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Two-photon polymerization with variable repetition rate bursts of femtosecond laser pulsesTommaso Baldacchini, Scott Snider, and Ruben Zadoyan »View Author Affiliations
Tommaso Baldacchini,
Scott Snider,
and Ruben Zadoyan*
Technology and Applications Center, Newport Corporation, 1791 Deere Avenue, Irvine, California 92606, USA *Corresponding author: ruben.zadoyan@newport.com |
Optics Express, Vol. 20, Issue 28, pp. 29890-29899 (2012)
http://dx.doi.org/10.1364/OE.20.029890
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Abstract
We describe fabrication of microstructures by two-photon polymerization using bursts of femtosecond laser pulses. With the aid of an acousto-optic modulator driven by a function generator, two-photon polymerization is performed at variable burst repetition rates. We investigate how the time between the bursts of laser pulses influences the ultimate dimensions of lines written in a photosensitive resin. We observe that when using the same laser fluence, polymer lines fabricated at different burst repetition rates have different dimensions. In particular, the widths of two-photon polymerized lines become smaller with decreasing burst repetition rates. Based on the thermal properties of the resin and experimental writing conditions, we attribute this effect to localized heat accumulation.
© 2012 OSA
OCIS Codes
(140.7090) Lasers and laser optics : Ultrafast lasers
(160.5470) Materials : Polymers
(220.4000) Optical design and fabrication : Microstructure fabrication
(350.3390) Other areas of optics : Laser materials processing
ToC Category:
Laser Microfabrication
History
Original Manuscript: October 8, 2012
Revised Manuscript: December 8, 2012
Manuscript Accepted: December 14, 2012
Published: December 21, 2012
Citation
Tommaso Baldacchini, Scott Snider, and Ruben Zadoyan, "Two-photon polymerization with variable repetition rate bursts of femtosecond laser pulses," Opt. Express 20, 29890-29899 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-28-29890
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References
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- J. Fischer, G. von Freymann, and M. Wegener, “The materials challenge in diffraction-unlimited direct-laser-writing optical lithography,” Adv. Mater. (Deerfield Beach Fla.)22(32), 3578–3582 (2010). [CrossRef] [PubMed]
- M. Thiel, J. Fischer, G. von Freymann, and M. Wegener, “Direct laser writing of three-dimensional submicron structures using a continuous-wave laser at 532 nm,” Appl. Phys. Lett.97(22), 221102 (2010). [CrossRef]
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- G. Kumi, C. O. Yanez, K. D. Belfield, and J. T. Fourkas, “High-speed multiphoton absorption polymerization: fabrication of microfluidic channels with arbitrary cross-sections and high aspect ratios,” Lab Chip10(8), 1057–1060 (2010). [CrossRef] [PubMed]
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ACS Nano
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