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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 6 — Mar. 12, 2012
  • pp: 5830–5839

Characterization of the resolving power and contrast transfer function of a transmission X-ray microscope with partially coherent illumination

Stefan Rehbein, Peter Guttmann, Stephan Werner, and Gerd Schneider  »View Author Affiliations

Optics Express, Vol. 20, Issue 6, pp. 5830-5839 (2012)

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The achievable spatial resolution and the contrast transfer function (CTF) are key parameters characterizing an X-ray microscope. We measured the spatial resolution and the contrast transfer function of the transmission X-ray microscope (TXM) at the electron storage ring BESSY II. The TXM uses the radiation of an undulator source and operates under partially coherent illumination conditions. For spatial resolutions down to 25 nm, our measurements of the CTF’s are in good agreement with theoretical CTF data for partial coherence. With higher resolution zone plate objectives, we measured a spatial resolution (half-pitch) of 11 nm in 1st and 3rd order of diffraction. However, with these objectives the stray light level increases significantly.

© 2012 OSA

OCIS Codes
(110.7440) Imaging systems : X-ray imaging
(340.7440) X-ray optics : X-ray imaging
(340.7460) X-ray optics : X-ray microscopy
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)
(050.1965) Diffraction and gratings : Diffractive lenses
(340.7215) X-ray optics : Undulator radiation

ToC Category:
X-ray Optics

Original Manuscript: October 18, 2011
Revised Manuscript: November 30, 2011
Manuscript Accepted: December 3, 2011
Published: February 27, 2012

Virtual Issues
Vol. 7, Iss. 5 Virtual Journal for Biomedical Optics

Stefan Rehbein, Peter Guttmann, Stephan Werner, and Gerd Schneider, "Characterization of the resolving power and contrast transfer function of a transmission X-ray microscope with partially coherent illumination," Opt. Express 20, 5830-5839 (2012)

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