Development of a simple system for simultaneously measuring 6DOF geometric motion errors of a linear guide |
Optics Express, Vol. 21, Issue 22, pp. 25805-25819 (2013)
http://dx.doi.org/10.1364/OE.21.025805
Enhanced HTML Acrobat PDF (1544 KB)
Abstract
A simple method for simultaneously measuring the 6DOF geometric motion errors of the linear guide was proposed. The mechanisms for measuring straightness and angular errors and for enhancing their resolution are described in detail. A common-path method for measuring the laser beam drift was proposed and it was used to compensate the errors produced by the laser beam drift in the 6DOF geometric error measurements. A compact 6DOF system was built. Calibration experiments with certain standard measurement meters showed that our system has a standard deviation of 0.5
© 2013 Optical Society of America
OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
ToC Category:
Instrumentation, Measurement, and Metrology
History
Original Manuscript: August 5, 2013
Revised Manuscript: October 11, 2013
Manuscript Accepted: October 13, 2013
Published: October 22, 2013
Citation
Feng Qibo, Zhang Bin, Cui Cunxing, Kuang Cuifang, Zhai Yusheng, and You Fenglin, "Development of a simple system for simultaneously measuring 6DOF geometric motion errors of a linear guide," Opt. Express 21, 25805-25819 (2013)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-21-22-25805
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References
- A. C. Okafor and Y. M. Ertekin, “Vertical machining center accuracy characterization using laser interferometer, part one: linear positional errors,” J. Mater. Process. Technol.105(3), 394–406 (2000). [CrossRef]
- A. C. Okafor and Y. M. Ertekin, “Vertical machining center accuracy characterization using laser interferometer, part two: angular errors,” J. Mater. Process. Technol.105(3), 407–420 (2000). [CrossRef]
- J. Ni, P. S. Huang, and S. M. Wu, “A multi-degree-of-freedom measurement system for CMM geometric errors,” ASME J. Eng. Ind.114, 362–389 (1992).
- P. S. Huang and J. Ni, “On-line error compensation of coordinate measuring machine,” Int. J. Mach. Tools Manuf.35(5), 725–738 (1995). [CrossRef]
- C. H. Liu, W. Y. Jywe, C. C. Hsu, and T. H. Hsu, “Development of a laser-based high-precision six-degrees-of-freedom motion errors measuring system for linear stage,” Rev. Sci. Instrum.76(5), 055110 (2005). [CrossRef]
- C. Chou, L. Y. Chou, C. K. Peng, Y. C. Huang, and K. C. Fan, “CCD-based geometrical error measurement using Fourier phase shift algorithm,” Int. J. Mach. Tools Manuf.37(5), 579–590 (1997). [CrossRef]
- S. Shimizu, H. S. Lee, and N. Imai, “Simultaneous measuring method of table motion errors in 6 degrees of freedom,” Int. J. Japan Soc. Prec. Eng28, 273–274 (1994).
- Q. Feng, B. Zhang, and C. Kuang, “Four degree-of-freedom geometric measurement system with common-path compensation for laser beam drift,” Int. J. Prec. Eng. Manufact.9, 26–31 (2008).
- C. Kuang, Q. Feng, B. Zhang, B. Liu, S. Chen, and Z. Zhang, “A four-degree-of-freedom laser measurement system (FDMS) using a single-mode fiber-coupled laser module,” Sen. Actuators A125(1), 100–108 (2005). [CrossRef]
- K. C. Fan, M. J. Chen, and W. M. Huang, “A six-degree-of-freedom measurement system for the motion accuracy of linear stages,” Int. J. Mach. Tools Manuf.38(3), 155–164 (1998). [CrossRef]
- K. C. Fan and M. J. Chen, “6-Degree-of-freedom measurement system for the accuracy of X-Y stages,” Precis. Eng.24(1), 15–23 (2000). [CrossRef]
- W. Gao, Y. Arai, A. Shibuya, S. Kiyono, and C. H. Park, “Measurement of multi-degree-of-freedom error motions of a precision linear air-bearing stage,” Precis. Eng.30(1), 96–103 (2006). [CrossRef]
- C. H. Liu, H. L. Huang, and H. W. Lee, “Five-degrees-of-freedom diffractive laser encoder,” Appl. Opt.48(14), 2767–2777 (2009). [CrossRef] [PubMed]
- J. A. Kim, E. W. Bae, S. H. Kim, and Y. K. Kwak, “Design methods for six-degree-of-freedom displacement measurement systems using cooperative targets,” Precis. Eng.26(1), 99–104 (2002). [CrossRef]
- J. S. Kim, K. C. Kim, E. W. Bae, S. H. Kim, and Y. K. Kwak, “Six-degree-of-freedom displacement measurement system using a diffraction grating,” Rev. Sci. Instrum.71(8), 3214–3219 (2000). [CrossRef]
- C. Y. Tsai, “Exact analytical approach for six-degree-of-freedom measurement using image-orientation-change method,” J. Opt. Soc. Am. A-Opt. Im. Sci. Vision.29, 385–393 (2012).
- U. Kenta, F. Ryosyu, O. Sonko, T. Toshiyuki, and K. Tomizo, “Geometric calibration of a coordinate measuring machine using a laser tracking system,” Meas. Sci. Technol.16(12), 2466–2472 (2005). [CrossRef]
- C. B. Lee, G. H. Kim, and S. K. Lee, “Design and construction of a single unit multi-function optical encoder for a six-degree-of-freedom motion error measurement in an ultra-precision linear stage,” Meas. Sci. Technol.22(10), 105901 (2011). [CrossRef]
- E. W. Bae, J. A. Kim, and S. H. Kim, “Multi-degree-of-freedom displacement measurement system for milli-structures,” Meas. Sci. Technol.12(9), 1495–1502 (2001). [CrossRef]
- D. P. Burt, P. S. Dobson, K. E. Docherty, C. W. Jones, R. K. Leach, S. Thoms, J. M. Weaver, and Y. Zhang, “Aperiodic interferometer for six degrees of freedom position measurement,” Opt. Lett.37(7), 1247–1249 (2012). [CrossRef] [PubMed]
- S. W. Lee, R. Mayor, and J. Ni, “Development of a six-degree-of-freedom geometric error measurement system for a meso-scale machine tool,” J. Manuf. Sci. Eng.127(4), 857–865 (2005). [CrossRef]
- P. Sandoz, “Nanometric position and displacement measurement of the six degrees of freedom by means of a patterned surface element,” Appl. Opt.44(8), 1449–1453 (2005). [CrossRef] [PubMed]
- http://www.apisensor.com/ .
- Q. Feng, B. Zhang, and C. Kuang, “A straightness measurement system using a single-mode fiber-coupled laser module,” Opt. Laser Technol.36(4), 279–283 (2004). [CrossRef]
- C. Kuang, E. Hong, Q. Feng, B. Zhang, and Z. Zhang, “A novel method to enhance the sensitivity for two-degrees-of-freedom straightness measurement,” Meas. Sci. Technol.18(12), 3795–3800 (2007). [CrossRef]
- C. Kuang, E. Hong, and Q. Feng, “High-accuracy method for measuring two-dimensional angles of a linear guideway,” Opt. Eng.46(5), 051016 (2007). [CrossRef]
- Y. Zhai, Q. Feng, and B. Zhang, “A simple roll measurement method based on a rectangular-prism,” Opt. Laser Technol.44(4), 839–843 (2012). [CrossRef]
- Y. Zhai, Q. Feng, and B. Zhang, “A novel method for roll measurement based on grating,” Acta Opt. Sin.28, 112–116 (2008).
- C. Kuang, Q. Feng, B. Zhang, Z. Zhang, and S. Chen, “Measurement method of the roll angle,” Proc. SPIE6150, 61502F (2006). [CrossRef]
- R. Cao, B. Zhang, and Q. Feng, “A method for roll-angle measurement in multi-degree-of-freedom measuring system,” Acta Opt. Sin.28(12), 2344–2348 (2008). [CrossRef]
- F. You, B. Zhang, and Q. Feng, “A novel laser straightness measurement method with a beam bend compensation,” Optik (Stuttg.)122(17), 1530–1534 (2011). [CrossRef]
- F. You, Q. Feng, and B. Zhang, “Straightness error measurement based on common-path compensation for laser beam drift,” Opt. Prec. Eng.19(3), 515–519 (2011). [CrossRef]
- F. Zhu, J. Tan, and J. Cui, “Common-path design criteria for laser datum based measurement of small angle deviations and laser autocollimation methods in compliance with the criteria with high accuracy and stability,” Opt. Express21, 188494 (2013).
- K. Li, C. Kuang, and X. Liu, “Small angular displacement measurement based on an autocollimator and a common-path compensation principle,” Rev. Sci. Instrum.84(1), 015108 (2013). [CrossRef] [PubMed]
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