Subpixel microscopic deformation analysis using correlation and artificial neural networks

doi:10.1364/OE.8.000322

Optics Express

Editor: J. H. Eberly
Vol. 8, Iss. 6 — Mar. 12, 2001
pp: 322–327

Subpixel microscopic deformation analysis using correlation and artificial neural networks

Mark Pitter, Chung Wah See, and Michael Somekh »View Author Affiliations

Optics Express, Vol. 8, Issue 6, pp. 322-327 (2001)
http://dx.doi.org/10.1364/OE.8.000322

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Abstract
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References (13)
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Abstract

Microscopic deformation analysis has been performed using digital image correlation and artificial neural networks (ANNs). Cross-correlations of small image regions before and after deformation contain a peak, the position of which indicates the displacement to pixel accuracy. Subpixel resolution has been achieved here by nonintegral pixel shifting and by training ANNs to estimate the fractional part of the displacement. Results from displaced and thermally stressed microelectronic devices indicate these techniques can achieve comparable accuracies to other subpixel techniques and that the use of ANNs can facilitate very fast analysis without knowledge of the analytical form of the image correlation function.

[Optical Society of America ]

OCIS Codes
(100.2000) Image processing : Digital image processing
(180.0180) Microscopy : Microscopy

ToC Category:
Research Papers

History
Original Manuscript: January 17, 2001
Published: March 12, 2001

Citation
Mark Pitter, Chung Wah See, and Michael Somekh, "Subpixel microscopic deformation analysis using correlation and artificial neural networks," Opt. Express 8, 322-327 (2001)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-8-6-322

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References

D. Vogel, A. Schubert, W. Faust, R. Dudek and B. Michel, “MicroDAC - a novel approach to measure in situ deformation fields of microscopic scale,” Microelectron. Reliab. 36, 1939-1942 (1996). [CrossRef]
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Y. Kobayashi, T. Takemori, N. Mukohzaka, N. Yoshida and S. Fukishima, “Real-time velocity measurement by the use of a speckle-pattern correlation system that incorporates a ferroelectric liquid-crystal spatial light modulator,” Appl. Opt. 33, 2785-2794 (1994). [CrossRef] [PubMed]
M. Sjödahl, “Electronic speckle photography: increased accuracy by nonintegral pixel shifting,” Appl. Opt. 33, 6667-6673 (1994). [CrossRef] [PubMed]
M. Sjödahl, “Accuracy in electronic speckle photography,” Appl. Opt. 36, 2875-2885 (1997). [CrossRef] [PubMed]
T. C. Chu, W. F. Ranson, M. A. Sutton and W. H. Peters, “Applications of digital-image-correlation techniques to experimental mechanics,” Exp. Mech. 25, 232-244 (1985). [CrossRef]
B. Han, “Recent advances of moiré and microscopic moiré interferometry for thermal deformation analyses of microelectronic devices,” Exp. Mech. 38, 278-288 (1998).
J. W. Goodman, Statistical optics (Wiley, New York, 1985).
J. Millman and C. C. Halkias, Integrated electronics (McGraw-Hill, Tokyo 1971), Sect. 17-20.
K. Swingler, Applying neural networks - a practical guide (Academic Press, London 1996).
J. Rogers, Object-oriented neural networks in C++ (Academic Press, San Diego 1997), Chap. 5.
R. C. Eberhart and R. W. Dobbins, Neural network PC tools - a practical guide (Academic Press, San Diego 1990), Chaps. 10-14.

Other

D. Vogel, A. Schubert, W. Faust, R. Dudek and B. Michel, “MicroDAC - a novel approach to measure in situ deformation fields of microscopic scale,” Microelectron. Reliab. 36, 1939-1942 (1996). [CrossRef]
G. Vendroux, N. Schmidt and W. G. Knauss, “Submicron deformation field measurements: Part 3. demonstration of deformation determinations,” Exp. Mech. 38, 154-160 (1998). [CrossRef]
J. M. Schmitt, “OCT elastography: imaging microscopic deformation and strain of tissue,” Opt. Express 3, 199-211 (1998), http://www.opticsexpress.org/oearchive/source/5793.htm. [CrossRef] [PubMed]
Y. Kobayashi, T. Takemori, N. Mukohzaka, N. Yoshida and S. Fukishima, “Real-time velocity measurement by the use of a speckle-pattern correlation system that incorporates a ferroelectric liquid-crystal spatial light modulator,” Appl. Opt. 33, 2785-2794 (1994). [CrossRef] [PubMed]
M. Sjödahl, “Electronic speckle photography: increased accuracy by nonintegral pixel shifting,” Appl. Opt. 33, 6667-6673 (1994). [CrossRef] [PubMed]
M. Sjödahl, “Accuracy in electronic speckle photography,” Appl. Opt. 36, 2875-2885 (1997). [CrossRef] [PubMed]
T. C. Chu, W. F. Ranson, M. A. Sutton and W. H. Peters, “Applications of digital-image-correlation techniques to experimental mechanics,” Exp. Mech. 25, 232-244 (1985). [CrossRef]
B. Han, “Recent advances of moiré and microscopic moiré interferometry for thermal deformation analyses of microelectronic devices,” Exp. Mech. 38, 278-288 (1998).
J. W. Goodman, Statistical optics (Wiley, New York, 1985).
J. Millman and C. C. Halkias, Integrated electronics (McGraw-Hill, Tokyo 1971), Sect. 17-20.
K. Swingler, Applying neural networks - a practical guide (Academic Press, London 1996).
J. Rogers, Object-oriented neural networks in C++ (Academic Press, San Diego 1997), Chap. 5.
R. C. Eberhart and R. W. Dobbins, Neural network PC tools - a practical guide (Academic Press, San Diego 1990), Chaps. 10-14.

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