OSA's Digital Library

Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 10, Iss. 20 — Oct. 7, 2002
  • pp: 1043–1047

Lithographic fabrication of large diffractive optical elements on a concave lens surface

Yongjun Xie, Zhenwu Lu, Fengyou Li, Jingli Zhao, and Zhicheng Weng  »View Author Affiliations


Optics Express, Vol. 10, Issue 20, pp. 1043-1047 (2002)
http://dx.doi.org/10.1364/OE.10.001043


View Full Text Article

Enhanced HTML    Acrobat PDF (149 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We demonstrate experimentally the lithography technique to fabricate a large computer-generated diffractive optical element (DOE) pattern on a concave lens surface with precise alignment by using a laser direct writer. We obtained photoresist film with uniform thickness on the large concave substrate by selecting proper spin-coating parameters, which mainly involve spin rate, spin acceleration, and viscosity of the photoresist. We obtained a square line profile on the concave lens surface. We can write lines that range in width from 0.7 to 10 μm using a single pass of the laser beam. We have designed and fabricated a grating on the concave lens surface using the laser direct writing lithography technique. It is believed that this technique can also transfer large DOE patterns, with a continuous surface relief, onto a convex or concave lens (mirror) surface.

© 2002 Optical Society of America

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(220.3740) Optical design and fabrication : Lithography

ToC Category:
Research Papers

History
Original Manuscript: July 23, 2002
Revised Manuscript: September 3, 2002
Published: October 7, 2002

Citation
Yongjun Xie, Zhenwu Lu, Fengyou Li, Jingli Zhao, and Zhicheng Weng, "Lithographic fabrication of large diffractive optical elements on a concave lens surface," Opt. Express 10, 1043-1047 (2002)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-10-20-1043


Sort:  Journal  |  Reset  

References

  1. J. H. Burge, D. S. Anderson, T. D. Milster, and C. L. Vernold, �??Measurement of a convex secondary mirror using a holographic test plat,�?? in Advanced Technology Optical Telescopes V, Larry M. stepp, ed., Proc. SPIE 2199, 193-198 (1994). [CrossRef]
  2. Tatsuo Harada, Shigeo Moriyama, and Toshiaki Kita, �??Mechanically Ruled Stigmatic Concave Gratings,�?? Japanese J. Appl. Phys. 14, 175-179 (1974).
  3. Michael T.Gale, Markus Rossi, Jorn Pedersen, and Helmut Schutz, �??Fabrication of continuous-relief microoptical elements by direct laser writing in photoresists,�?? Opt. Eng. 33, 3556-3566 (1994). [CrossRef]
  4. Nicholas F. Borrelli, Microoptics technology, Marcel Dekker, Inc.(New York, 1999).
  5. Rebecca J. Jackman, Scott T. Brittain, Allan Adams, Mara G. Prentiss, and George M. Whitesides, �??Design and Fabrication of Topologically Complex, Three-Dimensional Microstructures,�?? Science 280, 2091-2098 (1998) [CrossRef]
  6. Cynthia L. Vernold and Thomas D. Milster, �??Non-photolithographic fabrication of large computer-generrated diffractive optical elements,�?? in Current Developments in Optical Design and Optical Engineering IV, Robert. E. Fischer and Warren J. Smith, eds., Proc. SPIE 2263, 125-133 (1994). [CrossRef]
  7. Zhenwu Lu and Zhicheng Weng, �??Lens centering by using binary phase grating,�?? in Current Developments in Lens Design and Optical Systems Engineering, Robert E. Fischer, R. Barry Johnson, Warren J. Smith and William H.Swantner, eds., Proc. SPIE 4093, 176-180 (2000). [CrossRef]
  8. Tom D. Milster and Cynthia L. Vernold, �??Technique for aligning optical and mechanical axes based on a rotating linear grating,�?? Opt. Eng. 34, 2840-2844 (1995). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1. Fig.2 Fig.3
 

Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited