OSA's Digital Library

Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 14, Iss. 11 — May. 29, 2006
  • pp: 4703–4712

Optics InfoBase > Optics Express > Volume 14 > Issue 11 > Tunable coupling regimes of silicon microdisk resonators using MEMS actuators

Tunable coupling regimes of silicon microdisk resonators using MEMS actuators

Ming-Chang M. Lee and Ming C. Wu  »View Author Affiliations

Optics Express, Vol. 14, Issue 11, pp. 4703-4712 (2006)

View Full Text Article

Enhanced HTML    Acrobat PDF (1016 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



Tunable coupling regimes of a silicon microdisk resonator controlled by MEMS (microelectromechanical system) actuation are demonstrated for the first time. By varying the gap spacing between the waveguide and the disk, this microresonator can dynamically operate in either under-, ciritcal or over-coupling regime. The waveguide transmittance is suppressed by 30 dB in critical coupling, and the quality factor of the microdisk is measured to be as high as 105. Additionally, the microdisk presents tunable group delay from 27 ps to 65 ps, and tunable group velocity dispersion from 185 ps/nm to 1200 ps/nm. Waveguides, microdisks and actuators are all integrated on a silicon-on-insulator (SOI) substrate. This compact device exhibits the promise to construct resonator-based reconfigurable photonic integrated circuits.

© 2006 Optical Society of America

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(230.5750) Optical devices : Resonators

ToC Category:
Integrated Optics

Original Manuscript: March 8, 2006
Manuscript Accepted: May 5, 2006
Published: May 29, 2006

Ming-Chang M. Lee and Ming C. Wu, "Tunable coupling regimes of silicon microdisk resonators using MEMS actuators," Opt. Express 14, 4703-4712 (2006)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. B. E. Little, S. T. Chu, W. Pan, and Y. Kokubun, "Microring resonator arrays for VLSI photonics," IEEE Photonics Technol. Lett. 12, 323-325 (2000). [CrossRef]
  2. C. K. Madsen, G. Lenz, A. J. Bruce, M. A. Cappuzzo, L. T. Gomez, T. N. Nielsen, L. E. Adams, and I. Brenner, "An all-pass filter dispersion compensator using planar waveguide ring resonators," presented at OFC/IOOC'99. Optical Fiber Communication Conference and the International Conference on Integrated Optics and Optical Fiber Communications (Cat. No.99CH36322). IEEE. Part vol.4, 1999, pp.99-101 vol.4. Piscataway, NJ, USA.
  3. P. Rabiei, W. H. Steier, Z. Cheng, W. Chuan-guang, and H. J. Lee, "Polymer micro-ring modulator with 1 THz FSR," presented at Postdeadline Papers. Summaries of papers presented at the Conference on Lasers and Electro-Optics. Conference Edition (IEEE Cat. No.02CH37337). (Optical Society of America, Washington, D.C., 2002) Part vol.2, pp.CPDB8-1-CPDC2-3 vol.2..
  4. K. Djordjev, C. Seung-June, C. Sang-Jun, and R. D. Dapkus, "Microdisk tunable resonant filters and switches," IEEE Photonics Technol. Lett. 14,828-30 (2002). [CrossRef]
  5. G. N. Nielson, D. Seneviratne, F. Lopez-Royo, P. T. Rakich, F. Giacometti, H. L. Tuller, and G. Barbastathis, "MEMS based wavelength selective optical switching for integrated photonic circuits," presented at Conference on Lasers and Electro-Optics (CLEO). IEEE. Part vol.1, 2004, pp.2 pp. vol.1. Piscataway, NJ, USA.
  6. K. Djordjev, C. Seung-June, C. Sang-Jun, and P. D. Dapkus, "Vertically coupled InP microdisk switching devices with electroabsorptive active regions," IEEE IEEE Photonics Technol. Lett. 14,1115-17 (2002). [CrossRef]
  7. K. Djordjev, C. Seung-June, C. Sang-Jun, and P. D. Dapkus, "Gain trimming of the resonant characteristics in vertically coupled InP microdisk switches," Appl. Phys. Lett. 80,3467-3469 (2002). [CrossRef]
  8. W. M. J. Green, R. K. Lee, A. Yariv, and A. Scherer, "Control of optical waveguide-resonator coupling: applications to low-power optical modulation and switching," presented at 2003 IEEE LEOS Annual Meeting Conference Proceedings (IEEE Cat. No.03CH37460). IEEE. Part vol.1, 2003, pp.130-1 vol.1. Piscataway, NJ, USA.
  9. M. Borselli, K. Srinivasan, P. E. Barclay, and O. Painter, "Rayleigh scattering, mode coupling, and optical loss in silicon microdisks," Appl. Phys. Lett. 85,3693-3695 (2004). [CrossRef]
  10. M. C. M. Lee and M. C. Wu, "MEMS-Actuated microdisk resonators with variable power coupling ratios," IEEE Photonics Technol. Lett. 17,1034-1036 (2005). [CrossRef]
  11. S. D. Senturia, Microsystem Design (Kluwer Academic, 2001).
  12. M. C. M. Lee, J. Yao, and M. C. Wu, "Silicon Profile Transformation and Sidewall Roughness Reduction Using Hydrogen Annealing," presented at 18th IEEE International Conference on Micro-Electro-Mechanical-Systems, Miami, 2005.
  13. M. Matsuhara and A. Watanabe, "Coupling of curved transmission lines, and application to optical directional couplers," J. Opt. Soc. Am. 65,163-168 (1975). [CrossRef]
  14. B. E. Little, S. T. Chu, H. A. Haus, J. Foresi, and J. P. Laine, "Microring resonator channel dropping filters," J. Lightwave Technol. 15,998-1005 (1997). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited