OSA's Digital Library

Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 10, Iss. 10 — May. 20, 2002
  • pp: 443–448

Single-step fabrication of continuous surface relief micro-optical elements in hybrid sol-gel glass by laser direct writing

W. X. Yu, X. -C. Yuan, N. Q. Ngo, W. X. Que, W. C. Cheong, and V. Koudriachov  »View Author Affiliations

Optics Express, Vol. 10, Issue 10, pp. 443-448 (2002)

View Full Text Article

Enhanced HTML    Acrobat PDF (375 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



A negative tone hybrid sol-gel material was applied to the fabrication of continuous surface relief micro-optical elements by laser direct writing lithography. The hybrid sol-gel glass was synthesized as UV photosensitive material and used for the fabrication of micro-optical elements with continuous surface relief profile. The surface profile was directly controlled by the UV exposure dosage and the exposed areas were crosslinked and converted into sol-gel glass with relief structures. The UV exposure dosage was realized by an acousto-optic modulator (AOM) in the laser direct writing system. Characterization results indicated that the thickness of the sol-gel glass has a linear response to the AOM values ranging from 3.25 to 5.5. The sol-gel thin film was measured to have a refractive index of 1.52 and the maximum thickness of 2 μm. For various designs of diffractive optical elements within the visible wavelength, the sol-gel film enables us to achieve an arbitrary phase change between 0 and 2π with the linear AOM exposure range. As an example, a blazed grating with a period of 45 μm and height of 1.17 μm was fabricated in the sol-gel glass using direct laser writing method.

© 2002 Optical Society of America

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(220.4000) Optical design and fabrication : Microstructure fabrication
(310.3840) Thin films : Materials and process characterization

ToC Category:
Research Papers

Original Manuscript: April 22, 2002
Revised Manuscript: May 13, 2002
Published: May 20, 2002

Weixing Yu, X. Yuan, N. Ngo, Wenxiu Que, W. Cheong, and V. Koudriachov, "Single-step fabrication of continuous surface relief micro-optical elements in hybrid sol-gel glass by laser direct writing," Opt. Express 10, 443-448 (2002)

Sort:  Journal  |  Reset  


  1. P. �?yräs, J.T. Rantala, S. Honkanen, S.B. Memdes, N. Peyghambarian, �??Diffraction gratings in sol-gel films by direct contact printing using a UV-mercury lamp,�?? Opt. Commun. 162, 215-218 (1999). [CrossRef]
  2. S. Pelissier, D. Blanc, M.P. Andrews, S.I. Najafi, A.V. Tishchenko, O.Parriaux, �??Single-step UV recording of sinusoidal surface gratings in hybrid solgel glasses,�?? Appl. Opt. 38, 6744-6748 (1999). [CrossRef]
  3. H J Jiang, X-C Yuan, Y. L. Lam, Y. C. Chan and G. I. Ng, �??Single-step Fabrication of Surface Relief Diffractive Optical Elements on Hybrid Sol-Gel Glass,�?? Opt. Eng. 40, 2017-2021 (2001). [CrossRef]
  4. H. Jiang, X.-C. Yuan, Z. Yun, Y. C. Chan, Y. L. Lam, �??Fabrication of microlens in photosensitive hybrid solgel films using a gray scale mask,�?? Materials Sci. Eng. C 16, 99�??102 (2001). [CrossRef]
  5. J.T.Rantala, N.Nordman, O.Nordman, J.Vähäkangas, S.Honkanen and N.Peyghambarian, �??Sol-gel hybrid glass diffractive elements by direct electron-beam exposure,�?? Electron. Lett. 34, 455-456 (1998). [CrossRef]
  6. Daniõle Blanc, Serge Pelissier, Kalaichelvi Saravanamuttu, S. Iraj Najafi and Mark P. Andrews, �??Selfprocessing of surface-relief gratings in photosensitive sol-gel glasses,�?? Adv. Mater. 11, 1508-1511 (1999). [CrossRef]
  7. Jens Neumann, Kay S. Wieking, Detlef Kip, �??Direct Laser Writing of Surface Reliefs in Dry, Self-Developing Photopolymer Films,�?? Appl. Opt. 38, 5418-5421 (1999). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited