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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 18 — Sep. 9, 2013
  • pp: 20964–20973

Submicrometer 3D structures fabrication enabled by one-photon absorption direct laser writing

Mai Trang Do, Thi Thanh Ngan Nguyen, Qinggele Li, Henri Benisty, Isabelle Ledoux-Rak, and Ngoc Diep Lai  »View Author Affiliations

Optics Express, Vol. 21, Issue 18, pp. 20964-20973 (2013)

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We demonstrate a new 3D fabrication method to achieve the same results as those obtained by the two-photon excitation technique, by using a simple one-photon elaboration method in a very low absorption regime. Desirable 2D and 3D submicrometric structures, such as spiral, chiral, and woodpile architectures, with feature size as small as 190 nm have been fabricated, by using just a few milliwatts of a continuous-wave laser at 532 nm and a commercial SU8 photoresist. Different aspects of the direct laser writing based on ultralow one-photon absorption (LOPA) technique are investigated and compared with the TPA technique, showing several advantages, such as simplicity and low cost.

© 2013 OSA

OCIS Codes
(110.0180) Imaging systems : Microscopy
(140.3390) Lasers and laser optics : Laser materials processing
(170.6900) Medical optics and biotechnology : Three-dimensional microscopy
(220.3740) Optical design and fabrication : Lithography
(220.4000) Optical design and fabrication : Microstructure fabrication
(010.1030) Atmospheric and oceanic optics : Absorption

ToC Category:
Laser Microfabrication

Original Manuscript: June 5, 2013
Manuscript Accepted: June 28, 2013
Published: August 30, 2013

Mai Trang Do, Thi Thanh Ngan Nguyen, Qinggele Li, Henri Benisty, Isabelle Ledoux-Rak, and Ngoc Diep Lai, "Submicrometer 3D structures fabrication enabled by one-photon absorption direct laser writing," Opt. Express 21, 20964-20973 (2013)

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