Buried selectively-oxidized AlGaAs structures grown on nonplanar substrates
Optics Express, Vol. 10, Issue 19, pp. 1003-1008 (2002)
http://dx.doi.org/10.1364/OE.10.001003
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Abstract
We demonstrate a novel buried oxide grating structure formed by selectively-oxidized AlxGa1-xAs grown on nonplanar substrates using low-pressure MOCVD for the first time. Localized aluminum content variation in AlGaAs is obtained with MOCVD growth on nonplanar substrate. Buried aluminum oxide/semiconductor distributed feedback structure is achieved with selective oxidation of these AlGaAs layers. We fabricated a resonant-cavity-enhanced photodetector with the imbedded buried-oxide structure and measured the photodetector responsivity spectrum.
© 2002 Optical Society of America
[Optical Society of America ]
OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(160.6000) Materials : Semiconductor materials
ToC Category:
Research Papers
History
Original Manuscript: July 29, 2002
Revised Manuscript: September 11, 2002
Published: September 23, 2002
Citation
Pei-Cheng Ku, J. Hernandez, and C. Chang-Hasnain, "Buried selectively-oxidized AlGaAs structures grown on nonplanar substrates," Opt. Express 10, 1003-1008 (2002)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-10-19-1003
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References
- K. D. Choquette et al., �??Advances in selective wet oxidation of AlGaAs alloys,�?? IEEE. J. Sel. Top. Quantum Electron. 3, 916-926 (1997). [CrossRef]
- M. S. Wu, G. S. Li, W. Yuen and C. J. Chang-Hasnain, " Widely Tunable 1.5µm micromechanical optical filter using AlOx/AlGaAs DBR," Electron. Lett. 33, 1702-1703 (1997). [CrossRef]
- L. D. Westbrook, I. D. Henning, A. W. Nelson, and P. J. Fiddyment, �??Spectral properties of strongly coupled 1.5mm DFB laser diodes,�?? IEEE J. Quantum Electron. 21, 512-518 (1985). [CrossRef]
- S. Oku, T. Ishii, R. Iga, and T. Hirono, �??Fabrication and performance of AlGaAs-GaAs distributed Bragg reflector lasers and distributed feedback lasers utilizing first-order diffraction gratings formed by a periodic groove structure,�?? IEEE J. Sel. Top. Quantum Electron. 5, 682-687 (1999). [CrossRef]
- W. Pan, H. Yaguchi, K. Onabe, R. Ito, and Y. Shiraki, �??Composition profile of an AlGaAs epilayer on a Vgrooved substrate grown by low-pressure metalorganic vapor phase epitaxy,�?? Appl. Phys. Lett. 67, 959-961 (1995). [CrossRef]
- L. Hofmann, D. Rudloff, I. Rechenberg, A. Knauer, J. Christen, and M. Weyers, �??(AlGa)As composition profile analysis of trenches overgrown with MOVPE,�?? J. Crystal Growth 222, 465-470 (2001). [CrossRef]
- E. Kapon, �??Lateral pattering of quantum well heterostructures by growth on nonplanar substrates,�?? in Semiconductors and Semimetals vol. 40 Epitaxial Microstructures, A. C. Gossard, ed. (Academic Press, San Diego, Ca. 1994).
- R. L. Naone, E. R. Hegblom, B. J. Thibeault, and L. A. Coldren, �??Oxidation of AlGaAs layers for tapered apertures in vertical-cavity lasers,�?? Electron. Lett. 33, 300-301 (1997). [CrossRef]
- S. Noda, N. Yamamoto, M. Imada, H. Kobayashi, and M. Okano, �??Alignment and stacking of semiconductor photonic bandgaps by wafer-fusion,�?? J. Lightwave Technol. 17, 1948-1955 (1999). [CrossRef]
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