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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 10, Iss. 10 — May. 20, 2002
  • pp: 436–442

One-step transfer of diffractive structure from a designed pattern to a replica by use of a hybrid solgel film

Yongqi Fu and Ngoi Kok Ann Bryan  »View Author Affiliations


Optics Express, Vol. 10, Issue 10, pp. 436-442 (2002)
http://dx.doi.org/10.1364/OE.10.000436


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Abstract

A one-step method for microfabrication of a diffractive lens mold with continuous relief, including a solgel process for replication, is presented. The mold is fabricated by focused ion beam milling (FIBM) on a substrate of bulk silicon and is then used directly for replication of the diffractive structure by means of a hybrid solgel glass stamping process. The surface roughness of the replica, Ra, is 4 nm over a 5 μm × 5 μm area. The measured diffraction efficiency is 86% and is influenced by accumulated mold geometry and solgel process errors. The demonstrated process of direct stamping by use of the master fabricated by FIBM offers the potential for mass production at very low cost.

© 2002 Optical Society of America

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(220.4000) Optical design and fabrication : Microstructure fabrication

ToC Category:
Research Papers

History
Original Manuscript: April 2, 2002
Revised Manuscript: April 23, 2002
Published: May 20, 2002

Citation
Yongqi Fu and Ngoi Bryan, "One-step transfer of diffractive structure from a designed pattern to a replica by use of a hybrid solgel film," Opt. Express 10, 436-442 (2002)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-10-10-436


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