A novel phase measurement method composed of the rising-edge locked signal processing and the digital frequency mixing is proposed for laser heterodyne interferometer. The rising-edge locked signal processing, which employs a high frequency clock signal to lock the rising-edges of the reference and measurement signals, not only can improve the steepness of the rising-edge, but also can eliminate the error counting caused by multi-rising-edge phenomenon in fringe counting. The digital frequency mixing is realized by mixing the digital interference signal with a digital base signal that is different from conventional frequency mixing with analogue signals. These signal processing can improve the measurement accuracy and enhance anti-interference and measurement stability. The principle and implementation of the method are described in detail. An experimental setup was constructed and a series of experiments verified the feasibility of the method in large displacement measurement with high speed and nanometer resolution.

© 2013 OSA

1. T. Schuldt, M. Gohlke, D. Weise, U. Johann, and C. Braxmaier, “A high-precision dilatometer based on sub-nm heterodyne interferometry,” in International Symposium on Optomechatronic Technologies (Institute of Electrical and Electronics Engineers, New York, 2009), pp. 146–151.
2. S. Jacob, C. Johansson, M. Ulfendahl, and A. Fridberger, “A digital heterodyne laser interferometer for studying cochlear mechanics,” J. Neurosci. Methods179(2), 271–277 (2009). [CrossRef] [PubMed]
3. K. H. Chen, W. Y. Chang, and J. H. Chen, “Measurement of the pretilt angle and the cell gap of nematic liquid crystal cells by heterodyne interferometry,” Opt. Express17(16), 14143–14149 (2009). [CrossRef] [PubMed]
4. B. Y. Chen, E. Z. Zhang, L. P. Yan, C. R. Li, W. H. Tang, and Q. B. Feng, “A laser interferometer for measuring straightness and its position based on heterodyne interferometry,” Rev. Sci. Instrum.80(11), 115113 (2009). [CrossRef] [PubMed]
5. G. de Vine, D. S. Rabeling, B. J. J. Slagmolen, T. T. Lam, S. Chua, D. M. Wuchenich, D. E. McClelland, and D. A. Shaddock, “Picometer level displacement metrology with digitally enhanced heterodyne interferometry,” Opt. Express17(2), 828–837 (2009). [CrossRef] [PubMed]
6. S. F. Wang, W. Lai, J. S. Chiu, R. H. Yeh, H. C. Tseng, and W. C. Chen, “Method for measuring the twist angle of an optically compensation bend by using the heterodyne interferometry,” in International Instrumentation and Measurement Technology Conference (Institute of Electrical and Electronics Engineers, New York, 2010), pp. 296–299.
7. N. M. Oldham, J. A. Kramar, P. S. Hetrick, and E. C. Teague, “Electronic limitations in phase meters for heterodyne interferometry,” Precis. Eng.15(3), 173–179 (1993). [CrossRef]
8. M. S. Kim and S. W. Kim, “Two-Longitudinal-Mode He-Ne laser for Heterodyne Interferometers to Measure Displacement,” Appl. Opt.41(28), 5938–5942 (2002). [CrossRef] [PubMed]
9. S. Yokoyama, T. Yokoyama, and T. Araki, “High-speed subnanometre interferometry using an improved three-mode heterodyne interferometer,” Meas. Sci. Technol.16(9), 1841–1847 (2005). [CrossRef]
10. P. Köchert, J. Flügge, C. Weichert, R. Köning, and E. Manske, “Phase measurement of various commercial heterodyne He–Ne-laser interferometers with stability in the picometer regime,” Meas. Sci. Technol.23(7), 074005 (2012). [CrossRef]
11. T. B. Eom, J. A. Kim, C. S. Kang, B. C. Park, and J. W. Kim, “A simple phase-encoding electronics for reducing the nonlinearity error of a heterodyne interferometer,” Meas. Sci. Technol.19(7), 075302 (2008). [CrossRef]
12. N. B. Yim, C. I. Eom, and S. W. Kim, “Dual mode phase measurement for optical heterodyne interferometry,” Meas. Sci. Technol.11(8), 1131–1137 (2000). [CrossRef]
13. M.-S. Kim and S.-W. Kim, “Two-way frequency-conversion phase measurement for high-speed and high-resolution heterodyne interferometry,” Meas. Sci. Technol.15(11), 2341–2348 (2004). [CrossRef]

Appl. Opt.

• M. S. Kim and S. W. Kim, “Two-Longitudinal-Mode He-Ne laser for Heterodyne Interferometers to Measure Displacement,” Appl. Opt.41(28), 5938–5942 (2002). [CrossRef] [PubMed]

J. Neurosci. Methods

• S. Jacob, C. Johansson, M. Ulfendahl, and A. Fridberger, “A digital heterodyne laser interferometer for studying cochlear mechanics,” J. Neurosci. Methods179(2), 271–277 (2009). [CrossRef] [PubMed]

Meas. Sci. Technol.

• S. Yokoyama, T. Yokoyama, and T. Araki, “High-speed subnanometre interferometry using an improved three-mode heterodyne interferometer,” Meas. Sci. Technol.16(9), 1841–1847 (2005). [CrossRef]
• P. Köchert, J. Flügge, C. Weichert, R. Köning, and E. Manske, “Phase measurement of various commercial heterodyne He–Ne-laser interferometers with stability in the picometer regime,” Meas. Sci. Technol.23(7), 074005 (2012). [CrossRef]
• T. B. Eom, J. A. Kim, C. S. Kang, B. C. Park, and J. W. Kim, “A simple phase-encoding electronics for reducing the nonlinearity error of a heterodyne interferometer,” Meas. Sci. Technol.19(7), 075302 (2008). [CrossRef]
• N. B. Yim, C. I. Eom, and S. W. Kim, “Dual mode phase measurement for optical heterodyne interferometry,” Meas. Sci. Technol.11(8), 1131–1137 (2000). [CrossRef]
• M.-S. Kim and S.-W. Kim, “Two-way frequency-conversion phase measurement for high-speed and high-resolution heterodyne interferometry,” Meas. Sci. Technol.15(11), 2341–2348 (2004). [CrossRef]

Opt. Express

• K. H. Chen, W. Y. Chang, and J. H. Chen, “Measurement of the pretilt angle and the cell gap of nematic liquid crystal cells by heterodyne interferometry,” Opt. Express17(16), 14143–14149 (2009). [CrossRef] [PubMed]
• G. de Vine, D. S. Rabeling, B. J. J. Slagmolen, T. T. Lam, S. Chua, D. M. Wuchenich, D. E. McClelland, and D. A. Shaddock, “Picometer level displacement metrology with digitally enhanced heterodyne interferometry,” Opt. Express17(2), 828–837 (2009). [CrossRef] [PubMed]

Precis. Eng.

• N. M. Oldham, J. A. Kramar, P. S. Hetrick, and E. C. Teague, “Electronic limitations in phase meters for heterodyne interferometry,” Precis. Eng.15(3), 173–179 (1993). [CrossRef]

Rev. Sci. Instrum.

• B. Y. Chen, E. Z. Zhang, L. P. Yan, C. R. Li, W. H. Tang, and Q. B. Feng, “A laser interferometer for measuring straightness and its position based on heterodyne interferometry,” Rev. Sci. Instrum.80(11), 115113 (2009). [CrossRef] [PubMed]

Other

• S. F. Wang, W. Lai, J. S. Chiu, R. H. Yeh, H. C. Tseng, and W. C. Chen, “Method for measuring the twist angle of an optically compensation bend by using the heterodyne interferometry,” in International Instrumentation and Measurement Technology Conference (Institute of Electrical and Electronics Engineers, New York, 2010), pp. 296–299.
• T. Schuldt, M. Gohlke, D. Weise, U. Johann, and C. Braxmaier, “A high-precision dilatometer based on sub-nm heterodyne interferometry,” in International Symposium on Optomechatronic Technologies (Institute of Electrical and Electronics Engineers, New York, 2009), pp. 146–151.

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