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Self-assembled high NA microlens arrays using global dielectricphoretic energy wells

Jing-Yi Huang, Yen-Sheng Lu, and J. Andrew Yeh

Open Access Open Access

Abstract

Microlens arrays were self-assembled from microballs using dielectrophoretic energy wells. Energy wells defined by patterned dielectric were used to produce microlens arrays with array patterns of desire. Microballs of 25μm in diameter were measured to have numerical aperture of 0.8 and focal length of 15.5μm. The optical resolution was found to be 0.4μm. Both the numerical aperture and the focal length were further adjusted to 0.66 and 19.0μm by a post-assembly heat treatment at 190°C for 5 minutes.

©2006 Optical Society of America

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Supplementary Material (2)

Media 1: AVI (618 KB)     
Media 2: MPG (1078 KB)     

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Figures (5)
Fig. 1.
Fig. 1. The device for self assembly of microballs as high NA MLAs. Two ITO glasses are sandwiched by a 70μm thick spacer. The bottom ITO glass is first coated with a layer of amorphous silicon followed by insulating silicon dioxide coating. A patterned photoresist is formed on the surface of silicon dioxide using photolithography.

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Fig. 2.
Fig. 2. Schematic diagram of DEP energy over three adjacent energy wells: (a) patterned DEP, (b) illumination near the first energy well, and (c) illumination swept to second energy well. The patterned DEP denotes the DEP energy produced by patterned dielectric and the optical DEP denotes the energy induced by illumination. (d) Movie of self-assembly sequence (618 KB version).

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Fig. 3.
Fig. 3. MLA: (a) SEM picture of a MLA on a flexible substrate. (b) OM picture of a flexible MLA curved at radius of 3mm. (The linty edge is caused by cutting the flexible polyimide substrate with scissors).

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Fig. 4.
Fig. 4. Optical micrograph of projected images through the MLA self-assembled from microball lenses of 25μm in diameter and NA of 0.80: (a) image of lenses arranged in square pattern; (b) interference pattern of lenses arranged in hexagonal pattern; (c) movie of interference image captured by OM (1.05MB version); (d) the experimental setup of movie 4(c).

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Fig. 5.
Fig. 5. Focal length and numerical aperture change for different post heat treatments. The heat-treatment temperatures are 91°C, 120°C and 190°C on a hot plate for 5 minutes. PS microball has glass transition temperature Tg of 90°C. Tr and Tg denote the room temperature and glass transition temperature. (“▪” and “•” denote the focal length and numerical aperture, resnectively.)

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Tables (1)

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Table 1. Comparison of different MLA fabrication methods.

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Equations (1)

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F DEP = 1 4 π a 3 ε m Re ∣ K * ( ω ) ∣ ∇ ( E 2 )
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