OSA's Digital Library

Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 22, Iss. 1 — Jan. 13, 2014
  • pp: 1187–1192

Compact suspended silicon microring resonators with ultrahigh quality

Wei C. Jiang, Jidong Zhang, and Qiang Lin  »View Author Affiliations

Optics Express, Vol. 22, Issue 1, pp. 1187-1192 (2014)

View Full Text Article

Enhanced HTML    Acrobat PDF (8504 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



We propose and demonstrate compact suspended silicon microring resonators with ultra-high optical quality. We achieve an intrinsic quality factor of 9.2 × 105 for the resonator with a radius of 9 μm. The high optical quality factor, high optical confinement together with the suspended structure of our device enable great potential for broad applications in biosensing, quantum photonics, nonlinear photonics, cavity optomechanics, and optical signal processing.

© 2014 Optical Society of America

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(230.4000) Optical devices : Microstructure fabrication
(230.5750) Optical devices : Resonators
(260.2030) Physical optics : Dispersion

ToC Category:
Integrated Optics

Original Manuscript: October 23, 2013
Revised Manuscript: December 20, 2013
Manuscript Accepted: December 27, 2013
Published: January 10, 2014

Virtual Issues
Vol. 9, Iss. 3 Virtual Journal for Biomedical Optics

Wei C. Jiang, Jidong Zhang, and Qiang Lin, "Compact suspended silicon microring resonators with ultrahigh quality," Opt. Express 22, 1187-1192 (2014)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. G. T. Reed, G. Mashanovich, F. Y. Gardes, D. J. Thomson, “Silicon optical modulators,” Nat. Photonics 4, 518–526 (2010). [CrossRef]
  2. J. Leuthold, C. Koos, W. Freude, “Nonlinear silicon photonics,” Nat. Photonics 4, 535–544 (2010). [CrossRef]
  3. F. Dell’Olio, V. M. N. Passaro, “Optical sensing by optimized silicon slot waveguides,” Opt. Express 15, 4977–4993 (2007). [CrossRef]
  4. K. De Vos, I. Bartolozzi, E. Schacht, P. Bienstman, R. Baets, “Silicon-on-insulator microring resonator for sensitive and label-free biosensing,” Opt. Express 15, 7610–7615 (2007). [CrossRef] [PubMed]
  5. S. Clemmen, K. Phan Huy, W. Bogaerts, R. G. Baets, Ph. Emplit, S. Massar, “Coutinuous wave photon pair generation in silicon-on-insulator waveguides and ring resonators,” Opt. Express 17, 16558–16570 (2009). [CrossRef] [PubMed]
  6. S. Azzini, D. Grassani, M. J. Strain, M. Sorel, L. G. Helt, J. E. Sipe, M. Liscidini, M. Galli, D. Bajoni, “Ultra-low power generation of twin photons in a compact silicon ring resonator,” Opt. Express 20, 23100–23107 (2012). [CrossRef] [PubMed]
  7. W. C. Jiang, X. Lu, J. Zhang, O. Painter, Q. Lin, “A silicon-chip source of bright photon-pair comb,” arXiv:1210.4455v1 (2012).
  8. M. Li, W. H. P. Pernice, C. Xiong, T. Baehr-Jones, M. Hochberg, H. X. Tang, “Harnessing optical forces in integrated photonic circuits,” Nature 456, 480–484 (2008). [CrossRef] [PubMed]
  9. K. Yamada, “Silicon photonic wire waveguides: fundamental and applications,” in Silicon Photonics II, Vol. 119 in Topics in Applied Physics, D. J. Lockwood, L. Pavesi, eds. (Springer, 2011), pp. 1–29. [CrossRef]
  10. W. Bogaerts, P. De Heyn, T. Van Vaerenbergh, K. De Vos, S. K. Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. Van Thourhout, R. Baets, “Silicon microring resonators,” Laser & Photon. Rev. 6, 47–73 (2012). [CrossRef]
  11. Y. A. Vlasov, S. J. McNab, “Losses in single-mode silicon-on-insulator strip waveguides and bends,” Opt. Express 12, 1622–1631 (2004). [CrossRef] [PubMed]
  12. J. Niehusmann, A. Vörckel, P. H. Bolivar, T. Wahlbrink, W. Henschel, Heinrich Kurz, “Ultrahigh-quality-factor silicon-on-insulator microring resonator,” Opt. Lett. 29, 2861–2863 (2004). [CrossRef]
  13. J. Yao, D. Leuenberger, M.-C. M. Lee, M. C. Wu, “Silicon microtoroidal resonators with integrated MEMS tunable coupler,” IEEE J. Sel. Top. Quant. Electron. 13, 202–208 (2007). [CrossRef]
  14. S. Xiao, M. H. Khan, H. Shen, M. Qi, “Compact silicon microring resonators with ultra-low propagation lass in the C band,” Opt. Express 15, 14467–14475 (2007). [CrossRef] [PubMed]
  15. S. K. Selvaraja, P. Jaenen, W. Bogaerts, D. Van Thourhout, P. Dumon, R. Baets, “Fabrication of photonic wire and crystal circuits in silicon-on-insulator using 193-nm optical lithography,” J. Lightwave Technol. 27, 4076–4083 (2009). [CrossRef]
  16. R. Pafchek, R. Tummidi, J. Li, M. A. Webster, E. Chen, T. L. Koch, “Low-loss silicon-on-insulator shallow-ridge TE and TM waveguides formed using thermal oxidation,” Appl. Opt. 48, 958–963 (2009). [CrossRef] [PubMed]
  17. R. Guider, N. Daldosso, A. Pitanti, E. Jordana, J. M. Fedeli, L. Pavesi, “NanoSi low loss horizontal slot waveguides coupled to high Q ring resonators,” Opt. Express 17, 20762–20770 (2009). [CrossRef] [PubMed]
  18. P. Dong, W. Qian, S. Liao, H. Liang, C.-C. Kung, N.-N. Feng, R. Shafiiha, J. Fong, D. Feng, A. V. Krishnamoorthy, M. Asghari, “Low loss shallow-ridge silicon waveguides,” Opt. Express 18, 14474–14479 (2010). [CrossRef] [PubMed]
  19. S. Y. Zhu, G. Q. Lo, D. L. Kwong, “Low-loss amorphous silicon wire waveguide for integrated photonics: effect of fabrication process and the thermal stability,” Opt. Express 18, 25283–25291 (2010). [CrossRef] [PubMed]
  20. M. P. Nezhad, O. Bondarenko, M. Khajavikhan, A. Simic, Y. Fainman, “Etch-free low loss silicon waveguides using hydrogen silsesquioxane oxidation masks,” Opt. Express 19, 18827–18832 (2011). [CrossRef] [PubMed]
  21. A. Griffith, J. Cardenas, C. B. Poitras, M. Lipson, “High quality factor and high confinement silicon resonators using etchless process,” Opt. Express 20, 21341–21345 (2012). [CrossRef] [PubMed]
  22. R. A. Soref, S. J. Emelett, W. R. Buchwald, “Silicon waveguided componenets for the long-wave infrared region,” J. Opt. A 8, 840–848 (2006). [CrossRef]
  23. P. T. Lin, V. Singh, Y. Cai, L. C. Kimerling, A. Agarwal, “Air-clad silicon pedestal structures for broadband mid-infrared microphotonics,” Opt. Lett. 38, 1031–1033 (2013). [CrossRef] [PubMed]
  24. Y. Xia, C. Qiu, X. Zhang, W. Gao, J. Shu, Q. Xu, “Suspended Si ring resonator for mid-IR application,” Opt. Lett. 38, 1122–1124 (2013). [CrossRef] [PubMed]
  25. M. Borselli, T. J. Johnson, O. Painter, “Beyond the Rayleigh scattering limit in high-Q silicon microdisks: theory and experiment,” Opt. Express 13, 1515–1530 (2005). [CrossRef] [PubMed]
  26. P. Rabiei, W. H. Steier, C. Zhang, L. R. Dalton, “Polymer micro-ring filters and modulators,” J. Lightwave Technol. 20, 1968–1975 (2002). [CrossRef]
  27. I. M. White, X. Fan, “On the performance quantification of resonant refractive index sensors,” Opt. Express 16, 1020–1028 (2008). [CrossRef] [PubMed]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


Fig. 1 Fig. 2 Fig. 3
Fig. 4 Fig. 5

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited