Tunable coupling regimes of silicon microdisk resonators using MEMS actuators
Optics Express, Vol. 14, Issue 11, pp. 4703-4712 (2006)
http://dx.doi.org/10.1364/OE.14.004703
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Abstract
Tunable coupling regimes of a silicon microdisk resonator controlled by MEMS (microelectromechanical system) actuation are demonstrated for the first time. By varying the gap spacing between the waveguide and the disk, this microresonator can dynamically operate in either under-, ciritcal or over-coupling regime. The waveguide transmittance is suppressed by 30 dB in critical coupling, and the quality factor of the microdisk is measured to be as high as 105. Additionally, the microdisk presents tunable group delay from 27 ps to 65 ps, and tunable group velocity dispersion from 185 ps/nm to 1200 ps/nm. Waveguides, microdisks and actuators are all integrated on a silicon-on-insulator (SOI) substrate. This compact device exhibits the promise to construct resonator-based reconfigurable photonic integrated circuits.
© 2006 Optical Society of America
OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(230.5750) Optical devices : Resonators
ToC Category:
Integrated Optics
History
Original Manuscript: March 8, 2006
Manuscript Accepted: May 5, 2006
Published: May 29, 2006
Citation
Ming-Chang M. Lee and Ming C. Wu, "Tunable coupling regimes of silicon microdisk resonators using MEMS actuators," Opt. Express 14, 4703-4712 (2006)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-14-11-4703
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