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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 20 — Oct. 7, 2013
  • pp: 24375–24384

Light turning mirrors for hybrid integration of SiON-based optical waveguides and photo-detectors

F. Civitci, G. Sengo, A. Driessen, M. Pollnau, A. J. Annema, and H. J. W. M. Hoekstra  »View Author Affiliations

Optics Express, Vol. 21, Issue 20, pp. 24375-24384 (2013)

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For hybrid integration of an optical chip with an electronic chip containing photo-diodes and processing electronics, light must be coupled from the optical to the electronic chip. This paper presents a method to fabricate quasi-total-internal-reflecting mirrors on an optical chip, placed at an angle of 45° with the chip surface, that enable 90° out-of-plane light coupling between flip-chip bonded chips. The fabrication method utilizes a metal-free, parallel process and is fully compatible with conventional fabrication of optical chips. The mirrors are created using anisotropic etching of 45° facets in a Si substrate, followed by fabrication of the optical structures. After removal of the mirror-defining Si structures by isotropic etching, the obtained interfaces between optical structure and air direct the output from optical waveguides to out-of-plane photo-detectors on the electronic chip, which is aimed to be flip-chip mounted on the optical chip. For transverse-electric (transverse-magnetic) polarization simulations predict a functional loss of 7% (15%), while 7% (18%) is measured.

© 2013 Optical Society of America

OCIS Codes
(130.0130) Integrated optics : Integrated optics
(220.4000) Optical design and fabrication : Microstructure fabrication
(230.7380) Optical devices : Waveguides, channeled
(130.6622) Integrated optics : Subsystem integration and techniques
(130.3990) Integrated optics : Micro-optical devices

ToC Category:
Integrated Optics

Original Manuscript: July 24, 2013
Revised Manuscript: September 20, 2013
Manuscript Accepted: September 23, 2013
Published: October 4, 2013

F. Civitci, G. Sengo, A. Driessen, M. Pollnau, A. J. Annema, and H. J. W. M. Hoekstra, "Light turning mirrors for hybrid integration of SiON-based optical waveguides and photo-detectors," Opt. Express 21, 24375-24384 (2013)

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