Modulation of optical intensity on curved surfaces and its application to fabricate DOEs with arbitrary profile by interference

doi:10.1364/OE.21.005140

Modulation of optical intensity on curved surfaces and its application to fabricate DOEs with arbitrary profile by interference

Haozhi Zhao, Juan Liu, Ru Xiao, Xin Li, Rui Shi, Peng Liu, Haizheng Zhong, Bingsuo Zou, and Yongtian Wang »View Author Affiliations

Optics Express, Vol. 21, Issue 4, pp. 5140-5148 (2013)
http://dx.doi.org/10.1364/OE.21.005140

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Abstract

We demonstrate a novel method for the modulation of the optical intensity on curved surfaces (CS) by interference and apply it to fabricate diffractive optical elements (DOEs) with arbitrary profile and large area on CS. The intensity on CS is modulated accurately by two phase distributions. Both a binary pattern and a gray pattern are reconstructed numerically on the lens surfaces with big curvatures in large areas, while a binary and non-periodic pattern is produced experimentally on a lens surface with a radius of curvature in 25.8 mm. The simulations together with the experiment demonstrate the validity of the method. To our knowledge, it is the first time to present an approach for fabricating DOEs with arbitrary profile and large area on CS by interference.

OCIS Codes
(050.0050) Diffraction and gratings : Diffraction and gratings
(090.0090) Holography : Holography
(090.1760) Holography : Computer holography
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4000) Optical design and fabrication : Microstructure fabrication
(050.6875) Diffraction and gratings : Three-dimensional fabrication

ToC Category:
Diffraction and Gratings

History
Original Manuscript: November 28, 2012
Revised Manuscript: January 16, 2013
Manuscript Accepted: January 21, 2013
Published: February 22, 2013

Citation
Haozhi Zhao, Juan Liu, Ru Xiao, Xin Li, Rui Shi, Peng Liu, Haizheng Zhong, Bingsuo Zou, and Yongtian Wang, "Modulation of optical intensity on curved surfaces and its application to fabricate DOEs with arbitrary profile by interference," Opt. Express 21, 5140-5148 (2013)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-21-4-5140

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References

H. C. Ko, M. P. Stoykovich, J. Song, V. Malyarchuk, W. M. Choi, C. J. Yu, J. B. Geddes, J. Xiao, S. Wang, Y. Huang, and J. A. Rogers, “A hemispherical electronic eye camera based on compressible silicon optoelectronics,” Nature454(7205), 748–753 (2008). [CrossRef] [PubMed]
D. Radtke, J. Duparré, U. D. Zeitner, and A. Tünnermann, “Laser lithographic fabrication and characterization of a spherical artificial compound eye,” Opt. Express15(6), 3067–3077 (2007). [CrossRef] [PubMed]
T. Kita and T. Harada, “Ruling engine using a piezoelectric device for large and high-groove density gratings,” Appl. Opt.31(10), 1399–1406 (1992). [CrossRef] [PubMed]
P. Ruchhoeft, M. Colburn, B. Choi, H. Nounu, S. Johnson, T. Bailey, S. Damle, M. Stewart, J. Ekerdt, S. V. Sreenivasan, J. C. Wolfe, and C. G. Willson, “Patterning curved surfaces: template generation by ion beam proximity lithography and relief transfer by step and flash imprint lithography,” J. Vac. Sci. Technol. B17(6), 2965–2969 (1999). [CrossRef]
Y. Xie, Z. Lu, F. Li, J. Zhao, and Z. Weng, “Lithographic fabrication of large diffractive optical elements on a concave lens surface,” Opt. Express10(20), 1043–1047 (2002). [CrossRef] [PubMed]
Y. Xie, Z. Lu, and F. Li, “Lithographic fabrication of large curved hologram by laser writer,” Opt. Express12(9), 1810–1814 (2004). [CrossRef] [PubMed]
D. Radtke and U. D. Zeitner, “Laser-lithography on non-planar surfaces,” Opt. Express15(3), 1167–1174 (2007). [CrossRef] [PubMed]
T. Wang, W. Yu, D. Zhang, C. Li, H. Zhang, W. Xu, Z. Xu, H. Liu, Q. Sun, and Z. Lu, “Lithographic fabrication of diffractive optical elements in hybrid sol-gel glass on 3-D curved surfaces,” Opt. Express18(24), 25102–25107 (2010). [CrossRef] [PubMed]
R. J. Jackman, S. T. Brittain, A. Adams, M. G. Prentiss, and G. M. Whitesides, “Design and fabrication of topologically complex, three-dimensional microstructures,” Science280(5372), 2089–2091 (1998). [CrossRef] [PubMed]
J. G. Kim, N. Takama, B. J. Kim, and H. Fujita, “Optical-softlithographic technology for patterning on curved surfaces,” J. Micromech. Microeng.19(5), 055017 (2009). [CrossRef]
T. Senn, J. P. Esquivel, N. Sabate, and B. Lochel, “Fabrication of high aspect ratio nanostructures on 3D surfaces,” Microelectron. Eng.88(9), 3043–3048 (2011). [CrossRef]
T. A. Savas, S. N. Shah, M. L. Schattenburg, J. M. Carter, and H. I. Smith, “Achromatic interferometric lithography for 100-nm-period gratings and grids,” J. Vac. Sci. Technol. B13(6), 2732–2735 (1995). [CrossRef]
M. Campbell, D. N. Sharp, M. T. Harrison, R. G. Denning, and A. J. Turberfield, “Fabrication of photonic crystals for the visible spectrum by holographic lithography,” Nature404(6773), 53–56 (2000). [CrossRef] [PubMed]
K. M. Baker, “Highly corrected close-packed microlens arrays and moth-eye structuring on curved surfaces,” Appl. Opt.38(2), 352–356 (1999). [CrossRef] [PubMed]
J. Nishii, “Glass-imprinting for optical device fabrication,” in Advances in Optical Materials, OSA Technical Digest (CD) (Optical Society of America, 2009), paper AThC1.
K. Kintaka, J. Nishii, and N. Tohge, “Diffraction gratings of photosensitive ZrO2 gel films fabricated with the two-ultraviolet-beam interference method,” Appl. Opt.39(4), 489–493 (2000). [CrossRef] [PubMed]
A. Mizutani, S. Takahira, and H. Kikuta, “Two-spherical-wave ultraviolet interferometer for making an antireflective subwavelength periodic pattern on a curved surface,” Appl. Opt.49(32), 6268–6275 (2010). [CrossRef] [PubMed]
R. Shi, J. Liu, J. Xu, D. Liu, Y. Pan, J. Xie, and Y. Wang, “Designing and fabricating diffractive optical elements with a complex profile by interference,” Opt. Lett.36(20), 4053–4055 (2011). [CrossRef] [PubMed]
L. Ahrenberg, P. Benzie, M. Magnor, and J. Watson, “Computer generated holograms from three dimensional meshes using an analytic light transport model,” Appl. Opt.47(10), 1567–1574 (2008). [CrossRef] [PubMed]
Y. Z. Liu, J. W. Dong, Y. Y. Pu, B. C. Chen, H. X. He, and H. Z. Wang, “High-speed full analytical holographic computations for true-life scenes,” Opt. Express18(4), 3345–3351 (2010). [CrossRef] [PubMed]
T. Shimobaba, N. Masuda, and T. Ito, “Arbitrary shape surface Fresnel diffraction,” Opt. Express20(8), 9335–9340 (2012). [CrossRef] [PubMed]
J. W. Goodman, Introduction to Fourier Optics (McGraw-Hill, New York, 1996).
J. R. Shewell and E. Wolf, “Inverse diffraction and a new reciprocity theorem,” J. Opt. Soc. Am.58(12), 1596–1603 (1968). [CrossRef]
S. Yan, Design of Diffractive Micro-optics (National Defense Industry Press, Beijing, 2011), pp. 25, 70, 284 (in Chinese).
Y. Zhang and B. Wang, “Optical image encryption based on interference,” Opt. Lett.33(21), 2443–2445 (2008). [CrossRef] [PubMed]
P. Kumar, J. Joseph, and K. Singh, “Optical image encryption using a jigsaw transform for silhouette removal in interference-based methods and decryption with a single spatial light modulator,” Appl. Opt.50(13), 1805–1811 (2011). [CrossRef] [PubMed]
X. Wang and D. Zhao, “Optical image hiding with silhouette removal based on the optical interference principle,” Appl. Opt.51(6), 686–691 (2012). [CrossRef] [PubMed]

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[1] H. C. Ko, M. P. Stoykovich, J. Song, V. Malyarchuk, W. M. Choi, C. J. Yu, J. B. Geddes, J. Xiao, S. Wang, Y. Huang, and J. A. Rogers, “A hemispherical electronic eye camera based on compressible silicon optoelectronics,” Nature454(7205), 748–753 (2008). [CrossRef] [PubMed]

[2] D. Radtke, J. Duparré, U. D. Zeitner, and A. Tünnermann, “Laser lithographic fabrication and characterization of a spherical artificial compound eye,” Opt. Express15(6), 3067–3077 (2007). [CrossRef] [PubMed]

[3] T. Kita and T. Harada, “Ruling engine using a piezoelectric device for large and high-groove density gratings,” Appl. Opt.31(10), 1399–1406 (1992). [CrossRef] [PubMed]

[4] P. Ruchhoeft, M. Colburn, B. Choi, H. Nounu, S. Johnson, T. Bailey, S. Damle, M. Stewart, J. Ekerdt, S. V. Sreenivasan, J. C. Wolfe, and C. G. Willson, “Patterning curved surfaces: template generation by ion beam proximity lithography and relief transfer by step and flash imprint lithography,” J. Vac. Sci. Technol. B17(6), 2965–2969 (1999). [CrossRef]

[5] Y. Xie, Z. Lu, F. Li, J. Zhao, and Z. Weng, “Lithographic fabrication of large diffractive optical elements on a concave lens surface,” Opt. Express10(20), 1043–1047 (2002). [CrossRef] [PubMed]

[6] Y. Xie, Z. Lu, and F. Li, “Lithographic fabrication of large curved hologram by laser writer,” Opt. Express12(9), 1810–1814 (2004). [CrossRef] [PubMed]

[7] D. Radtke and U. D. Zeitner, “Laser-lithography on non-planar surfaces,” Opt. Express15(3), 1167–1174 (2007). [CrossRef] [PubMed]

[8] T. Wang, W. Yu, D. Zhang, C. Li, H. Zhang, W. Xu, Z. Xu, H. Liu, Q. Sun, and Z. Lu, “Lithographic fabrication of diffractive optical elements in hybrid sol-gel glass on 3-D curved surfaces,” Opt. Express18(24), 25102–25107 (2010). [CrossRef] [PubMed]

[9] R. J. Jackman, S. T. Brittain, A. Adams, M. G. Prentiss, and G. M. Whitesides, “Design and fabrication of topologically complex, three-dimensional microstructures,” Science280(5372), 2089–2091 (1998). [CrossRef] [PubMed]

[10] J. G. Kim, N. Takama, B. J. Kim, and H. Fujita, “Optical-softlithographic technology for patterning on curved surfaces,” J. Micromech. Microeng.19(5), 055017 (2009). [CrossRef]

[11] T. Senn, J. P. Esquivel, N. Sabate, and B. Lochel, “Fabrication of high aspect ratio nanostructures on 3D surfaces,” Microelectron. Eng.88(9), 3043–3048 (2011). [CrossRef]

[12] T. A. Savas, S. N. Shah, M. L. Schattenburg, J. M. Carter, and H. I. Smith, “Achromatic interferometric lithography for 100-nm-period gratings and grids,” J. Vac. Sci. Technol. B13(6), 2732–2735 (1995). [CrossRef]

[13] M. Campbell, D. N. Sharp, M. T. Harrison, R. G. Denning, and A. J. Turberfield, “Fabrication of photonic crystals for the visible spectrum by holographic lithography,” Nature404(6773), 53–56 (2000). [CrossRef] [PubMed]

[14] K. M. Baker, “Highly corrected close-packed microlens arrays and moth-eye structuring on curved surfaces,” Appl. Opt.38(2), 352–356 (1999). [CrossRef] [PubMed]

[15] J. Nishii, “Glass-imprinting for optical device fabrication,” in Advances in Optical Materials, OSA Technical Digest (CD) (Optical Society of America, 2009), paper AThC1.

[16] K. Kintaka, J. Nishii, and N. Tohge, “Diffraction gratings of photosensitive ZrO2 gel films fabricated with the two-ultraviolet-beam interference method,” Appl. Opt.39(4), 489–493 (2000). [CrossRef] [PubMed]

[17] A. Mizutani, S. Takahira, and H. Kikuta, “Two-spherical-wave ultraviolet interferometer for making an antireflective subwavelength periodic pattern on a curved surface,” Appl. Opt.49(32), 6268–6275 (2010). [CrossRef] [PubMed]

[18] R. Shi, J. Liu, J. Xu, D. Liu, Y. Pan, J. Xie, and Y. Wang, “Designing and fabricating diffractive optical elements with a complex profile by interference,” Opt. Lett.36(20), 4053–4055 (2011). [CrossRef] [PubMed]

[19] L. Ahrenberg, P. Benzie, M. Magnor, and J. Watson, “Computer generated holograms from three dimensional meshes using an analytic light transport model,” Appl. Opt.47(10), 1567–1574 (2008). [CrossRef] [PubMed]

[20] Y. Z. Liu, J. W. Dong, Y. Y. Pu, B. C. Chen, H. X. He, and H. Z. Wang, “High-speed full analytical holographic computations for true-life scenes,” Opt. Express18(4), 3345–3351 (2010). [CrossRef] [PubMed]

[21] T. Shimobaba, N. Masuda, and T. Ito, “Arbitrary shape surface Fresnel diffraction,” Opt. Express20(8), 9335–9340 (2012). [CrossRef] [PubMed]

[22] J. W. Goodman, Introduction to Fourier Optics (McGraw-Hill, New York, 1996).

[23] J. R. Shewell and E. Wolf, “Inverse diffraction and a new reciprocity theorem,” J. Opt. Soc. Am.58(12), 1596–1603 (1968). [CrossRef]

[24] S. Yan, Design of Diffractive Micro-optics (National Defense Industry Press, Beijing, 2011), pp. 25, 70, 284 (in Chinese).

[25] Y. Zhang and B. Wang, “Optical image encryption based on interference,” Opt. Lett.33(21), 2443–2445 (2008). [CrossRef] [PubMed]

[26] P. Kumar, J. Joseph, and K. Singh, “Optical image encryption using a jigsaw transform for silhouette removal in interference-based methods and decryption with a single spatial light modulator,” Appl. Opt.50(13), 1805–1811 (2011). [CrossRef] [PubMed]

[27] X. Wang and D. Zhao, “Optical image hiding with silhouette removal based on the optical interference principle,” Appl. Opt.51(6), 686–691 (2012). [CrossRef] [PubMed]

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Modulation of optical intensity on curved surfaces and its application to fabricate DOEs with arbitrary profile by interference