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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 10, Iss. 22 — Nov. 4, 2002
  • pp: 1244–1249

Morphological investigation at the front and rear surfaces of fused silica processed with femtosecond laser pulses in air

Zhaoxin Wu, Hongbing Jiang, Zhaohui Zhang, Quan Sun, Hong Yang, and Qihuang Gong  »View Author Affiliations


Optics Express, Vol. 10, Issue 22, pp. 1244-1249 (2002)
http://dx.doi.org/10.1364/OE.10.001244


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Abstract

Different responses for the front (entrance) and the rear (exit) surfaces of fused silica processed with femtosecond laser pulses at 807 nm were observed under tight focusing conditions (NA = 0.4). The morphology of the surface in the beam path is highly sensitive to the focus position. By adjusting the focus position, we can produce not only a submicrometer cavity but also a submicrometer bubble. We achieved higher-quality micromachining and a better spatial resolution (400 nm) by focusing the laser beam at the rear surface rather than at the front surface.

© 2002 Optical Society of America

OCIS Codes
(140.3330) Lasers and laser optics : Laser damage
(140.3440) Lasers and laser optics : Laser-induced breakdown
(220.4610) Optical design and fabrication : Optical fabrication

ToC Category:
Research Papers

History
Original Manuscript: September 18, 2002
Revised Manuscript: October 9, 2002
Published: November 4, 2002

Citation
Zhaoxin Wu, Hongbing Jiang, Zhaohui Zhang, Quan Sun, Hong Yang, and Qihuang Gong, "Morphological investigation at the front and rear surfaces of fused silica processed with femtosecond laser pulses in air," Opt. Express 10, 1244-1249 (2002)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-10-22-1244


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