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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 4 — Feb. 13, 2012
  • pp: 4403–4418

Diffraction effects for interferometric measurements due to imaging aberrations

Ping Zhou, Yong Shu, Chunyu Zhao, and Jim H. Burge  »View Author Affiliations

Optics Express, Vol. 20, Issue 4, pp. 4403-4418 (2012)

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Aspheric surfaces are often measured using interferometers with null correctors, either refractive or diffractive. The use of null correctors allows high accuracy in the measurement, but also introduces imaging aberrations, such as mapping distortion and field curvature. These imaging aberrations couple with diffraction effects and limit the accuracy of the measurements, causing high frequency features in the surface under test to be filtered out and creating artifacts near boundaries, especially at edges. We provide a concise methodology for analyzing these effects using the astigmatic field curves to define the aberration, and showing how this couples with diffraction as represented by the Talbot effect and Fresnel edge diffraction. The resulting relationships are validated with both computer simulations and direct measurements from an interferometer with CGH null corrector.

© 2012 OSA

OCIS Codes
(050.1940) Diffraction and gratings : Diffraction
(120.3180) Instrumentation, measurement, and metrology : Interferometry

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: November 22, 2011
Revised Manuscript: January 20, 2012
Manuscript Accepted: January 24, 2012
Published: February 8, 2012

Ping Zhou, Yong Shu, Chunyu Zhao, and Jim H. Burge, "Diffraction effects for interferometric measurements due to imaging aberrations," Opt. Express 20, 4403-4418 (2012)

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