Laser removal of oxides and particles from copper surfaces for microelectronic fabrication

doi:10.1364/OE.7.000068

Optics Express

Editor: J. H. Eberly
Vol. 7, Iss. 2 — Jul. 17, 2000
pp: 68–76

Laser removal of oxides and particles from copper surfaces for microelectronic fabrication

Jong-Myoung Lee and Ken Watkins »View Author Affiliations

Optics Express, Vol. 7, Issue 2, pp. 68-76 (2000)
http://dx.doi.org/10.1364/OE.7.000068

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Abstract

Laser removal of surface oxides and small particles from copper surfaces was carried out using a Q-switched Nd:YAG laser. Oxide layers and small particles on copper surfaces should be removed for the improvement of solder quality on printed circuit boards (PCBs) and for the prevention of circuit failure or loss of production yield during the fabrication of microelectronic devices. A selective removal of surface oxides from a copper surface was achieved by the laser treatment, which was confirmed by on-line acoustic monitoring of the process. An angular laser cleaning technique in which the laser irradiates the surface at a glancing angle was used for effective removal of the particles from the surface. The unique characteristics of this technique and the cleaning mechanism are discussed.

[Optical Society of America ]

OCIS Codes
(120.4610) Instrumentation, measurement, and metrology : Optical fabrication
(140.3390) Lasers and laser optics : Laser materials processing

ToC Category:
Focus Issue: Laser ablation

History
Original Manuscript: May 24, 2000
Published: July 17, 2000

Citation
Jong-Myoung Lee and Ken Watkins, "Laser removal of oxides and particles from copper surfaces for microelectronic fabrication," Opt. Express 7, 68-76 (2000)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-7-2-68

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References

G. Vereecke, E. Rohr, M. M. Heyns, "Laser-assisted removal of particles on silicon wafers," J. Appl. Phys. 85, 3837-3843 (1999). [CrossRef]
Y. F. Lu, W. D. Sung, M. H. Hong et al, "Laser removal of particles from magnetic head sliders," J. Appl. Phys. 80, 499-504 (1996). [CrossRef]
K. Coupland, P. R. Herman, B. Gu, "Laser cleaning of ablation debris from CO2-laser-etched vias in polyimide," Appl. Surf. Sci. 127-129, 731-737 (1998). [CrossRef]
K. Mann, B. Wolff-Rottke, F. Muller, "Cleaning of optical surfaces by excimer laser radiation," Appl. Surf. Sci. 96-98, 463-468 (1996). [CrossRef]
Anonymous, "Photonic cleaning process moves to heavy industry," Photonics Spectra, pp. 22 (Mar. 1997).
G. Schweizer, "CO2 laser reduce waste from aircraft paint removal," Opto & Laser Europe, Issue 18, pp. 42-43 (Mar. 1995).
J. M. Lee, In-process and intelligent monitoring systems for laser cleaning process (PhD thesis, University of Liverpool, 1999), Chp. 1.
J. M. Lee, K. G. Watkins, "Laser cleaning for electronic device fabrication," The Industrial Laser User, Issue 18, pp. 29-30 (Feb. 2000).
J. M. Lee, K. G. Watkins, "Real-time surface monitoring in the laser cleaning of copper for soldering processes," Lasers in Eng. 8 (3), 229-239 (1999).
A. Kearns, C. Fischer, K. G. Watkins et al, "Laser removal of oxides from a copper substrate using Q-switched Nd:YAG radiation at 1064 nm, 532 nm and 266 nm," Appl. Surf. Sci. 127-129, 773-780 (1998). [CrossRef]
R. DeJule, "Trends in wafer cleaning," Semiconductor International, pp. 64-68 (Aug. 1998).
R. A. Bowling, "A theoretical review of particle adhesion" in Particles on Surfaces, K. L. Mittal, ed. (Plenum, New York, 1988), Vol. 1, pp. 129-142. [CrossRef]
A. C. Tam, W. P. Leung, W. Zapka et al, "Laser-cleaning techniques for removal of surface particulates," J. Appl. Phys. 71 (7), 3515-3523 (1992). [CrossRef]
Y. F. Lu, W. D. Sung, B. W. Ang et al, "A theoretical model for laser removal of particles from solid surfaces," Appl. Phys. A 65, 9-13 (1997). [CrossRef]
D. W. Lynch, W. R. Hunter, "Optical constants of metals" in Handbook of optical constants of solids, E. D. Palik, ed. (Academic Press, 1985).
E. A. Brandes, G. B. Brook, ed., Smithells Metals Reference Book (Butterworth-Heinemann, 1992), Chp. 14.

Other

G. Vereecke, E. Rohr, M. M. Heyns, "Laser-assisted removal of particles on silicon wafers," J. Appl. Phys. 85, 3837-3843 (1999). [CrossRef]
Y. F. Lu, W. D. Sung, M. H. Hong et al, "Laser removal of particles from magnetic head sliders," J. Appl. Phys. 80, 499-504 (1996). [CrossRef]
K. Coupland, P. R. Herman, B. Gu, "Laser cleaning of ablation debris from CO2-laser-etched vias in polyimide," Appl. Surf. Sci. 127-129, 731-737 (1998). [CrossRef]
K. Mann, B. Wolff-Rottke, F. Muller, "Cleaning of optical surfaces by excimer laser radiation," Appl. Surf. Sci. 96-98, 463-468 (1996). [CrossRef]
Anonymous, "Photonic cleaning process moves to heavy industry," Photonics Spectra, pp. 22 (Mar. 1997).
G. Schweizer, "CO2 laser reduce waste from aircraft paint removal," Opto & Laser Europe, Issue 18, pp. 42-43 (Mar. 1995).
J. M. Lee, In-process and intelligent monitoring systems for laser cleaning process (PhD thesis, University of Liverpool, 1999), Chp. 1.
J. M. Lee, K. G. Watkins, "Laser cleaning for electronic device fabrication," The Industrial Laser User, Issue 18, pp. 29-30 (Feb. 2000).
J. M. Lee, K. G. Watkins, "Real-time surface monitoring in the laser cleaning of copper for soldering processes," Lasers in Eng. 8 (3), 229-239 (1999).
A. Kearns, C. Fischer, K. G. Watkins et al, "Laser removal of oxides from a copper substrate using Q-switched Nd:YAG radiation at 1064 nm, 532 nm and 266 nm," Appl. Surf. Sci. 127-129, 773-780 (1998). [CrossRef]
R. DeJule, "Trends in wafer cleaning," Semiconductor International, pp. 64-68 (Aug. 1998).
R. A. Bowling, "A theoretical review of particle adhesion" in Particles on Surfaces, K. L. Mittal, ed. (Plenum, New York, 1988), Vol. 1, pp. 129-142. [CrossRef]
A. C. Tam, W. P. Leung, W. Zapka et al, "Laser-cleaning techniques for removal of surface particulates," J. Appl. Phys. 71 (7), 3515-3523 (1992). [CrossRef]
Y. F. Lu, W. D. Sung, B. W. Ang et al, "A theoretical model for laser removal of particles from solid surfaces," Appl. Phys. A 65, 9-13 (1997). [CrossRef]
D. W. Lynch, W. R. Hunter, "Optical constants of metals" in Handbook of optical constants of solids, E. D. Palik, ed. (Academic Press, 1985).
E. A. Brandes, G. B. Brook, ed., Smithells Metals Reference Book (Butterworth-Heinemann, 1992), Chp. 14.

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