiliations


Optics Express, Vol. 20, Issue 27, pp. 28631-28640 (2012)
http://dx.doi.org/10.1364/OE.20.028631


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Abstract

Optical absorbance within a liquid is used as a photometric probe to measure the topography of optical surfaces relative to a reference. The liquid fills the gap between the reference surface and the measuring surface. By comparing two transmission images at different wavelengths we can profile the height distribution in a simple and reliable way. The presented method handles steep surface slopes (<90°) without difficulty. It adapts well to any field of view and height range (peak to valley). A height resolution in the order of the nanometer may be achieved and the height range can be tailored by adapting the concentration of water soluble dyes. It is especially appropriate for 3D profiling of transparent complex optical surfaces, like those found in micro-optic arrays and for Fresnel, aspheric or free-form lenses, which are very difficult to measure by other optical methods. We show some experimental results to validate its capabilities as a metrological tool and handling of steep surface slopes.

© 2012 OSA

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(220.1250) Optical design and fabrication : Aspherics
(230.3990) Optical devices : Micro-optical devices
(110.4155) Imaging systems : Multiframe image processing

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: September 27, 2012
Revised Manuscript: November 11, 2012
Manuscript Accepted: November 18, 2012
Published: December 10, 2012

Citation
Juan Carlos Martinez Antón, Jose Alonso, Jose Antonio Gómez Pedrero, and Juan Antonio Quiroga, "Topographic optical profilometry by absorption in liquids," Opt. Express 20, 28631-28640 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-27-28631


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