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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 3 — Feb. 11, 2013
  • pp: 2807–2815

Optical beamsteering using an 8 × 8 MEMS phased array with closed-loop interferometric phase control

Trevor K. Chan, Mischa Megens, Byung-Wook Yoo, John Wyras, Connie J. Chang-Hasnain, Ming C. Wu, and David A. Horsley  »View Author Affiliations


Optics Express, Vol. 21, Issue 3, pp. 2807-2815 (2013)
http://dx.doi.org/10.1364/OE.21.002807


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Abstract

We present a high-speed optical beamsteering system based on an 8x8 MEMS phased array. The system incorporates an in situ interferometer that provides a real-time, dynamic measure of the phase of each mirror in the array during beamsteering. A closed-loop phase-control algorithm results in <π/100 mirror phase accuracy and far field beam steering is shown. Stroboscopic measurement capabilities are demonstrated which allow us to show feedforward control to eliminate micromirror ringing.

© 2013 OSA

OCIS Codes
(110.5100) Imaging systems : Phased-array imaging systems
(230.6120) Optical devices : Spatial light modulators
(060.2605) Fiber optics and optical communications : Free-space optical communication
(100.3175) Image processing : Interferometric imaging
(230.4685) Optical devices : Optical microelectromechanical devices

ToC Category:
Optical Devices

History
Original Manuscript: November 30, 2012
Revised Manuscript: January 17, 2013
Manuscript Accepted: January 22, 2013
Published: January 29, 2013

Citation
Trevor K. Chan, Mischa Megens, Byung-Wook Yoo, John Wyras, Connie J. Chang-Hasnain, Ming C. Wu, and David A. Horsley, "Optical beamsteering using an 8 × 8 MEMS phased array with closed-loop interferometric phase control," Opt. Express 21, 2807-2815 (2013)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-21-3-2807


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References

  1. P. F. McManamon, P. J. Bos, M. J. Escuti, J. Heikenfeld, S. Serati, H. Xie, and E. A. Watson, “A review of phased array steering for narrow-band electrooptical systems,” Proc. IEEE97(6), 1078–1096 (2009). [CrossRef]
  2. A. C. Clay, S.-C. Wooh, L. Azar, and J.-Y. Wang, “Experimental study of phased array beam steering characteristics,” J. Nondestruct. Evaluat.18(2), 59–71 (1999). [CrossRef]
  3. D. P. Resler, D. S. Hobbs, R. C. Sharp, L. J. Friedman, and T. A. Dorschner, “High-efficiency liquid-crystal optical phased-array beam steering,” Opt. Lett.21(9), 689–691 (1996). [CrossRef] [PubMed]
  4. B.-W. Yoo, M. Megens, T. K. Chan, T. Sun, W. Yang, C. Chang-Hasnain, D. A. Horsley, and M. C. Wu, “Optical phased array using high contrast gratings for two dimensional beamforming and beamsteering,” submitted to Opt. Express.
  5. V. Karagodsky, F. G. Sedgwick, and C. J. Chang-Hasnain, “Theoretical analysis of subwavelength high contrast grating reflectors,” Opt. Express18(16), 16973–16988 (2010). [CrossRef] [PubMed]
  6. L. L. Chu and Y. B. Gianchandani, “A micromachined 2D positioner with electrothermal actuation and sub-nanometer capacitive sensing,” J. Micromech. Microeng.13(2), 279–285 (2003). [CrossRef]
  7. J. Dong and P. M. Ferreira, “Simultaneous actuation and displacement sensing for electrostatic drives,” J. Micromech. Microeng.18(3), 035011 (2008). [CrossRef]
  8. N. C. Singer and W. P. Seering, “Preshaping command inputs to reduce system vibration,” J. Dyn. Syst. Meas. Control112(1), 76–82 (1990). [CrossRef]
  9. J. W. Goodman, Introduction to Fourier Optics, (McGraw-Hill Science/Engineering/Math, 1996), Chap. 4.
  10. T. G. Bifano and J. B. Stewart, “High-speed wavefront control using MEMS micromirrors,” Proc. SPIE5895, 58950Q, 58950Q–9 (2005). [CrossRef]

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