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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 6 — Mar. 12, 2012
  • pp: 6657–6668

Monolithic integration of binary-phase fresnel zone plate objectives on 2-axis scanning micromirrors for compact microscopes

Youmin Wang, Karthik Kumar, Lingyun Wang, and Xiaojing Zhang  »View Author Affiliations


Optics Express, Vol. 20, Issue 6, pp. 6657-6668 (2012)
http://dx.doi.org/10.1364/OE.20.006657


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Abstract

We demonstrated a unique monolithic integration of Fresnel elliptical zone plate (EZP) objective on a 2-axis staggered vertical comb-drive micromirror with 500μm by 800μm surface area via direct patterning of reflective binary phase modulation elements on a silicon chip. The need for focusing optics is thus obviated, simplifying the micro-endoscope assembly and improving its form factor. The design of binary phase EZP was guided by simulations based on FFT based Rayleigh-Sommerfeld diffraction model. For dual-axis scanning angles up to 9º by 9º at the image plane, the simulated diffracted Airy disks on a spatial map have been demonstrated to vary from 10.5μm to 28.6μm. Micromirrors scanning ±9º (optical) about both axes are patterned with elliptical zones designed for 7mm focal length and 20þ off-axis 635-nm illumination using 635nm laser. Videos of samples acquired with ~15μm lateral resolution over 1mm × 0.35mm field of view (FOV) at 5.0 frames/second using the device in both transmission and reflectance modes bench-top single-fiber laser scanning confocal microscope confirmed the applicability of the device to micro-endoscopy.

© 2012 OSA

OCIS Codes
(170.1790) Medical optics and biotechnology : Confocal microscopy
(230.1950) Optical devices : Diffraction gratings

ToC Category:
Medical Optics and Biotechnology

History
Original Manuscript: December 12, 2011
Revised Manuscript: January 20, 2012
Manuscript Accepted: January 28, 2012
Published: March 7, 2012

Virtual Issues
Vol. 7, Iss. 5 Virtual Journal for Biomedical Optics

Citation
Youmin Wang, Karthik Kumar, Lingyun Wang, and Xiaojing Zhang, "Monolithic integration of binary-phase fresnel zone plate objectives on 2-axis scanning micromirrors for compact microscopes," Opt. Express 20, 6657-6668 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-6-6657


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