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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 17 — Aug. 26, 2013
  • pp: 20334–20345

HyDRa: control of parameters for deterministic polishing

E. Ruiz, L. Salas, E. Sohn, E. Luna, J. Herrera, and F. Quiros  »View Author Affiliations

Optics Express, Vol. 21, Issue 17, pp. 20334-20345 (2013)

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Deterministic hydrodynamic polishing with HyDRa requires a precise control of polishing parameters, such as propelling air pressure, slurry density, slurry flux and tool height. We describe the HyDRa polishing system and prove how precise, deterministic polishing can be achieved in terms of the control of these parameters. The polishing results of an 84 cm hyperbolic mirror are presented to illustrate how the stability of these parameters is important to obtain high-quality surfaces.

© 2013 osa

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(220.0220) Optical design and fabrication : Optical design and fabrication

ToC Category:
Optical Design and Fabrication

Original Manuscript: June 13, 2013
Revised Manuscript: June 25, 2013
Manuscript Accepted: July 8, 2013
Published: August 22, 2013

E. Ruiz, L. Salas, E. Sohn, E. Luna, J. Herrera, and F. Quiros, "HyDRa: control of parameters for deterministic polishing," Opt. Express 21, 20334-20345 (2013)

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