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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 19 — Sep. 23, 2013
  • pp: 22400–22409

Optical characterization of two-dimensional array of 2048 tilting micromirrors for astronomical spectroscopy

Michael D. Canonica, Frédéric Zamkotsian, Patrick Lanzoni, Wilfried Noell, and Nico De Rooij  »View Author Affiliations

Optics Express, Vol. 21, Issue 19, pp. 22400-22409 (2013)

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A micromirror array composed of 2048 silicon micromirrors measuring 200 × 100 μm2 and tilting by 25° was developed as a reconfigurable slit mask for multi-object spectroscopy (MOS) in astronomy. The fill factor, contrast, and mirror deformation at both room and cryogenic temperatures were investigated. Contrast was measured using an optical setup that mimics a MOS instrument, and mirror deformation was characterized using a Twyman-Green interferometer. The results indicate that the array exhibited a fill factor of 82%, a contrast ratio of 1000:1, and surface mirror deformations of 8 nm and 27 nm for mirrors tilted at 298 K and 162 K, respectively.

© 2013 Optical Society of America

OCIS Codes
(230.3990) Optical devices : Micro-optical devices
(350.1260) Other areas of optics : Astronomical optics
(230.4685) Optical devices : Optical microelectromechanical devices

ToC Category:
Optical Devices

Original Manuscript: July 17, 2013
Revised Manuscript: August 29, 2013
Manuscript Accepted: August 29, 2013
Published: September 16, 2013

Michael D. Canonica, Frédéric Zamkotsian, Patrick Lanzoni, Wilfried Noell, and Nico De Rooij, "Optical characterization of two-dimensional array of 2048 tilting micromirrors for astronomical spectroscopy," Opt. Express 21, 22400-22409 (2013)

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