OSA's Digital Library

Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 14 — Jul. 15, 2013
  • pp: 16882–16887

High Q SiC microresonators

Jaime Cardenas, Mian Zhang, Christopher T. Phare, Shreyas Y. Shah, Carl B. Poitras, Biswajeet Guha, and Michal Lipson  »View Author Affiliations


Optics Express, Vol. 21, Issue 14, pp. 16882-16887 (2013)
http://dx.doi.org/10.1364/OE.21.016882


View Full Text Article

Enhanced HTML    Acrobat PDF (3312 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We demonstrate photonic devices based on standard 3C SiC epitaxially grown on silicon. We achieve high optical confinement by taking advantage of the high stiffness of SiC and undercutting the underlying silicon substrate. We demonstrate a 20 μm radius suspended microring resonator with Q=14,100 fabricated on commercially available SiC-on-silicon substrates.

© 2013 OSA

OCIS Codes
(230.3990) Optical devices : Micro-optical devices
(140.3945) Lasers and laser optics : Microcavities

ToC Category:
Optical Devices

History
Original Manuscript: April 8, 2013
Revised Manuscript: June 21, 2013
Manuscript Accepted: June 24, 2013
Published: July 8, 2013

Citation
Jaime Cardenas, Mian Zhang, Christopher T. Phare, Shreyas Y. Shah, Carl B. Poitras, Biswajeet Guha, and Michal Lipson, "High Q SiC microresonators," Opt. Express 21, 16882-16887 (2013)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-21-14-16882


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. Y. Goldberg, M. E. Levinshtein, and S. L. Rumyanstev, Properties of Advanced Semiconductor Materials GaN, AlN, InN, BN, SiC, SiGe, New York (John Wiley and Sons, Inc., 2001).
  2. S. Yamada, B.-S. Song, J. Upham, T. Asano, Y. Tanaka, and S. Noda, “Suppression of multiple photon absorption in a sic photonic crystal nanocavity operating at 1.55 μ m,” Opt. Express20, 14789–14796 (2012). [CrossRef] [PubMed]
  3. X. Tang, K. G. Irvine, D. Zhang, and M. G. Spencer, “Linear electro-optic effect in cubic silicon carbide,” Appl. Phys. Lett.59, 1938–1939 (1991). [CrossRef]
  4. L. L. Chase and E. W. V. Stryland, Handbook of Laser Science and Technology: Suppl. 2: Optical Materials(CRC Press, Boca Raton, FL, 1995), chap. Nonlinear refractive index: inorganic materials, p. 269.
  5. M. Ziaei-Moayyed, M. Su, C. Reinke, and R. Olsson, “Silicon carbide phononic crystals for high fq micromechanical resonators,” in “Ultrasonics Symposium (IUS), 2010 IEEE,” (IEEE, 2010), pp. 162–166. [CrossRef]
  6. A. Vonsovici, G. T. Reed, and A. G. Evans, “β-SiC-on insulator waveguide structures for modulators and sensor systems,” Materials Science in Semiconductor Processing3, 367–374 (2000). [CrossRef]
  7. X. Tang, K. Wongchotigul, and M. G. Spencer, “Optical waveguide formed by cubic silicon carbide on sapphire substrates,” Appl. Phys. Lett.58, 917–918 (1991). [CrossRef]
  8. L. Di Cioccio, Y. Le Tiec, F. Letertre, C. Jaussaud, and M. Bruel, “Silicon carbide on insulator formation using the smart cut process,” Electron. Lett.32, 1144–1145 (1996). [CrossRef]
  9. X. Lu, J. Y. Lee, P. X.-L. Feng, and Q. Lin , “Silicon carbide microdisk resonator,” Opt. Lett., 38(8), 1304–1306 (2013). [CrossRef] [PubMed]
  10. A. C. Turner, C. Manolatou, B. S. Schmidt, M. Lipson, M. A. Foster, J. E. Sharping, and A. L. Gaeta, “Tailored anomalous group-velocity dispersion in silicon channel waveguides,” Opt. Express14, 4357–4362 (2006). [CrossRef] [PubMed]
  11. G. Pandraud, P. French, and P. Sarro. “Fabrication and characteristics of a PECVD SiC evanescent wave optical sensor,” Sensors and Actuators A: Physical, 142(1), 61–66 (2008). [CrossRef]
  12. K. M. Jackson, J. Dunning, C. A. Zorman, M. Mehregany, and W. N. Sharpe, “Mechanical properties of epitaxial 3C silicon carbide thin films,” J. Microelectromechanical Sys.14, 664–672 (2005). [CrossRef]
  13. P. Yih, V. Saxena, and A. Steckl, “A review of SiC reactive ion etching in fluorinated plasmas,” physica status solidi (b)202, 605–642 (1997). [CrossRef]
  14. A. Nitkowski, L. Chen, and M. Lipson, “Cavity-enhanced on-chip absorption spectroscopy using microring resonators,” Opt. Express16, 11930–11936 (2008). [CrossRef] [PubMed]
  15. K. Preston and M. Lipson, “Slot waveguides with polycrystalline silicon for electrical injection,” Opt. Express17, 1527–1534 (2009). [CrossRef] [PubMed]
  16. M. A. Hopcroft, W. D. Nix, and T. W. Kenny, “What is the young’s modulus of silicon?” J. Microelectromechanical Sys.19, 229–238 (2010). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1 Fig. 2 Fig. 3
 

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited