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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 5 — Feb. 27, 2012
  • pp: 5108–5118

Error analysis of a plane mirror interferometer based on geometric optical paths

Shanzhi Tang, Zhao Wang, Lihong Zhong, Jianmin Gao, and Junjie Guo  »View Author Affiliations


Optics Express, Vol. 20, Issue 5, pp. 5108-5118 (2012)
http://dx.doi.org/10.1364/OE.20.005108


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Abstract

Plane mirror interferometer is a common way for the precision displacement measurement. However, during the measurement, it still suffers from disturbances such as misalignments, rotations and air refractive index fluctuations, which lead to poor accuracy. Traditional error analysis is rather limited in the static state and separation of the disturbances. In this paper, displacement measurement errors are analyzed, which are caused by the disturbed factors for a plane mirror interferometer. Then error modeling, which based on the geometric optical paths, is carried out by the partial differentiation theory. Moreover, the characteristics of the error are discussed by using this model. It is suggested that this model can release the measurement accuracy reduction brought by coupling effects between adjustment factor of the optical paths and the rotary error of the measured object (e. g. a guideway).

© 2012 OSA

OCIS Codes
(080.2720) Geometric optics : Mathematical methods (general)
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.4640) Instrumentation, measurement, and metrology : Optical instruments

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: November 9, 2011
Revised Manuscript: December 31, 2011
Manuscript Accepted: January 2, 2012
Published: February 16, 2012

Citation
Shanzhi Tang, Zhao Wang, Lihong Zhong, Jianmin Gao, and Junjie Guo, "Error analysis of a plane mirror interferometer based on geometric optical paths," Opt. Express 20, 5108-5118 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-5-5108


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