Abstract

Properties of the induced polarization signal with a solid immersion lens (SIL) are investigated by experiments and simulations. A LaSFN9 SIL (NA=1.5) is used in the experiment. Physics of the induced polarization signal are described for several configurations of optical systems and substrates. Induced polarization signals from evanescent-wave coupling to dielectric, semiconductor and metal substrates are studied in detail. It is shown that surface plasmon waves are excited with Au substrates and the induced polarization signal is affected by the surface plasmon waves. Simulation results of the induced polarization signal for a gallium phosphide SIL (NA=2.64) are discussed.

© 2007 Optical Society of America

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History
Original Manuscript: December 11, 2006
Manuscript Accepted: January 25, 2007
Revised Manuscript: January 24, 2007
Published: February 5, 2007

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Author Affiliations

Tao Chen, Tom D. Milster

University of Arizona

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