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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 4 — Feb. 13, 2012
  • pp: 4525–4536

Ultra-precise characterization of LCLS hard X-ray focusing mirrors by high resolution slope measuring deflectometry

Frank Siewert, Jana Buchheim, Sébastien Boutet, Garth J. Williams, Paul A. Montanez, Jacek Krzywinski, and Riccardo Signorato  »View Author Affiliations

Optics Express, Vol. 20, Issue 4, pp. 4525-4536 (2012)

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We present recent results on the inspection of a first diffraction-limited hard X-ray Kirkpatrick-Baez (KB) mirror pair for the Coherent X-ray Imaging (CXI) instrument at the Linac Coherent Light Source (LCLS). The full KB system – mirrors and holders - was under inspection by use of high resolution slope measuring deflectometry. The tests confirmed that KB mirrors of 350mm aperture length characterized by an outstanding residual figure error of <1 nm rms has been realized. This corresponds to the residual figure slope error of about 0.05µrad rms, unprecedented on such long elliptical mirrors. Additional measurements show the clamping of the mirrors to be a critical step for the final – shape preserving installation of such outstanding optics.

© 2012 OSA

OCIS Codes
(120.3940) Instrumentation, measurement, and metrology : Metrology
(140.2600) Lasers and laser optics : Free-electron lasers (FELs)
(340.0340) X-ray optics : X-ray optics

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: September 6, 2011
Revised Manuscript: October 20, 2011
Manuscript Accepted: October 26, 2011
Published: February 9, 2012

Frank Siewert, Jana Buchheim, Sébastien Boutet, Garth J. Williams, Paul A. Montanez, Jacek Krzywinski, and Riccardo Signorato, "Ultra-precise characterization of LCLS hard X-ray focusing mirrors by high resolution slope measuring deflectometry," Opt. Express 20, 4525-4536 (2012)

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