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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 10, Iss. 10 — May. 20, 2002
  • pp: 443–448

Single-step fabrication of continuous surface relief micro-optical elements in hybrid sol-gel glass by laser direct writing

W. X. Yu, X. -C. Yuan, N. Q. Ngo, W. X. Que, W. C. Cheong, and V. Koudriachov  »View Author Affiliations


Optics Express, Vol. 10, Issue 10, pp. 443-448 (2002)
http://dx.doi.org/10.1364/OE.10.000443


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Abstract

A negative tone hybrid sol-gel material was applied to the fabrication of continuous surface relief micro-optical elements by laser direct writing lithography. The hybrid sol-gel glass was synthesized as UV photosensitive material and used for the fabrication of micro-optical elements with continuous surface relief profile. The surface profile was directly controlled by the UV exposure dosage and the exposed areas were crosslinked and converted into sol-gel glass with relief structures. The UV exposure dosage was realized by an acousto-optic modulator (AOM) in the laser direct writing system. Characterization results indicated that the thickness of the sol-gel glass has a linear response to the AOM values ranging from 3.25 to 5.5. The sol-gel thin film was measured to have a refractive index of 1.52 and the maximum thickness of 2 μm. For various designs of diffractive optical elements within the visible wavelength, the sol-gel film enables us to achieve an arbitrary phase change between 0 and 2π with the linear AOM exposure range. As an example, a blazed grating with a period of 45 μm and height of 1.17 μm was fabricated in the sol-gel glass using direct laser writing method.

© 2002 Optical Society of America

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(220.4000) Optical design and fabrication : Microstructure fabrication
(310.3840) Thin films : Materials and process characterization

ToC Category:
Research Papers

History
Original Manuscript: April 22, 2002
Revised Manuscript: May 13, 2002
Published: May 20, 2002

Citation
Weixing Yu, X. Yuan, N. Ngo, Wenxiu Que, W. Cheong, and V. Koudriachov, "Single-step fabrication of continuous surface relief micro-optical elements in hybrid sol-gel glass by laser direct writing," Opt. Express 10, 443-448 (2002)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-10-10-443


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References

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