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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 19 — Sep. 23, 2013
  • pp: 21970–21980

Full field tabletop EUV coherent diffractive imaging in a transmission geometry

Bosheng Zhang, Matthew D. Seaberg, Daniel E. Adams, Dennis F. Gardner, Elisabeth R. Shanblatt, Justin M. Shaw, Weilun Chao, Eric M. Gullikson, Farhad Salmassi, Henry C. Kapteyn, and Margaret M. Murnane  »View Author Affiliations

Optics Express, Vol. 21, Issue 19, pp. 21970-21980 (2013)

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We demonstrate the first general tabletop EUV coherent microscope that can image extended, non-isolated, non-periodic, objects. By implementing keyhole coherent diffractive imaging with curved mirrors and a tabletop high harmonic source, we achieve improved efficiency of the imaging system as well as more uniform illumination at the sample, when compared with what is possible using Fresnel zone plates. Moreover, we show that the unscattered light from a semi-transparent sample can be used as a holographic reference wave, allowing quantitative information about the thickness of the sample to be extracted from the retrieved image. Finally, we show that excellent tabletop image fidelity is achieved by comparing the retrieved images with scanning electron and atomic force microscopy images, and show superior capabilities in some cases.

© 2013 OSA

OCIS Codes
(100.5070) Image processing : Phase retrieval
(190.2620) Nonlinear optics : Harmonic generation and mixing
(340.7460) X-ray optics : X-ray microscopy
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)

ToC Category:
X-ray Optics

Original Manuscript: June 26, 2013
Revised Manuscript: September 1, 2013
Manuscript Accepted: September 2, 2013
Published: September 11, 2013

Virtual Issues
Vol. 8, Iss. 10 Virtual Journal for Biomedical Optics

Bosheng Zhang, Matthew D. Seaberg, Daniel E. Adams, Dennis F. Gardner, Elisabeth R. Shanblatt, Justin M. Shaw, Weilun Chao, Eric M. Gullikson, Farhad Salmassi, Henry C. Kapteyn, and Margaret M. Murnane, "Full field tabletop EUV coherent diffractive imaging in a transmission geometry," Opt. Express 21, 21970-21980 (2013)

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