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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 6 — Mar. 25, 2013
  • pp: 7337–7342

Effect of non-vacuum thermal annealing on high indium content InGaN films deposited by pulsed laser deposition

Tzu-Yu Wang, Sin-Liang Ou, Kun-Ching Shen, and Dong-Sing Wuu  »View Author Affiliations

Optics Express, Vol. 21, Issue 6, pp. 7337-7342 (2013)

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InGaN films with 33% and 60% indium contents were deposited by pulsed laser deposition (PLD) at a low growth temperature of 300 °C. The films were then annealed at 500-800 °C in the non-vacuum furnace for 15 min with an addition of N2 atmosphere. X-ray diffraction results indicate that the indium contents in these two films were raised to 41% and 63%, respectively, after annealing in furnace. In2O3 phase was formed on InGaN surface during the annealing process, which can be clearly observed by the measurements of auger electron spectroscopy, transmission electron microscopy and x-ray photoelectron spectroscopy. Due to the obstruction of indium out-diffusion by forming In2O3 on surface, it leads to the efficient increment in indium content of InGaN layer. In addition, the surface roughness was greatly improved by removing In2O3 with the etching treatment in HCl solution. Micro-photoluminescence measurement was performed to analyze the emission property of InGaN layer. For the as-grown InGaN with 33% indium content, the emission wavelength was gradually shifted from 552 to 618 nm with increasing the annealing temperature to 800 °C. It reveals the InGaN films have high potential in optoelectronic applications.

© 2013 OSA

OCIS Codes
(160.2100) Materials : Electro-optical materials
(160.6000) Materials : Semiconductor materials

ToC Category:

Original Manuscript: January 22, 2013
Revised Manuscript: March 8, 2013
Manuscript Accepted: March 10, 2013
Published: March 15, 2013

Tzu-Yu Wang, Sin-Liang Ou, Kun-Ching Shen, and Dong-Sing Wuu, "Effect of non-vacuum thermal annealing on high indium content InGaN films deposited by pulsed laser deposition," Opt. Express 21, 7337-7342 (2013)

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