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Sub 400 nm spatial resolution extreme ultraviolet holography with a table top laser

P. W. Wachulak, R. A. Bartels, M. C. Marconi, C. S. Menoni, J. J. Rocca, Y. Lu, and B. Parkinson

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Abstract

We report sub-400 nm spatial resolution with Gabor holography obtained using a highly coherent table top 46.9 nm laser. The hologram was recorded in high resolution photoresist and subsequently digitized with an atomic force microscope. The final image was numerically reconstructed with a Fresnel propagator. Optimal reconstruction parameters and quantification of spatial resolution were obtained with a wavelet analysis and image correlation.

©2006 Optical Society of America

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Figures (5)
Fig. 1.
Fig. 1. Scheme of the experimental set up.

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Fig. 2.
Fig. 2. Hologram read with an atomic force microscope. The image is composed by 9 sub scans to cover a total area 270×290 µm2.

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Fig. 3.
Fig. 3. Numerical reconstruction of the hologram obtained with the Fresnel propagator. The inset shows details of the cantilever tip profile.

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Fig. 4.
Fig. 4. Coefficient obtained from the correlation between different images reconstructed with different object-hologram distances and different wavelet components as a function of the wavelet scale. Triangles: zp =4 mm; circles: zp =4.02 mm; stars: zp =4.05mm; squares: zp =4.06 mm; diamonds: zp =4.08mm.

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Fig. 5.
Fig. 5. Maximum correlation coefficient for images reconstructed with different object-hologram distances. The best resolution is obtained for zp =4.04 mm.

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Equations (3)

Equations on this page are rendered with MathJax. Learn more.

NA = [ l c z p ] 1 2
Δ = 0.61 λ [ z p l c ] 1 2 = 0.61 [ z p Δ λ ] 1 2 .
1 f = 1 z p − 1 ( z s + z p )
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