OSA's Digital Library

Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 1 — Jan. 14, 2013
  • pp: 626–630

Sub-wavelength pattern generation by laser direct writing via repeated irradiation

Jan-Hendrik Klein-Wiele and Peter Simon  »View Author Affiliations

Optics Express, Vol. 21, Issue 1, pp. 626-630 (2013)

View Full Text Article

Enhanced HTML    Acrobat PDF (2584 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



A simple technique is presented allowing the fabrication of high density periodic patterns via direct laser ablation. Applying fluence control for reducing the ablated feature sizes combined with lateral translation of an interference pattern between two (or more) irradiation cycles, sub-wavelength period patterns (< 200 nm) are created. Variation of the amount and direction of translation and the applied intensities during subsequent irradiation steps leads to variable pattern design as demonstrated for polymeric and silicon samples.

© 2013 OSA

OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(220.4241) Optical design and fabrication : Nanostructure fabrication

ToC Category:
Laser Microfabrication

Original Manuscript: November 8, 2012
Revised Manuscript: December 13, 2012
Manuscript Accepted: December 19, 2012
Published: January 7, 2013

Jan-Hendrik Klein-Wiele and Peter Simon, "Sub-wavelength pattern generation by laser direct writing via repeated irradiation," Opt. Express 21, 626-630 (2013)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. K.-C. Park, H. J. Choi, C. H. Chang, R. E. Cohen, G. H. McKinley, and G. Barbastathis, “Nanotextured silica surfaces with robust superhydrophobicity and omnidirectional broadband supertransmissivity,” ACS Nano6(5), 3789–3799 (2012). [CrossRef] [PubMed]
  2. M. Huang, F. Zhao, Y. Cheng, N. Xu, and Z. Xu, “Mechanisms of ultrafast laser-induced deep-subwavelength gratings on graphite and diamond,” Phys. Rev. B79(12), 125436 (2009). [CrossRef]
  3. F. Liang, R. Vallée, and S. L. Chin, “Physical evolution of nanograting inscription on the surface of fused silica,” Opt. Mater. Express2(7), 900–906 (2012). [CrossRef]
  4. A. K. Sharma, J. Smedley, T. Tsang, and T. Rao, “Formation of subwavelength grating on molybdenum mirrors using a femtosecond Ti:sapphire laser system operating at 10 Hz,” Rev. Sci. Instrum.82(3), 033113 (2011). [CrossRef] [PubMed]
  5. A. Borowiec and H. K. Haugen, “Subwavelength ripple formation on the surfaces of compound semiconductors irradiated with femtosecond laser pulses,” Appl. Phys. Lett.82(25), 4462–4464 (2003). [CrossRef]
  6. J. Bekesi, J.-H. Klein-Wiele, and P. Simon, “Efficient submicron processing of metals with femtosecond UV pulses,” Appl. Phys., A Mater. Sci. Process.76(3), 355–357 (2003). [CrossRef]
  7. J.-H. Klein-Wiele and P. Simon, “Fabrication of periodic nanostructures by phase-controlled multiple-beam interference,” Appl. Phys. Lett.83(23), 4707–4709 (2003). [CrossRef]
  8. F. Korte, J. Serbin, J. Koch, A. Egbert, C. Fallnich, A. Ostendorf, and B. N. Chichkov, “Towards nanostructuring with femtosecond laser pulses,” Appl. Phys., A Mater. Sci. Process.77, 229–235 (2003).
  9. G. Marowsky, P. Simon, K. Mann, and C. K. Rhodes, Femtosecond Excimer Laser Pulses, Träger Ed., (Springer-Verlag Berlin Heidelberg 2012) p. 842.

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited