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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 22, Iss. 3 — Feb. 10, 2014
  • pp: 2770–2781

A 2 D high accuracy slope measuring system based on a Stitching Shack Hartmann Optical Head

Mourad Idir, Konstantine Kaznatcheev, Guillaume Dovillaire, Jerome Legrand, and Rakchanok Rungsawang  »View Author Affiliations

Optics Express, Vol. 22, Issue 3, pp. 2770-2781 (2014)

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We present a 2D Slope measuring System based on a Stitching Shack Hartmann Optical Head (SSH-OH) aiming to perform high accuracy optical metrology for X-ray mirrors. This system was developed to perform high-accuracy automated metrology for extremely high quality optical components needed for synchrotrons or Free Electrons Lasers (FEL), EUV lithography and x-ray astronomy with slope error accuracy better than 50 nrad rms.

© 2014 Optical Society of America

OCIS Codes
(120.3940) Instrumentation, measurement, and metrology : Metrology
(340.0340) X-ray optics : X-ray optics
(340.6720) X-ray optics : Synchrotron radiation
(340.7470) X-ray optics : X-ray mirrors

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: December 26, 2013
Revised Manuscript: January 16, 2014
Manuscript Accepted: January 17, 2014
Published: January 30, 2014

Mourad Idir, Konstantine Kaznatcheev, Guillaume Dovillaire, Jerome Legrand, and Rakchanok Rungsawang, "A 2 D high accuracy slope measuring system based on a Stitching Shack Hartmann Optical Head," Opt. Express 22, 2770-2781 (2014)

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