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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 22 — Nov. 4, 2013
  • pp: 26123–26135

Comparative analysis of oxidation methods of reaction-sintered silicon carbide for optimization of oxidation-assisted polishing

Xinmin Shen, Yifan Dai, Hui Deng, Chaoliang Guan, and Kazuya Yamamura  »View Author Affiliations

Optics Express, Vol. 21, Issue 22, pp. 26123-26135 (2013)

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Combination of the oxidation of reaction-sintered silicon carbide (RS-SiC) and the polishing of the oxide is an effective way of machining RS-SiC. In this study, anodic oxidation, thermal oxidation, and plasma oxidation were respectively conducted to obtain oxides on RS-SiC surfaces. By performing scanning electron microscopy/energy dispersive X-ray spectroscopy (SEM-EDX) analysis and scanning white light interferometry (SWLI) measurement, the oxidation behavior of these oxidation methods was compared. Through ceria slurry polishing, the polishing properties of the oxides were evaluated. Analysis of the oxygen element on polished surfaces by SEM-EDX was conducted to evaluate the remaining oxide. By analyzing the three oxidation methods with corresponding polishing process on the basis of schematic diagrams, suitable application conditions for these methods were clarified. Anodic oxidation with simultaneous polishing is suitable for the rapid figuring of RS-SiC with a high material removal rate; polishing of a thermally oxidized surface is suitable for machining RS-SiC mirrors with complex shapes; combination of plasma oxidation and polishing is suitable for the fine finishing of RS-SiC with excellent surface roughness. These oxidation methods are expected to improve the machining of RS-SiC substrates and promote the application of RS-SiC products in the fields of optics, molds, and ceramics.

© 2013 Optical Society of America

OCIS Codes
(160.4670) Materials : Optical materials
(220.5450) Optical design and fabrication : Polishing
(240.5770) Optics at surfaces : Roughness
(310.3840) Thin films : Materials and process characterization
(350.3850) Other areas of optics : Materials processing

ToC Category:
Optical Design and Fabrication

Original Manuscript: August 5, 2013
Revised Manuscript: October 15, 2013
Manuscript Accepted: October 19, 2013
Published: October 24, 2013

Xinmin Shen, Yifan Dai, Hui Deng, Chaoliang Guan, and Kazuya Yamamura, "Comparative analysis of oxidation methods of reaction-sintered silicon carbide for optimization of oxidation-assisted polishing," Opt. Express 21, 26123-26135 (2013)

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