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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 8 — Apr. 22, 2013
  • pp: 9851–9861

Femtosecond multi-beam interference lithography based on dynamic wavefront engineering

Qiang Zhou, Wenzheng Yang, Fengtao He, Razvan Stoian, Rongqing Hui, and Guanghua Cheng  »View Author Affiliations

Optics Express, Vol. 21, Issue 8, pp. 9851-9861 (2013)

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A method for precise multi-spot parallel ultrafast laser material structuring is presented based on multi-beam interference generated by dynamic spatial phase engineering. A Spatial Light Modulator (SLM) and digitally programming of phase masks are used to accomplish the function of a multi-facet pyramid lens, so that the laser beam can be spatially modulated to create beam multiplexing and desired two-dimensional (2D) multi-beam interference patterns. Various periodic microstructures on metallic alloy surfaces are fabricated with this technique. A method of preparing extended scale periodic microstructures by loading dynamic time-varying phases is also demonstrated. Scanning electron microscopy (SEM) reveals the period and morphology of the microstructures created using this technique. The asymmetry of interference modes generated from the beams with asymmetric wave vector distributions is equally explored. The flexibility of programming the period of the microstructures is demonstrated.

© 2013 OSA

OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(220.4000) Optical design and fabrication : Microstructure fabrication
(260.3160) Physical optics : Interference
(070.6120) Fourier optics and signal processing : Spatial light modulators

ToC Category:
Laser Microfabrication

Original Manuscript: January 16, 2013
Revised Manuscript: March 29, 2013
Manuscript Accepted: March 31, 2013
Published: April 12, 2013

Qiang Zhou, Wenzheng Yang, Fengtao He, Razvan Stoian, Rongqing Hui, and Guanghua Cheng, "Femtosecond multi-beam interference lithography based on dynamic wavefront engineering," Opt. Express 21, 9851-9861 (2013)

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