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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 8 — Apr. 22, 2013
  • pp: 9780–9791

Frequency-comb-referenced multi-wavelength profilometry for largely stepped surfaces

Sangwon Hyun, Minah Choi, Byung Jae Chun, Seungman Kim, Seung-Woo Kim, and Young-Jin Kim  »View Author Affiliations


Optics Express, Vol. 21, Issue 8, pp. 9780-9791 (2013)
http://dx.doi.org/10.1364/OE.21.009780


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Abstract

3-D profiles of discontinuous surfaces patterned with high step structures are measured using four wavelengths generated by phase-locking to the frequency comb of an Er-doped fiber femtosecond laser stabilized to the Rb atomic clock. This frequency-comb-referenced method of multi-wavelength interferometry permits extending the phase non-ambiguity range by a factor of 64,500 while maintaining the sub-wavelength measurement precision of single-wavelength interferometry. Experimental results show a repeatability of 3.13 nm (one-sigma) in measuring step heights of 1800, 500, and 70 μm. The proposed method is accurate enough for the standard calibration of gauge blocks and also fast to be suited for the industrial inspection of microelectronics products.

© 2013 OSA

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.4800) Instrumentation, measurement, and metrology : Optical standards and testing
(140.7090) Lasers and laser optics : Ultrafast lasers

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: February 20, 2013
Revised Manuscript: March 25, 2013
Manuscript Accepted: April 10, 2013
Published: April 12, 2013

Citation
Sangwon Hyun, Minah Choi, Byung Jae Chun, Seungman Kim, Seung-Woo Kim, and Young-Jin Kim, "Frequency-comb-referenced multi-wavelength profilometry for largely stepped surfaces," Opt. Express 21, 9780-9791 (2013)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-21-8-9780


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References

  1. J. C. Wyant, “Interferometric optical metrology: basic principles and new systems,” Laser Focus18, 65–71 (1982).
  2. K. Creath, “V phase-measurement interferometry techniques,” in Progress in Optics, E. Wolf, ed. (Elsevier, 1988), Vol. 26, pp. 349–393.
  3. R. Dändliker, R. Thalmann, and D. Prongué, “Two-wavelength laser interferometry using superheterodyne detection,” Opt. Lett.13(5), 339–341 (1988). [CrossRef] [PubMed]
  4. R. Dändliker, K. Hug, J. Politch, and E. Zimmermann, “High accuracy distance measurement with multiple-wavelength interferometry,” Opt. Eng.34(8), 2407–2412 (1995). [CrossRef]
  5. J. E. Decker, J. R. Miles, A. A. Madej, R. F. Siemsen, K. J. Siemsen, S. de Bonth, K. Bustraan, S. Temple, and J. R. Pekelsky, “Increasing the range of unambiguity in step-height measurement with multiple-wavelength interferometry-application to absolute long gauge block measurement,” Appl. Opt.42(28), 5670–5678 (2003). [CrossRef] [PubMed]
  6. K. Falaggis, D. P. Towers, and C. E. Towers, “Method of excess fractions with application to absolute distance metrology: theoretical analysis,” Appl. Opt.50(28), 5484–5498 (2011). [CrossRef] [PubMed]
  7. J. Thiel, T. Pfeifer, and M. Hartmann, “Interferometric measurement of absolute distances of up to 40 m,” Measurement16(1), 1–6 (1995). [CrossRef]
  8. D. Xiaoli and S. Katuo, “High-accuracy absolute distance measurement by means of wavelength scanning heterodyne interferometry,” Meas. Sci. Technol.9(7), 1031–1035 (1998). [CrossRef]
  9. P. de Groot and L. Deck, “Three-dimensional imaging by sub-Nyquist sampling of white-light interferograms,” Opt. Lett.18(17), 1462–1464 (1993). [CrossRef] [PubMed]
  10. J. Schwider, “White-light Fizeau interferometer,” Appl. Opt.36(7), 1433–1437 (1997). [CrossRef] [PubMed]
  11. C. Ai, “Multimode laser Fizeau interferometer for measuring the surface of a thin transparent plate,” Appl. Opt.36(31), 8135–8138 (1997). [CrossRef] [PubMed]
  12. J. S. Oh and S.-W. Kim, “Femtosecond laser pulses for surface-profile metrology,” Opt. Lett.30(19), 2650–2652 (2005). [CrossRef] [PubMed]
  13. S. Choi, K. Kasiwagi, Y. Kasuya, S. Kojima, T. Shioda, and T. Kurokawa, “Multi-gigahertz frequency comb-based interferometry using frequency-variable supercontinuum generated by optical pulse synthesizer,” Opt. Express20(25), 27820–27829 (2012). [CrossRef] [PubMed]
  14. J. Jin, J. W. Kim, C.-S. Kang, J.-A. Kim, and S. Lee, “Precision depth measurement of through silicon vias (TSVs) on 3D semiconductor packaging process,” Opt. Express20(5), 5011–5016 (2012). [CrossRef] [PubMed]
  15. R. J. Jones and J.-C. Diels, “Stabilization of femtosecond lasers for optical frequency metrology and direct optical to radio frequency synthesis,” Phys. Rev. Lett.86(15), 3288–3291 (2001). [CrossRef] [PubMed]
  16. R. J. Jones, W.-Y. Cheng, K. W. Holman, L. Chen, J. L. Hall, and J. Ye, “Absolute-frequency measurement of the iodine-based length standard at 514.67 nm,” Appl. Phys. B74(6), 597–601 (2002). [CrossRef]
  17. T. Udem, J. Reichert, R. Holzwarth, and T. W. Hänsch, “Absolute optical frequency measurement of the Cesium D1 line with a mode-locked laser,” Phys. Rev. Lett.82(18), 3568–3571 (1999). [CrossRef]
  18. J. D. Jost, J. L. Hall, and J. Ye, “Continuously tunable, precise, single frequency optical signal generator,” Opt. Express10(12), 515–520 (2002). [CrossRef] [PubMed]
  19. J. Jin, Y.-J. Kim, Y. Kim, S.-W. Kim, and C.-S. Kang, “Absolute length calibration of gauge blocks using optical comb of a femtosecond pulse laser,” Opt. Express14(13), 5968–5974 (2006). [CrossRef] [PubMed]
  20. N. Schuhler, Y. Salvadé, S. Lévêque, R. Dändliker, and R. Holzwarth, “Frequency-comb-referenced two-wavelength source for absolute distance measurement,” Opt. Lett.31(21), 3101–3103 (2006). [CrossRef] [PubMed]
  21. Y.-J. Kim, J. Jin, Y. Kim, S. Hyun, and S.-W. Kim, “A wide-range optical frequency generator based on the frequency comb of a femtosecond laser,” Opt. Express16(1), 258–264 (2008). [CrossRef] [PubMed]
  22. Y.-J. Kim, Y. Kim, B. J. Chun, S. Hyun, and S.-W. Kim, “All-fiber-based optical frequency generation from an Er-doped fiber femtosecond laser,” Opt. Express17(13), 10939–10945 (2009). [CrossRef] [PubMed]
  23. Y.-J. Kim, B. J. Chun, Y. Kim, S. Hyun, and S.-W. Kim, “Generation of optical frequencies out of the frequency comb of a femtosecond laser for DWDM telecommunication,” Laser Phys. Lett.7(7), 522–527 (2010). [CrossRef]
  24. S.-W. Kim, “Metrology: Combs rule,” Nat. Photonics3(6), 313–314 (2009). [CrossRef]
  25. N. R. Newbury, “Searching for applications with a fine-tooth comb,” Nat. Photonics5(4), 186–188 (2011). [CrossRef]
  26. S. A. Diddams, “The evolving optical frequency comb [Invited],” J. Opt. Soc. Am. B27(11), B51 (2010). [CrossRef]
  27. K. Minoshima and H. Matsumoto, “High-accuracy measurement of 240 m distance in an optical tunnel by use of a compact femtosecond laser,” Appl. Opt.39(30), 5512–5517 (2000). [CrossRef] [PubMed]
  28. K.-N. Joo and S.-W. Kim, “Absolute distance measurement by dispersive interferometry using a femtosecond pulse laser,” Opt. Express14(13), 5954–5960 (2006). [CrossRef] [PubMed]
  29. S. Hyun, Y.-J. Kim, Y. Kim, J. Jin, and S.-W. Kim, “Absolute length measurement with the frequency comb of a femtosecond laser,” Meas. Sci. Technol.20(9), 095302 (2009). [CrossRef]
  30. S. Hyun, Y.-J. Kim, Y. Kim, and S.-W. Kim, “Absolute distance measurement using the frequency comb of a femtosecond laser,” Annals of CIRP59(1), 555–558 (2010). [CrossRef]
  31. I. Coddington, W. C. Swann, L. Nenadovic, and N. R. Newbury, “Rapid and precise absolute distance measurements at long range,” Nat. Photonics3(6), 351–356 (2009). [CrossRef]
  32. J. Ye, “Absolute measurement of a long, arbitrary distance to less than an optical fringe,” Opt. Lett.29(10), 1153–1155 (2004). [CrossRef] [PubMed]
  33. J. Lee, Y.-J. Kim, K. Lee, S. Lee, and S.-W. Kim, “Time-of-flight measurement with femtosecond light pulses,” Nat. Photonics4(10), 716–720 (2010). [CrossRef]
  34. M. Tsai, H. Huang, M. Itoh, and T. Yatagai, “Fractional fringe order method using Fourier analysis for absolute measurement of block gauge thickness,” Opt. Rev.6(5), 449–454 (1999). [CrossRef]
  35. I.-B. Kong and S.-W. Kim, “General algorithm of phase-shifting interferometry by iterative least-squares fitting,” Opt. Eng.34(1), 183–188 (1995). [CrossRef]
  36. P. E. Ciddor, “Refractive index of air: new equations for the visible and near infrared,” Appl. Opt.35(9), 1566–1573 (1996). [CrossRef] [PubMed]
  37. A. E. Desjardins, B. J. Vakoc, M. J. Suter, S.-H. Yun, G. J. Tearney, and B. E. Bouma, “Real-time FPGA processing for high-speed optical frequency domain imaging.,” IEEE Trans. Med. Imaging28(9), 1468–1472 (2009). [CrossRef] [PubMed]
  38. J. You, Y.-J. Kim, and S.-W. Kim, “GPU-accelerated white-light scanning interferometer for large-area, high-speed surface profile measurements,” Int. J. Nanomanufacturing8(1/2), 31 (2012). [CrossRef]

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