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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 10, Iss. 13 — Jul. 1, 2002
  • pp: 556–560

Realization of ultrasmooth surface with atomic scale step structure on LiNbO3 and LiTaO3 substrates

G. H. Lee  »View Author Affiliations

Optics Express, Vol. 10, Issue 13, pp. 556-560 (2002)

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Z-cut (C-plane), X-cut (M-plane), Y-cut (A-plane) LiNbO3 and LiTaO3 substrates were annealed at high temperature over 1000 °C in air. On all annealed substrates, atomic scale step structures with uniform height were observed, which demonstrates that the surfaces of the substrates become atomically smooth. The step height on Z-cut substrates was 0.25 ± 0.02 nm, which was well accordance with the distance between oxygen layers along the c-axis of the hexagonal unit cell of LiNbO3 and LiTaO3 crystals. The step heights on X-cut and on Y-cut substrates were 0.45 ± 0.04 nm and 0.50 ± 0.05 nm, respectively, which corresponded well with the distances between A-planes and M-planes in the unit cell.

© 2002 Optical Society of America

OCIS Codes
(160.3730) Materials : Lithium niobate
(170.5810) Medical optics and biotechnology : Scanning microscopy
(240.5770) Optics at surfaces : Roughness

ToC Category:
Research Papers

Original Manuscript: April 30, 2002
Revised Manuscript: June 25, 2002
Published: July 1, 2002

G. Lee, "Realization of ultrasmooth surface with atomic scale step structure on LiNbO3 and LiTaO3 substrates," Opt. Express 10, 556-560 (2002)

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