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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 14, Iss. 22 — Oct. 30, 2006
  • pp: 10779–10784

Self-assembled high NA microlens arrays using global dielectricphoretic energy wells

Jing-Yi Huang, Yen-Sheng Lu, and J. Andrew Yeh  »View Author Affiliations

Optics Express, Vol. 14, Issue 22, pp. 10779-10784 (2006)

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Microlens arrays were self-assembled from microballs using dielectrophoretic energy wells. Energy wells defined by patterned dielectric were used to produce microlens arrays with array patterns of desire. Microballs of 25μm in diameter were measured to have numerical aperture of 0.8 and focal length of 15.5μm. The optical resolution was found to be 0.4μm. Both the numerical aperture and the focal length were further adjusted to 0.66 and 19.0μm by a post-assembly heat treatment at 190°C for 5 minutes.

© 2006 Optical Society of America

OCIS Codes
(220.3630) Optical design and fabrication : Lenses
(230.2090) Optical devices : Electro-optical devices
(350.4990) Other areas of optics : Particles

ToC Category:
Optical Design and Fabrication

Original Manuscript: August 2, 2006
Revised Manuscript: October 16, 2006
Manuscript Accepted: October 17, 2006
Published: October 30, 2006

Jing-Yi Huang, Yen-Sheng Lu, and J. Andrew Yeh, "Self-assembled high NA microlens arrays using global dielectricphoretic energy wells," Opt. Express 14, 10779-10784 (2006)

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  1. T. K. Shin, J. R. Ho, J.-W. Cheng, and J. Cheng, "A new approach to polymeric microlens array fabrication using soft replica molding," IEEE Photon. Technol. Lett. 16, 2078 (2004). [CrossRef]
  2. P. Pantelis and D. J. McCartney, "Polymer microlens arrays," Pure Appl. Opt. 3, 103 (1994). [CrossRef]
  3. Y. Ishii, S. Koike, Y. Arai, and Y. Ando, "Ink-jet fabrication of polymer microlens for optical-I/O chip packaging," Jpn. J. Appl. Phys. 39, 1490 (2000). [CrossRef]
  4. F. Beinhorn, J. Ihlemann, K. Luther, and J. Troe, "Micro-lens arrays generated by UV laser irradiation of doped PMMA," Appl. Phys. A 68, 709 (1999). [CrossRef]
  5. K. Zimmer, D. Hirsch, and F. Bigl, "Excimer laser machining for the fabrication of analogous microstructures," Appl. Surf. Sci. 96, 425 (1996). [CrossRef]
  6. D. Daly, R. F. Steven, M. C. Hutley, and N. Davies, "The manufacture of microlenses by melting photoresist," Meas. Sci. Technol. 1, 759 (1990). [CrossRef]
  7. C-P Lin, H. Yang, and C-K Chao, "Hexagonal microlens array modeling and fabrication using a thermal reflow process," J. Micromech. Microeng. 13, 775 (2003). [CrossRef]
  8. M. He, X. C. Yuan, N. Q. Ngo, J. Bu, and V. Kudryashov, "Simple reflow technique for fabrication of a microlens array in solgel glass," Opt. Lett. 28, 731(2003) [CrossRef] [PubMed]
  9. S. Moon, N. Lee, and S. Kang, "Fabrication of a microlens array using micro-compression molding with an electroformed mold insert," J. Micromech. Microeng. 13, 98 (2003). [CrossRef]
  10. A. Kouchiyama, I. Ichimura, K. Kishima, T. Nakao, K. Yaamaoto, G. Hashimoto, A. Iida, and K. Osato, "Optical recording using high numerical-aperture microlens by plasma etching," Jpn. J. Appl. Phys. 41, 1825 (2002). [CrossRef]
  11. H. Yabu and M. Shimomura, "Simple fabrication of micro lens arrays," Langmuir 21, 1709 (2005). [CrossRef] [PubMed]
  12. N. F. Borrelli, Microoptics Technology: Fabrication and Applications of Lens Arrays and Devices, (Marcel Dekker, New York, 1999), pp. 197-201.
  13. M. Wu and G. M. Whitesides, "Fabrication of arrays of two-dimensional micropatterns using microspheres as lenses for projection photolithography," Appl. Phys. Lett. 78, 2273 (2001). [CrossRef]
  14. Y. Lu, Y. Yin, and Y. Xia, "A self-assembly approach to the fabrication of patterned, two-dimensional arrays of microlenses of organic polymers," Adv. Mater. 13, 34 (2001). [CrossRef]
  15. P. Y. Chiou, A. T. Ohta, and M. C. Wu, "Massively parallel manipulation of single cells and microparticles using optical images," Nature 436, 370 (2005). [CrossRef] [PubMed]
  16. Y. S. Lu, Y. P. Huang, J. A. Yeh, C. Lee, and Y. H. Chang, "Controllability of non-contact cell manipulation by image dielectrophoresis," Opt. Quantum. Electron. 37, 1385 (2005). [CrossRef]
  17. C. C. Chang, C. A. Chang, and J. A. Yeh, "Variable focus dielectric liquid droplet lens," Opt. Express. 14, 4101 (2006). [CrossRef] [PubMed]
  18. C. C. Chang, C. A. Chang, C. H. Liu and J. A. Yeh, "A tunable liquid-crystal microlens with hybrid alignment," J. Opt. A: Pure Appl. Opt. 8, S365 (2006). [CrossRef]

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