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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 14 — Jul. 15, 2013
  • pp: 17234–17248

Phase extraction from interferograms with unknown tilt phase shifts based on a regularized optical flow method

Fa Zeng, Qiaofeng Tan, Huarong Gu, and Guofan Jin  »View Author Affiliations


Optics Express, Vol. 21, Issue 14, pp. 17234-17248 (2013)
http://dx.doi.org/10.1364/OE.21.017234


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Abstract

A novel method is presented to extract phase distribution from phase-shifted interferograms with unknown tilt phase shifts. The proposed method can estimate the tilt phase shift between two temporal phase-shifted interferograms with high accuracy, by extending the regularized optical flow method with the spatial image processing and frequency estimation technology. With all the estimated tilt phase shifts, the phase component encoded in the interferograms can be extracted by the least-squares method. Both simulation and experimental results have fully proved the feasibility of the proposed method. Particularly, a flat-based diffractive optical element with quasi-continuous surface is tested by the proposed method with introduction of considerably large tilt phase shift amounts (i.e., the highest estimated tilt phase shift amount between two consecutive frame reaches 6.18λ). The phase extraction result is in good agreement with that of Zygo’s MetroPro software under steady-state testing conditions, and the residual difference between them is discussed. In comparison with the previous methods, the proposed method not only has relatively little restrictions on the amounts or orientations of the tilt phase shifts, but also works well with interferograms including open and closed fringes in any combination.

© 2013 OSA

OCIS Codes
(050.5080) Diffraction and gratings : Phase shift
(120.2650) Instrumentation, measurement, and metrology : Fringe analysis
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: May 13, 2013
Revised Manuscript: July 3, 2013
Manuscript Accepted: July 3, 2013
Published: July 11, 2013

Citation
Fa Zeng, Qiaofeng Tan, Huarong Gu, and Guofan Jin, "Phase extraction from interferograms with unknown tilt phase shifts based on a regularized optical flow method," Opt. Express 21, 17234-17248 (2013)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-21-14-17234


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References

  1. J. Vargas, J. A. Quiroga, A. Álvarez-Herrero, and T. Belenguer, “Phase-shifting interferometry based on induced vibrations,” Opt. Express19(2), 584–596 (2011). [CrossRef] [PubMed]
  2. D. Malacara, Optical Shop Testing, 3rd ed. (Wiley, 2007), Chap. 14, pp. 547–666.
  3. R. Juarez-Salazar, C. Robledo-Sánchez, C. Meneses-Fabian, F. Guerrero-Sánchez, and L. M. Arévalo Aguilar, “Generalized phase-shifting interferometry by parameter estimation with the least squares method,” Opt. Lasers Eng.51(5), 626–632 (2013). [CrossRef]
  4. Z. Wang and B. Han, “Advanced iterative algorithm for phase extraction of randomly phase-shifted interferograms,” Opt. Lett.29(14), 1671–1673 (2004). [CrossRef] [PubMed]
  5. X. F. Xu, L. Z. Cai, Y. R. Wang, X. F. Meng, W. J. Sun, H. Zhang, X. C. Cheng, G. Y. Dong, and X. X. Shen, “Simple direct extraction of unknown phase shift and wavefront reconstruction in generalized phase-shifting interferometry: algorithm and experiments,” Opt. Lett.33(8), 776–778 (2008). [CrossRef] [PubMed]
  6. P. Gao, B. Yao, N. Lindlein, K. Mantel, I. Harder, and E. Geist, “Phase-shift extraction for generalized phase-shifting interferometry,” Opt. Lett.34(22), 3553–3555 (2009). [CrossRef] [PubMed]
  7. B. Li, L. Chen, W. Tuya, S. Ma, and R. Zhu, “Carrier squeezing interferometry: suppressing phase errors from the inaccurate phase shift,” Opt. Lett.36(6), 996–998 (2011). [CrossRef] [PubMed]
  8. J. Vargas and C. O. S. Sorzano, “Quadrature Component Analysis for interferometry,” Opt. Lasers Eng.51(5), 637–641 (2013). [CrossRef]
  9. H. Guo, “Blind self-calibrating algorithm for phase-shifting interferometry by use of cross-bispectrum,” Opt. Express19(8), 7807–7815 (2011). [CrossRef] [PubMed]
  10. J. Vargas, J. A. Quiroga, C. O. S. Sorzano, J. C. Estrada, and J. M. Carazo, “Two-step interferometry by a regularized optical flow algorithm,” Opt. Lett.36(17), 3485–3487 (2011). [CrossRef] [PubMed]
  11. M. Chen, H. Guo, and C. Wei, “Algorithm immune to tilt phase-shifting error for phase-shifting interferometers,” Appl. Opt.39(22), 3894–3898 (2000). [CrossRef] [PubMed]
  12. A. Dobroiu, D. Apostol, V. Nascov, and V. Damian, “Tilt-compensating algorithm for phase-shift interferometry,” Appl. Opt.41(13), 2435–2439 (2002). [CrossRef] [PubMed]
  13. O. Soloviev and G. Vdovin, “Phase extraction from three and more interferograms registered with different unknown wavefront tilts,” Opt. Express13(10), 3743–3753 (2005). [CrossRef] [PubMed]
  14. J. Xu, Q. Xu, and L. Chai, “Iterative algorithm for phase extraction from interferograms with random and spatially nonuniform phase shifts,” Appl. Opt.47(3), 480–485 (2008). [CrossRef] [PubMed]
  15. J. Xu, Q. Xu, and L. Chai, “Tilt-shift determination and compensation in phase-shifting interferometry,” J. Opt. A, Pure Appl. Opt.10(7), 075011 (2008). [CrossRef]
  16. S. Ye and E. Aboutanios, “Two dimensional frequency estimation by interpolation on Fourier coefficients,” in Proc. of IEEE Int. Conf. on Acoustics, Speech and Signal Processing, 3353–3356 (2012). [CrossRef]
  17. R. C. Gonzalez, R. E. Woods, and S. L. Eddins, Digital Image Processing Using MATLAB (Prentice Hall, 2004).
  18. L. G. Shapiro and G. C. Stockman, Computer Vision (Prentice Hall, Upper Saddle River, New Jersey, USA, 2001).

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