Step-index optical waveguide produced by multi-step ion implantation in LiNbO<sub>3</sub>

doi:10.1364/OE.20.004444

Step-index optical waveguide produced by multi-step ion implantation in LiNbO₃

G. B. Montanari, P. De Nicola, S. Sugliani, A. Menin, A. Parini, A. Nubile, G. Bellanca, M. Chiarini, M. Bianconi, and G. G. Bentini »View Author Affiliations

Optics Express, Vol. 20, Issue 4, pp. 4444-4453 (2012)
http://dx.doi.org/10.1364/OE.20.004444

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Abstract

The refractive indexes, material attenuation and damage fractions of a multi-step ion implanted Lithium Niobate (LiNbO₃) waveguide were analyzed as functions of the annealing temperatures. An almost flat damage depth profile was designed to reduce the uncertainties related to the indexes profile shape, thus providing a better test-case for the characterizations. The measurements performed on the fabricated optical waveguides confirmed the predicted step-index profiles showing that the light is confined inside the damaged layer. The low measured attenuation (less than 0.8 dB/cm @ 632.8 nm) makes the obtained waveguide attractive for device fabrication.

OCIS Codes
(160.3730) Materials : Lithium niobate
(230.7390) Optical devices : Waveguides, planar

ToC Category:
Integrated Optics

History
Original Manuscript: September 22, 2011
Revised Manuscript: November 9, 2011
Manuscript Accepted: November 9, 2011
Published: February 8, 2012

Citation
G. B. Montanari, P. De Nicola, S. Sugliani, A. Menin, A. Parini, A. Nubile, G. Bellanca, M. Chiarini, M. Bianconi, and G. G. Bentini, "Step-index optical waveguide produced by multi-step ion implantation in LiNbO₃," Opt. Express 20, 4444-4453 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-4-4444

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References

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