Optical monitoring for power law fluids during spin coating

doi:10.1364/OE.20.003166

Optical monitoring for power law fluids during spin coating

P. L. G. Jardim, A. F. Michels, and F. Horowitz »View Author Affiliations

Optics Express, Vol. 20, Issue 3, pp. 3166-3175 (2012)
http://dx.doi.org/10.1364/OE.20.003166

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Abstract

Optical monitoring is applied, in situ and in real time, to non-Newtonian, power law fluids in the spin coating process. An analytical exact solution is presented for thickness evolution that well fits to most measurement data. As result, typical rheological parameters are obtained for several CMC (carboximetilcelullose) concentrations and rotation speeds. Optical monitoring thus precisely indicates applicability of the model to power law fluids under spin coating.

OCIS Codes
(120.1840) Instrumentation, measurement, and metrology : Densitometers, reflectometers
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(160.5470) Materials : Polymers
(310.6870) Thin films : Thin films, other properties
(310.4925) Thin films : Other properties (stress, chemical, etc.)

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: October 14, 2011
Revised Manuscript: January 19, 2012
Manuscript Accepted: January 20, 2012
Published: January 26, 2012

Citation
P. L. G. Jardim, A. F. Michels, and F. Horowitz, "Optical monitoring for power law fluids during spin coating," Opt. Express 20, 3166-3175 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-3-3166

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References

P. H. Walker and J. G. Thompson, “Proceedings of the twenty-fifth annual meeting,” Am. Soc. Test. Mats. 22, 463–485 (1922).
A. G. Emslie, F. T. Bonner, and L. G. Peck, “Flow of a viscous liquid on a rotating disk,” J. Appl. Phys.29(5), 858–862 (1958). [CrossRef]
B. D. Washo, “Rheology and modeling of the spin coating process,” IBM J. Res. Develop.21(2), 190–198 (1977). [CrossRef]
A. Acrivos, M. J. Shah, and E. E. Petersen, “On the flow of a non-Newtonian liquid on a rotating disk,” J. Appl. Phys.31(6), 963–968 (1960). [CrossRef]
S. A. Jenekhe and S. B. Schuldt, “Coating of non-Newtonian fluids on a flat rotating disk,” Ind. Eng. Chem. Fundam.23(4), 432–436 (1984). [CrossRef]
P. Temple-Boyer, L. Mazenq, J. B. Doucet, V. Conédéra, B. Torbiéro, and J. Launay, “Theoretical studies of the spin coating process for the deposition of polymer-based Maxwellian liquids,” Microelectron. Eng.87(2), 163–166 (2010). [CrossRef]
P. L. G. Jardim, Laser and Film Optics Laboratory, Universidade Federal do Rio Grande do Sul, 9500 Bento Gonçalves Avenue, Porto Alegre, RS, Brasil. A. F. Michels, and F. Horowitz, are preparing a manuscript to be called “Spin coating process evolution and reproducibility for Power Law fluids.”
A. F. Michels, T. Menegotto, and F. Horowitz, “Optically monitored dip coating as a contactless viscometry method for liquid films,” Appl. Opt.44(6), 912–915 (2005). [CrossRef] [PubMed]
A. F. Michels, T. Menegotto, H. P. Grieneisen, M. B. Susin, and F. Horowitz, “Double optical monitoring of dip coating with a time-varying refractive index,” Appl. Opt.45(7), 1491–1494 (2006). [CrossRef] [PubMed]
A. F. Michels, P. Lovato, and F. Horowitz, “Laser monitoring of non-Newtonian liquids during dip coating,” AIChE J.55(12), 3052–3055 (2009). [CrossRef]
F. Horowitz, E. Yeatman, E. Dawnay, and A. Fardad, “Real-time optical monitoring of spin coating,” J. Phys. III France3(11), 2059–2063 (1993). [CrossRef]
F. Horowitz, E. Yeatman, E. Dawnay, and A. Fardad, ““Optical monitoring of the sol-to gel transition in spinning silica films,” Sol-Gel Opt. III2288, 67–70 (1994).
F. Horowitz, E. J. C. Dawnay, M. A. Fardad, M. Green, and E. M. Yeatman, “Towards better control of sol-gel film processing for optical device applications,” J. Nonlinear Opt. Phys. Mater.6(1), 1–18 (1997). [CrossRef]
F. Horowitz, A. F. Michels, and E. M. Yeatman, “Optical viscometry of spinning sol coatings,” J. Sol-Gel Sci. Technol.13(1/3), 707–712 (1998). [CrossRef]
D. A. White and J. A. Tallmadge, “Theory of drag out of liquids on a flat plates,” Chem. Eng. Sci.20(1), 33–37 (1965). [CrossRef]
M. Born and E. Wolf, Principles of Optics (Pergamon Press Ltd, 1959).

AIChE J.

A. F. Michels, P. Lovato, and F. Horowitz, “Laser monitoring of non-Newtonian liquids during dip coating,” AIChE J.55(12), 3052–3055 (2009). [CrossRef]

Appl. Opt.

Chem. Eng. Sci.

D. A. White and J. A. Tallmadge, “Theory of drag out of liquids on a flat plates,” Chem. Eng. Sci.20(1), 33–37 (1965). [CrossRef]

IBM J. Res. Develop.

B. D. Washo, “Rheology and modeling of the spin coating process,” IBM J. Res. Develop.21(2), 190–198 (1977). [CrossRef]

Ind. Eng. Chem. Fundam.

S. A. Jenekhe and S. B. Schuldt, “Coating of non-Newtonian fluids on a flat rotating disk,” Ind. Eng. Chem. Fundam.23(4), 432–436 (1984). [CrossRef]

J. Appl. Phys.

A. Acrivos, M. J. Shah, and E. E. Petersen, “On the flow of a non-Newtonian liquid on a rotating disk,” J. Appl. Phys.31(6), 963–968 (1960). [CrossRef]
A. G. Emslie, F. T. Bonner, and L. G. Peck, “Flow of a viscous liquid on a rotating disk,” J. Appl. Phys.29(5), 858–862 (1958). [CrossRef]

J. Nonlinear Opt. Phys. Mater.

F. Horowitz, E. J. C. Dawnay, M. A. Fardad, M. Green, and E. M. Yeatman, “Towards better control of sol-gel film processing for optical device applications,” J. Nonlinear Opt. Phys. Mater.6(1), 1–18 (1997). [CrossRef]

J. Phys. III France

F. Horowitz, E. Yeatman, E. Dawnay, and A. Fardad, “Real-time optical monitoring of spin coating,” J. Phys. III France3(11), 2059–2063 (1993). [CrossRef]

J. Sol-Gel Sci. Technol.

F. Horowitz, A. F. Michels, and E. M. Yeatman, “Optical viscometry of spinning sol coatings,” J. Sol-Gel Sci. Technol.13(1/3), 707–712 (1998). [CrossRef]

Microelectron. Eng.

P. Temple-Boyer, L. Mazenq, J. B. Doucet, V. Conédéra, B. Torbiéro, and J. Launay, “Theoretical studies of the spin coating process for the deposition of polymer-based Maxwellian liquids,” Microelectron. Eng.87(2), 163–166 (2010). [CrossRef]

Sol-Gel Opt. III

F. Horowitz, E. Yeatman, E. Dawnay, and A. Fardad, ““Optical monitoring of the sol-to gel transition in spinning silica films,” Sol-Gel Opt. III2288, 67–70 (1994).

Other

M. Born and E. Wolf, Principles of Optics (Pergamon Press Ltd, 1959).
P. L. G. Jardim, Laser and Film Optics Laboratory, Universidade Federal do Rio Grande do Sul, 9500 Bento Gonçalves Avenue, Porto Alegre, RS, Brasil. A. F. Michels, and F. Horowitz, are preparing a manuscript to be called “Spin coating process evolution and reproducibility for Power Law fluids.”
P. H. Walker and J. G. Thompson, “Proceedings of the twenty-fifth annual meeting,” Am. Soc. Test. Mats. 22, 463–485 (1922).

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